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Extract from the Register of European Patents

EP About this file: EP1457583

EP1457583 - Mechanical enhancement of dense and porous organosilicate materials by UV exposure [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  06.04.2018
Database last updated on 23.04.2024
FormerThe patent has been granted
Status updated on  28.04.2017
FormerGrant of patent is intended
Status updated on  12.12.2016
Most recent event   Tooltip26.06.2020Lapse of the patent in a contracting state
New state(s): CY		published on 29.07.2020  [2020/31]
Applicant(s)For all designated states
Versum Materials US, LLC
8555 River Parkway
Tempe, AZ 85284 / US
[2017/38]
Former [2004/38]For all designated states
AIR PRODUCTS AND CHEMICALS, INC.
7201 Hamilton Boulevard
Allentown, PA 18195-1501 / US
Inventor(s)01 / Lukas, Aaron Scott
107 Finch Run
Lansdale PA 19446 / US
02 / O'Neill, Mark Leonard
830 N. 30th Street
Allentown PA 18104 / US
03 / Vincent, Jean Louise
3943 Suncrest Lane
Bethlehem PA 18020 / US
04 / Vrtis, Raymond Nicholas
1510 Randi Lane
Orefield PA 18069 / US
05 / Bitner, Mark Daniel
17 East High Street
Nazareth PA 18064 / US
06 / Karwacki, Eugene Joseph, Jr.
5620 Snowdrift Lane
Orefield PA 18069 / US
 [2004/38]
Representative(s)Kador & Partner Part mbB
Corneliusstraße 15
80469 München / DE
[N/P]
Former [2017/22]Kador & Partner
Corneliusstraße 15
80469 München / DE
Former [2004/38]Kador & Partner
Corneliusstrasse 15
80469 München / DE
Application number, filing date04004877.902.03.2004
[2004/38]
Priority number, dateUS2003062435721.07.2003         Original published format: US 624357
US2003037946604.03.2003         Original published format: US 379466
[2004/38]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1457583
Date:15.09.2004
Language:EN
[2004/38]
Type: A3 Search report 
No.:EP1457583
Date:17.02.2010
[2010/07]
Type: B1 Patent specification 
No.:EP1457583
Date:31.05.2017
Language:EN
[2017/22]
Type: B8 Corrected title page of specification 
No.:EP1457583
Date:11.10.2017
[2017/41]
Search report(s)(Supplementary) European search report - dispatched on:EP19.01.2010
ClassificationIPC:H01L21/316, C23C16/40, C23C16/56, H01L21/3105
[2016/51]
CPC:
H01L21/02126 (EP); E21B4/14 (KR); C23C16/401 (EP);
C23C16/56 (EP); H01L21/02203 (EP); H01L21/02211 (EP);
H01L21/02216 (EP); H01L21/02274 (EP); H01L21/02348 (EP);
H01L21/3105 (EP); E21B33/138 (KR) (-)
Former IPC [2004/38]C23C16/56, C23C16/40, H01L21/31
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2017/22]
Former [2010/42]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Former [2004/38]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Mechanische Verstärkung von dichten und porösen Organosilikatmaterialien durch UV-Bestrahlung[2004/38]
English:Mechanical enhancement of dense and porous organosilicate materials by UV exposure[2004/38]
French:Amelioration de la stabilite mechanique de materiaux organosilicate denses ou poreux par rayonnement UV[2004/38]
Examination procedure11.05.2010Examination requested  [2010/25]
30.08.2010Despatch of a communication from the examining division (Time limit: M04)
30.08.2010Invitation to provide information on prior art
03.09.2010Reply to a communication from the examining division
03.09.2010Reply to the invitation to provide information on prior art
16.08.2011Despatch of a communication from the examining division (Time limit: M04)
23.12.2011Reply to a communication from the examining division
09.11.2016Date of oral proceedings
24.11.2016Minutes of oral proceedings despatched
13.12.2016Communication of intention to grant the patent
11.04.2017Fee for grant paid
11.04.2017Fee for publishing/printing paid
11.04.2017Receipt of the translation of the claim(s)
Divisional application(s)EP17167460.9  / EP3231892
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  30.08.2010
Opposition(s)01.03.2018No opposition filed within time limit [2018/19]
Fees paidRenewal fee
06.03.2006Renewal fee patent year 03
05.03.2007Renewal fee patent year 04
10.03.2008Renewal fee patent year 05
06.03.2009Renewal fee patent year 06
08.03.2010Renewal fee patent year 07
10.03.2011Renewal fee patent year 08
07.03.2012Renewal fee patent year 09
07.03.2013Renewal fee patent year 10
07.03.2014Renewal fee patent year 11
06.03.2015Renewal fee patent year 12
07.03.2016Renewal fee patent year 13
07.03.2017Renewal fee patent year 14
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU02.03.2004
AT31.05.2017
CY31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
MC31.05.2017
PL31.05.2017
PT31.05.2017
RO31.05.2017
SE31.05.2017
SI31.05.2017
SK31.05.2017
TR31.05.2017
BG31.08.2017
GR01.09.2017
[2020/31]
Former [2020/28]HU02.03.2004
