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Extract from the Register of European Patents

EP About this file: EP2555234

EP2555234 - Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  25.06.2021
Database last updated on 23.04.2024
FormerThe patent has been granted
Status updated on  17.07.2020
FormerGrant of patent is intended
Status updated on  03.05.2020
FormerRequest for examination was made
Status updated on  09.03.2020
FormerGrant of patent is intended
Status updated on  14.11.2019
FormerRequest for examination was made
Status updated on  22.12.2017
Most recent event   Tooltip16.06.2023Lapse of the patent in a contracting state
New state(s): HU		published on 19.07.2023  [2023/29]
Applicant(s)For all designated states
ASML Holding N.V.
De Run 6501
5504 DR Veldhoven / NL
[2013/06]
Inventor(s)01 / Helmus, Peter
29 Reynolds Farm Road
New Milford, CT 6776 / US
02 / Wilklow, Ronald
207 Puritan Road
Fairfield, CT 6824 / US
03 / Deng, Jianguo
77 Danburry Road
Wilton CT 06897 / US
 [2015/37]
Former [2013/06]01 / Helmus, Peter
29 Reynolds Farm Road
New Milford, CT 6776 / US
02 / Wilklow, Ronald
207 Puritan Road
Fairfield, CT 6824 / US
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[N/P]
Former [2020/34]Ketting, Alfred, et al
ASML Netherlands B.V.
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
Former [2013/06]Siem, Max Yoe Shé, et al
ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
Application number, filing date12171001.606.06.2012
[2013/06]
Priority number, dateUS201161514320P02.08.2011         Original published format: US 201161514320 P
[2013/06]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2555234
Date:06.02.2013
Language:EN
[2013/06]
Type: A3 Search report 
No.:EP2555234
Date:14.06.2017
Language:EN
[2017/24]
Type: B1 Patent specification 
No.:EP2555234
Date:19.08.2020
Language:EN
[2020/34]
Search report(s)(Supplementary) European search report - dispatched on:EP17.05.2017
ClassificationIPC:G03F7/20, H01L21/683
[2019/46]
CPC:
H01L21/6831 (EP,US); G03F7/70708 (EP,US); H01L21/6833 (EP,US);
Y10T156/10 (EP,US)
Former IPC [2013/06]H01L21/683
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/04]
Former [2013/06]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:Elektrostatische Klemme, lithografische Vorrichtung und Verfahren zur Herstellung einer elektrostatischen Klemme[2013/06]
English:Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp[2013/06]
French:Dispositif de maintien électrostatique, appareil lithographique et procédé de fabrication d'un dispositif de maintien électrostatique[2013/06]
Examination procedure06.06.2012Date on which the examining division has become responsible
13.12.2017Amendment by applicant (claims and/or description)
13.12.2017Examination requested  [2018/04]
15.11.2019Communication of intention to grant the patent
04.03.2020Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
04.03.2020Fee for grant paid
04.03.2020Fee for publishing/printing paid
04.05.2020Communication of intention to grant the patent
09.07.2020Fee for grant paid
09.07.2020Fee for publishing/printing paid
09.07.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  15.11.2019
Opposition(s)20.05.2021No opposition filed within time limit [2021/30]
Fees paidRenewal fee
25.06.2014Renewal fee patent year 03
19.06.2015Renewal fee patent year 04
27.06.2016Renewal fee patent year 05
27.06.2017Renewal fee patent year 06
27.06.2018Renewal fee patent year 07
25.06.2019Renewal fee patent year 08
24.06.2020Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU06.06.2012
AL19.08.2020
AT19.08.2020
CY19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
IT19.08.2020
LT19.08.2020
LV19.08.2020
MC19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SI19.08.2020
SK19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
[2023/29]
Former [2023/24]AL19.08.2020
AT19.08.2020
CY19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
IT19.08.2020
LT19.08.2020
LV19.08.2020
MC19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SI19.08.2020
SK19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2022/08]AL19.08.2020
AT19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
IT19.08.2020
LT19.08.2020
LV19.08.2020
MC19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SI19.08.2020
SK19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/36]AL19.08.2020
AT19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
IT19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SI19.08.2020
SK19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/34]AL19.08.2020
AT19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
IT19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SK19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/28]AL19.08.2020
AT19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SK19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/25]AL19.08.2020
AT19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
ES19.08.2020
FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/24]AT19.08.2020
CZ19.08.2020
DK19.08.2020
EE19.08.2020
FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/23]CZ19.08.2020
DK19.08.2020
EE19.08.2020
FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
SM19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/22]CZ19.08.2020
DK19.08.2020
EE19.08.2020
FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RO19.08.2020
RS19.08.2020
SE19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/20]DK19.08.2020
FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RS19.08.2020
SE19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/12]FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
NL19.08.2020
PL19.08.2020
RS19.08.2020
SE19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/10]FI19.08.2020
HR19.08.2020
LT19.08.2020
LV19.08.2020
PL19.08.2020
RS19.08.2020
SE19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
IS19.12.2020
PT21.12.2020
Former [2021/09]FI19.08.2020
LT19.08.2020
SE19.08.2020
BG19.11.2020
NO19.11.2020
GR20.11.2020
PT21.12.2020
Former [2021/08]FI19.08.2020
LT19.08.2020
SE19.08.2020
BG19.11.2020
NO19.11.2020
PT21.12.2020
Former [2021/07]FI19.08.2020
LT19.08.2020
NO19.11.2020
Documents cited:Search[XI]US2006002052  (LAGOS BRYAN C [US]) [X] 1,2,5,7-11,13 * abstract * * claims 1-26 * * page 2, paragraphs 19,20 * * page 3, paragraph 25 * * page 4, paragraph 33 * * figures 1,5 * [I] 3,4,6,12,14,15;
 [A]JP2002170871  (KYOCERA CORP) [A] 1-15 * abstract * * page 3, paragraph 16 * * figures 1,2 *;
 [A]JP2008218978  (ZAIKEN KK) [A] 1-15 * abstract * * page 10, paragraph 34 * * figure 9 *;
 [A]WO2010004915  (CREATIVE TECH CORP [JP], et al) [A] 1-15 * abstract * * figures 1-6 *
ExaminationJP2009176928
by applicantUS6864957
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.