Extract from the Register of European Patents

Citations: EP2742167

Cited inInternational search
Type:Patent literature
Publication No.:US2011076421  [A]
 (LEE SANG IN [US]) [A] 1-13 * page 8, paragraph 108 - paragraph 109; figures 6, 4, 2a, 24a, 24b,25,26 * * page 9, paragraph 118 - page 10, paragraph 124 * * the whole document * * page 2, paragraph 39 - paragraph 40 * * page 4, paragraph 54 *;
Type:Patent literature
Publication No.:EP2360293  [AP]
 (TNO [NL]) [AP] 1,3,5-10,13 * the whole document *;
Type:Patent literature
Publication No.:US2004067641  [A]
 (YUDOVSKY JOSEPH [US]) [A] 1-13 * figures 1,2,5 *;
Type:Patent literature
Publication No.:US2005172897  [A]
 (JANSEN FRANK [US]) [A] 1-13 * page 2, paragraph 16; figure 1 *;
Type:Non-patent literature
Publication information:[A]  - P.S. MAYDANNIK ET AL, "An atomic layer deposition process for moving flexible substrates", CHEMICAL ENGINEERING JOURNAL, (20110601), vol. 171, no. 1, doi:10.1016/j.cej.2011.03.097, ISSN 1385-8947, pages 345 - 349, XP055016206 [A] 1-13 * the whole document *
DOI: http://dx.doi.org/10.1016/j.cej.2011.03.097
Type:Non-patent literature
Publication information:[T]  - PAUL POODT, "Review Article:Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition", J. VAC. SCI. TECHNOL., (20111214), vol. 30, no. 1, page 010802-1, XP002666916 [T] 1-13 * the whole document *
DOI: http://dx.doi.org/10.1116/1.3670745
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