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EP3376523
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EP About this file: EP3376523
| EP3376523 - EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 06.12.2019 Database last updated on 22.01.2025 | |
| Former | Grant of patent is intended Status updated on 04.03.2019 | ||
| Former | Request for examination was made Status updated on 09.11.2018 | ||
| Former | The application has been published Status updated on 17.08.2018 | Most recent event Tooltip | 06.12.2019 | Application deemed to be withdrawn | published on 08.01.2020 [2020/02] | Applicant(s) | For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP | [2018/38] | Inventor(s) | 01 /
NAGASAKA, Hiroyuki c/o Nikon Corporation 15-3, Konan2-chome Mianto-ku Tokyo, 108-6290 / JP | [2018/38] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2018/38] | Application number, filing date | 17210252.7 | 27.12.2004 | [2018/38] | Priority number, date | JP20040000236 | 05.01.2004 Original published format: JP 2004000236 | [2018/38] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3376523 | Date: | 19.09.2018 | Language: | EN | [2018/38] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 13.08.2018 | Classification | IPC: | G03F7/20, H01L21/027 | [2019/08] | CPC: |
G03F7/70725 (EP,KR,US);
G03F7/2041 (KR,US);
G03F7/70866 (US);
G03B27/528 (KR);
G03F7/70341 (EP,KR,US);
G03F7/70716 (KR);
G03F7/70858 (KR)
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| Former IPC [2018/38] | H01L21/027, G03F7/20 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2018/50] |
| Former [2018/38] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG | [2018/38] | English: | EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD | [2018/38] | French: | APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE PRODUCTION D'UN DISPOSITIF | [2018/38] | Examination procedure | 30.10.2018 | Amendment by applicant (claims and/or description) | 30.10.2018 | Examination requested [2018/50] | 30.10.2018 | Date on which the examining division has become responsible | 05.03.2019 | Communication of intention to grant the patent | 16.07.2019 | Application deemed to be withdrawn, date of legal effect [2020/02] | 22.08.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2020/02] | Parent application(s) Tooltip | EP04808163.2 / EP1703548 | EP10003902.3 / EP2199859 | Fees paid | Renewal fee | 03.01.2018 | Renewal fee patent year 03 | 03.01.2018 | Renewal fee patent year 04 | 03.01.2018 | Renewal fee patent year 05 | 03.01.2018 | Renewal fee patent year 06 | 03.01.2018 | Renewal fee patent year 07 | 03.01.2018 | Renewal fee patent year 08 | 03.01.2018 | Renewal fee patent year 09 | 03.01.2018 | Renewal fee patent year 10 | 03.01.2018 | Renewal fee patent year 11 | 03.01.2018 | Renewal fee patent year 12 | 03.01.2018 | Renewal fee patent year 13 | 03.01.2018 | Renewal fee patent year 14 | 12.12.2018 | Renewal fee patent year 15 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]DD221563 (MIKROELEKTRONIK ZT FORSCH TECH [DD]) [A] 1-16 * abstract * * figures 1,3 * * pages 1,10,11, *; | [A]WO9949504 (NIKON CORP [JP], et al) [A] 1-16 * abstract ** figure 1 * | by applicant | JPS57117238 | JPH0465603 | JPH0653120 | JPH06124873 | JPH06188169 | JPH07176468 | JPH0837149 | US5528118 | JPH08166475 | JPH08330224 | US5623853 | JPH10163099 | JPH10214783 | US5825043 | JPH10303114 | JPH1116816 | US5874820 | JPH11135400 | WO9949504 | US5969441 | US6208407 | JP2002014005 | US6341007 | US6400441 | US6549269 | US6590634 | US2004020782 | WO2004019128 | WO2004055803 | WO2005JP05958 |