EP2022083 - SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTOR FILMS [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 01.05.2009 Database last updated on 19.02.2019 | Most recent event Tooltip | 01.05.2009 | Withdrawal of application | published on 03.06.2009 [2009/23] | Applicant(s) | For all designated states ASM America, Inc. 3440 East University Drive Phoenix, AZ 85034-7200 / US | [2009/07] | Inventor(s) | 01 /
BAUER, Matthias 7205 S. Golfisde Lane Phoenix, Arizona 85042 / US | 02 /
WEEKS, Keith, Doran 730 S. Golden Key Gilbert, Arizona 85233 / US | [2009/07] | Representative(s) | polypatent Braunsberger Feld 29 51429 Bergisch Gladbach / DE | [N/P] |
Former [2009/07] | Polypatent Braunsberger Feld 29 51429 Bergisch Gladbach / DE | Application number, filing date | 07777014.7 | 11.05.2007 | [2009/07] | WO2007US11464 | Priority number, date | US20060811703P | 07.06.2006 Original published format: US 811703 P | US20060536463 | 28.09.2006 Original published format: US 536463 | [2009/07] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2007145758 | Date: | 21.12.2007 | Language: | EN | [2007/51] | Type: | A2 Application without search report | No.: | EP2022083 | Date: | 11.02.2009 | Language: | EN | The application has been published by WIPO in one of the EPO official languages on 21.12.2007 | [2009/07] | Search report(s) | International search report - published on: | EP | 07.02.2008 | Classification | International: | H01L21/20 | [2009/07] | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2009/07] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | RS | Not yet paid | Title | German: | SELEKTIVE EPITAKTISCHE BILDUNG VON HALBLEITERSCHICHTEN | [2009/07] | English: | SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTOR FILMS | [2009/07] | French: | FORMATION DE COUCHES À SEMI-CONDUCTEUR PAR ÉPITAXIE SÉLECTIVE | [2009/07] | Entry into regional phase | 12.12.2008 | National basic fee paid | 12.12.2008 | Designation fee(s) paid | 12.12.2008 | Examination fee paid | Examination procedure | 12.12.2008 | Examination requested [2009/07] | 11.02.2009 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | 12.02.2009 | Amendment by applicant (claims and/or description) | 17.04.2009 | Application withdrawn by applicant [2009/23] | Cited in | International search | [X]US2006115934 (KIM YIHWAN [US], et al) [X] 1-14,16,17,25-28,30-43,45,46 * paragraphs [0019] - [0030]; claim - *; | [X]US2005176220 (KANEMOTO KEI [JP]) [X] 1-14,16,17,25-28,30-43,45,46 * paragraphs [0064] - [0074]; claim - *; | [X]US2002022347 (PARK JUNG-WOO [KR], et al) [X] 1-14,16,17,25-28,30-43,45,46 * paragraphs [0021] - [0028]; figure 1; claim - *; | [A]US2004185665 (KISHIMOTO DAISUKE [JP], et al) [A] 1-46 * paragraphs [0036] - [0066]; figure - *; | [PX]US2007006800 (LEE DEOK-HYUNG [KR], et al) [PX] 15,18-24,29,44 * paragraphs [0035] , [0036] , [0059] , [0061]; figure 3 * | [X] - CHOWDHURY A I ET AL, "IN-SITU REAL-TIME MASS SPECTROSCOPIC SENSING AND MASS BALANCE MODELING OF SELECTIVE AREA SILICON PECVD", AIP CONFERENCE PROCEEDINGS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK,NY, US, (19980323), no. 449, ISSN 0094-243X, pages 363 - 367, XP009041607 [X] 1-14,16,17,25-28,30-43,45,46 * page 363 - page 364 * | [X] - SMITH L L ET AL, "Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: Surface modification for controlled nucleation", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. VACUUM, SURFACES AND FILMS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK, NY, US, (199805), vol. 16, no. 3, ISSN 0734-2101, pages 1316 - 1320, XP012003944 [X] 1-14,16,17,25-28,30-43,45,46 * Abstract; II. EXPERIMENT * DOI: http://dx.doi.org/10.1116/1.581144 |