AT31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
MC31.05.2017
PL31.05.2017
PT31.05.2017
RO31.05.2017
SE31.05.2017
SI31.05.2017
SK31.05.2017
TR31.05.2017
BG31.08.2017
GR01.09.2017
Former [2020/15]AT31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
MC31.05.2017
PL31.05.2017
RO31.05.2017
SE31.05.2017
SI31.05.2017
SK31.05.2017
TR31.05.2017
BG31.08.2017
GR01.09.2017
Former [2018/52]AT31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
MC31.05.2017
PL31.05.2017
RO31.05.2017
SE31.05.2017
SI31.05.2017
SK31.05.2017
BG31.08.2017
GR01.09.2017
Former [2018/25]AT31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
PL31.05.2017
RO31.05.2017
SE31.05.2017
SI31.05.2017
SK31.05.2017
BG31.08.2017
GR01.09.2017
Former [2018/11]AT31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
PL31.05.2017
RO31.05.2017
SE31.05.2017
SK31.05.2017
BG31.08.2017
GR01.09.2017
Former [2018/10]AT31.05.2017
CZ31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
RO31.05.2017
SE31.05.2017
SK31.05.2017
BG31.08.2017
GR01.09.2017
Former [2018/09]AT31.05.2017
DK31.05.2017
EE31.05.2017
ES31.05.2017
FI31.05.2017
SE31.05.2017
BG31.08.2017
GR01.09.2017
Former [2017/50]AT31.05.2017
ES31.05.2017
FI31.05.2017
SE31.05.2017
BG31.08.2017
GR01.09.2017
Former [2017/49]AT31.05.2017
ES31.05.2017
FI31.05.2017
GR01.09.2017
Documents cited:Search[X]EP0537364  (SEMICONDUCTOR PROCESS LAB CO [JP], et al) [X] 1-14,17,18 * column 12, line 20 - column 13, line 40 *;
 [X]EP0575650  (SEMICONDUCTOR PROCESS LAB CO [JP], et al) [X] 1-14,17,18 * column 2, line 39 - column 3, line 11 * * column 4, line 22 - column 7, line 31 * * column 17, line 35 - column 19, line 40 *;
 [X]EP1122333  (MOTOROLA INC [US]) [X] 1-14,17,18 * paragraphs [0001] , [0002] , [0005] - [0009] - [0012] *;
 [X]US2002065331  (ZAMPINI ANTHONY [US], et al) [X] 30-37 * paragraphs [0016] - [0018] - [0076] - [0078] - [0081] , [0082] *;
 [XA]EP1225194  (AIR PROD & CHEM [US]) [X] 15,16,19-21,24,25 * paragraphs [0030] - [0041] - [0049] - [0080]; tables 1-3 * [A] 1-14,17,18,22,23,26-37;
 [XA]US2002119676  (AOI NOBUO [JP]) [X] 15,16,19-21,26-29 * paragraphs [0001] , [0012] , [0013] , [0018] , [0020] , [0022] - [0025] - [0047] , [0048] , [0051] - [0060] - [0075] , [0076] * [A] 1-14,17,18,22-25,32-37;
 [PXD]US2003054115  (ALBANO RALPH [US], et al) [PXD] 1-14,17,18 * abstract * * paragraphs [0014] - [0016] - [0021] - [0028] - [0063] - [0087] *;
 [PXL]EP1354980  (AIR PROD & CHEM [US]) [PXL] 15,16,19,21-25 * L: Priority; paragraphs [0006] - [0008] - [0015] - [0039] - [0046] - [0064] - [0066] , [0076] , [0077] , [0083] - [0088] - [0091] - [0098] *;
 [PXL]US2003198742  (VRTIS RAYMOND NICHOLAS [US], et al) [PXL] 30,31 * L: Priority; paragraphs [0129] - [0133] - [0137] - [0145] *;
 [E]EP1420439  (AIR PROD & CHEM [US]) [E] 15,16,19,21-23,26 * paragraphs [0001] , [0011] - [0015] - [0024] , [0025] , [0030] , [0031] , [0054] , [0059] , [0075] , [0100]; examples 1-6; claims 26-29 *;
 [E]US2004096672  (LUKAS AARON SCOTT [US], et al) [E] 15,16,19,21-23,26* paragraphs [0001] , [0011] - [0015] - [0024] , [0025] , [0030] , [0031] , [0054] , [0059] , [0075] , [0100]; examples 1-6 *;
 [E]EP1464726  (AIR PROD & CHEM [US]) [E] 1-14,17,18 * paragraphs [0010] - [0013] - [0090] - [0095] *;
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DOI:   http://dx.doi.org/10.1063/1.117594
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DOI:   http://dx.doi.org/10.1063/1.1392976
 [A]  - WU Z-C ET AL, "PHYSICAL AND ELECTRICAL CHARACTERISTICS OF METHYLSILANE- AND TRIMETHYLSILANE-DOPED LOW DIELECTRIC CONSTANT CHEMICAL VAPOR DEPOSITED OXIDES", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ELECTROCHEMICAL SOCIETY. MANCHESTER, NEW HAMPSHIRE, US, (20010601), vol. 148, no. 6, ISSN 0013-4651, pages F127 - F132, XP001058314 [A] 15,16,19-29 * the whole document *

DOI:   http://dx.doi.org/10.1149/1.1369373
ExaminationWO0223629
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DOI:   http://dx.doi.org/10.1063/1.367343
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DOI:   http://dx.doi.org/10.1002/1521-4095(200006)12:13<985::AID-ADMA985>3.0.CO;2-#
    - C. Waldfried ET AL, "Single wafer RapidCuring/spl trade/ of porous low-k materials", Proceedings of the IEEE 2002 International Interconnect Technology Conference, 2002, (20020101), doi:10.1109/IITC.2002.1014941, ISBN 978-0-7803-7216-0, pages 226 - 228, XP055246289

DOI:   http://dx.doi.org/10.1109/IITC.2002.1014941
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 WO0129052
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 EP1122333
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 JP2001257207
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The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.