Extract from the Register of European Patents

Citations: EP3472669

Cited inInternational search
Type:Patent literature
Publication No.:EP0759578  [XYI]
 (COMMISSARIAT ENERGIE ATOMIQUE [FR]) [X] 1-3,5-8,12,13 * the whole document * [Y] 9-11,14,15 [I] 4;
Type:Patent literature
Publication No.:GB2253925  [XI]
 (POPOVICI DAN, et al) [X] 1-3,5-8,12,13 * claims 1,9-11 * [I] 4;
Type:Patent literature
Publication No.:EP0994378  [Y]
 (USHIO ELECTRIC INC [JP]) [Y] 9-11,14,15 * figure 1 *;
Type:Patent literature
Publication No.:EP1652009  [Y]
 (COMMISSARIAT ENERGIE ATOMIQUE [FR]) [Y] 9-11,14,15 * figures 2,5; claims 19,20 *;
Type:Non-patent literature
Publication information:[A]  - VARANASI KRIPA ET AL, "Spatial control in the heterogeneous nucleation of water", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, (20090831), vol. 95, no. 9, doi:10.1063/1.3200951, ISSN 0003-6951, pages 94101 - 94101, XP012122946 [A] 1-15 * the whole document *
DOI: http://dx.doi.org/10.1063/1.3200951
Cited inby applicant
Type:Non-patent literature
Publication information:   - XIANHUA WANG; FENG CHEN; HEWEI LIU; WEIWEI LIANG; QING YANG; JINHAI SI; XUN HOU, "Femtosecond laser-induced mesoporous structures on silicon surface", Optics Communications, (20110000), vol. 284, pages 317 - 321
Type:Non-patent literature
Publication information:   - YAQI MA; YIFAN XIA; JIANPENG LIU; SICHAO ZHANG; JINHAI SHAO; BING-RUI LU; YIFANG CHEN, "Processing study of SU-8 pillar profiles with high aspect ratio by electron-beam lithography", Microelectronic Engineering, (20160000), vol. 149, pages 141 - 144
Type:Non-patent literature
Publication information:   - NASSIR MOJARAD; JENS GOBRECHT; YASIN EKINCI, "Interference lithography at EUV and soft X-ray wavelengths: Principles, methods, and applications", Microelectronic Engineering, (20150000), vol. 143, pages 55 - 63
Type:Non-patent literature
Publication information:   - S. R. J. BRUECK, "Optical and Interferometric Lithography - Nanotechnology Enablers", FELLOW, PROCEEDINGS OF THE IEEE, (20051000), vol. 93, no. 10
Type:Non-patent literature
Publication information:   - BIN AI; YE YU; HELMUTH MÔHWALD; GANG ZHANG; BAI YANG, "Plasmonic films based on colloidal lithography", Advances in Colloid and Interface Science, (20140000), vol. 206, pages 5 - 16
Type:Non-patent literature
Publication information:   - ANNA KOSINOVA; DONG WANG; PETER SCHAAF; OLEG KOVALENKO; LEONID KLINGER; EUGEN RABKIN, "Fabrication of hollow gold nanoparticles by dewetting, dealloying and coarsening", Acta Materialia, (20160000), vol. 102, pages 108 - 115
Type:Non-patent literature
Publication information:   - N.VIGNESWARAN; FAHMI SAMSURI; BALU RANGANATHAN, PADMAPRIYA, "Recent Advances in Nano Patterning and Nano Imprint Lithography for Biological Applications", Procedia Engineering, (20140000), vol. 97, pages 1387 - 1398