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Extract from the Register of European Patents

EP About this file: EP1168422

EP1168422 - Method and apparatus for liquid-treating and drying a substrate [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  22.10.2010
Database last updated on 23.04.2024
Most recent event   Tooltip19.10.2012Lapse of the patent in a contracting state
New state(s): TR		published on 21.11.2012  [2012/47]
Applicant(s)For all designated states
IMEC
Kapeldreef 75
3001 Leuven / BE
[2009/33]
Former [2002/01]For all designated states
INTERUNIVERSITAIRE MICROELEKTRONICA CENTRUM VZW
Kapeldreef 75
3001 Leuven / BE
Inventor(s)01 / Mertens, Paul
Dijleweg 30A
2820 Bonheiden / BE
02 / Meuris, Marc
D. Liekenslaan 27
3140 Keerbergen / BE
 [2002/01]
Representative(s)Van Malderen, Joëlle, et al
pronovem - Office Van Malderen
Avenue Josse Goffin 158
1082 Bruxelles / BE
[N/P]
Former [2002/01]Van Malderen, Joelle, et al
Office Van Malderen, Place Reine Fabiola 6/1
1083 Bruxelles / BE
Application number, filing date01870138.326.06.2001
[2002/01]
Priority number, dateUS20000214693P27.06.2000         Original published format: US 214693 P
[2002/01]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1168422
Date:02.01.2002
Language:EN
[2002/01]
Type: A3 Search report 
No.:EP1168422
Date:22.03.2006
[2006/12]
Type: B1 Patent specification 
No.:EP1168422
Date:16.12.2009
Language:EN
[2009/51]
Search report(s)(Supplementary) European search report - dispatched on:EP08.02.2006
ClassificationIPC:H01L21/00, B08B7/04, B05D3/04, F26B3/04
[2006/12]
CPC:
H01L21/67057 (EP,US); B08B3/04 (EP,US); F26B13/10 (EP,US);
F26B13/28 (EP,US); H01L21/67028 (EP,US); Y10S134/902 (EP,US)
Former IPC [2002/01]H01L21/00
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   TR [2002/01]
TitleGerman:Verfahren und Vorrichtung zum Reinigen und Trocknen eines Substrats[2002/01]
English:Method and apparatus for liquid-treating and drying a substrate[2002/01]
French:Méthode et appareil pour nettoyer et sécher un substrat[2002/01]
Examination procedure07.09.2006Examination requested  [2006/43]
27.04.2007Despatch of a communication from the examining division (Time limit: M04)
27.04.2007Despatch of a communication from the examining division (Time limit: M06)
31.10.2007Reply to a communication from the examining division
20.12.2007Despatch of a communication from the examining division (Time limit: M06)
29.05.2008Reply to a communication from the examining division
30.06.2008Despatch of a communication from the examining division (Time limit: M04)
23.10.2008Reply to a communication from the examining division
17.12.2008Despatch of a communication from the examining division (Time limit: M04)
13.03.2009Reply to a communication from the examining division
02.06.2009Communication of intention to grant the patent
10.09.2009Fee for grant paid
10.09.2009Fee for publishing/printing paid
Opposition(s)17.09.2010No opposition filed within time limit [2010/47]
Fees paidRenewal fee
24.06.2003Renewal fee patent year 03
25.06.2004Renewal fee patent year 04
27.06.2005Renewal fee patent year 05
27.06.2006Renewal fee patent year 06
27.06.2007Renewal fee patent year 07
28.06.2008Renewal fee patent year 08
29.06.2009Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT16.12.2009
BE16.12.2009
CY16.12.2009
DK16.12.2009
FI16.12.2009
IT16.12.2009
NL16.12.2009
SE16.12.2009
TR16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
IE26.06.2010
LU26.06.2010
CH30.06.2010
LI30.06.2010
MC30.06.2010
[2012/47]
Former [2012/43]AT16.12.2009
BE16.12.2009
CY16.12.2009
DK16.12.2009
FI16.12.2009
IT16.12.2009
NL16.12.2009
SE16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
IE26.06.2010
LU26.06.2010
CH30.06.2010
LI30.06.2010
MC30.06.2010
Former [2011/20]AT16.12.2009
BE16.12.2009
CY16.12.2009
DK16.12.2009
FI16.12.2009
IT16.12.2009
NL16.12.2009
SE16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
IE26.06.2010
CH30.06.2010
LI30.06.2010
MC30.06.2010
Former [2011/19]AT16.12.2009
BE16.12.2009
CY16.12.2009
DK16.12.2009
FI16.12.2009
IT16.12.2009
NL16.12.2009
SE16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
IE26.06.2010
MC30.06.2010
Former [2011/14]AT16.12.2009
BE16.12.2009
CY16.12.2009
DK16.12.2009
FI16.12.2009
IT16.12.2009
NL16.12.2009
SE16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
MC30.06.2010
Former [2011/07]AT16.12.2009
BE16.12.2009
CY16.12.2009
DK16.12.2009
FI16.12.2009
NL16.12.2009
SE16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
MC30.06.2010
Former [2010/47]AT16.12.2009
BE16.12.2009
CY16.12.2009
FI16.12.2009
NL16.12.2009
SE16.12.2009
GR17.03.2010
ES27.03.2010
PT16.04.2010
Former [2010/37]AT16.12.2009
BE16.12.2009
FI16.12.2009
NL16.12.2009
SE16.12.2009
ES27.03.2010
PT16.04.2010
Former [2010/35]AT16.12.2009
FI16.12.2009
NL16.12.2009
SE16.12.2009
ES27.03.2010
PT16.04.2010
Former [2010/32]AT16.12.2009
FI16.12.2009
SE16.12.2009
ES27.03.2010
Former [2010/30]AT16.12.2009
FI16.12.2009
SE16.12.2009
Former [2010/22]FI16.12.2009
SE16.12.2009
Documents cited:Search[X]JPH10189528  ;
 [X]US3865298  (ALLEN TRAVIS A, et al) [X] 1-23 * column 2, line 29 - column 5, line 2; figures 1,3,4 *;
 [X]US4569695  (YAMASHITA HIROMI [JP], et al) [X] 1-23 * column 6, line 1 - line 35; figure 5 *;
 [XA]US5714203  (SCHELLENBERGER WILHELM [DE], et al) [X] 1-9 * column 4, line 38 - line 58; figure 1 *[A] 10-23
 [X]  - PATENT ABSTRACTS OF JAPAN, (19981031), vol. 1998, no. 12, & JP10189528 A 19980721 (DAINIPPON SCREEN MFG CO LTD) [X] 1-23 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.