EP4073832 - METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER COATED SUBSTRATES AND APPARATUS [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 16.09.2022 Database last updated on 11.11.2024 | |
Former | The international publication has been made Status updated on 18.06.2021 | ||
Former | unknown Status updated on 01.12.2020 | Most recent event Tooltip | 14.10.2024 | New entry: Renewal fee paid | Applicant(s) | For all designated states Evatec AG Hauptstrasse 1a 9477 Trübbach / CH | [2022/42] | Inventor(s) | 01 /
GOOD, Romeo Zollackerstrasse 6 8880 Walenstadt / CH | 02 /
SCHWYN THÖNY, Silvia Grofenbrüelstrasse 22 7323 Wangs / CH | 03 /
PADRUN, Marco Pardellgasse 14a 7304 Maienfeld / CH | 04 /
SCHÜNGEL, Edmund Schläppliweg 11 9470 Buchs / CH | 05 /
GEES, Silvio Bidemstrasse 51 7310 Bad Ragaz / CH | [2022/42] | Representative(s) | Troesch Scheidegger Werner AG Schwäntenmos 14 8126 Zumikon / CH | [2022/42] | Application number, filing date | 20811282.1 | 20.11.2020 | [2022/42] | WO2020EP82850 | Priority number, date | CH20190001620 | 13.12.2019 Original published format: CH 16202019 | [2022/42] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021115758 | Date: | 17.06.2021 | Language: | EN | [2021/24] | Type: | A1 Application with search report | No.: | EP4073832 | Date: | 19.10.2022 | Language: | EN | The application published by WIPO in one of the EPO official languages on 17.06.2021 takes the place of the publication of the European patent application. | [2022/42] | Search report(s) | International search report - published on: | EP | 17.06.2021 | Classification | IPC: | H01J37/34, C23C14/35, H01J37/32 | [2022/42] | CPC: |
H01J37/34 (EP);
C23C14/352 (EP,KR);
H01J37/3452 (EP,KR,US);
C23C14/0057 (US);
C23C14/0063 (US);
C23C14/14 (US);
C23C14/35 (US);
C23C14/505 (EP,KR,US);
H01J37/3244 (US);
H01J37/32761 (EP,US);
H01J37/32779 (EP);
H01J37/3405 (US);
H01J37/3408 (EP,KR,US);
H01J37/3423 (US);
H01J37/345 (EP);
H01J37/347 (EP,KR)
(-)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2022/42] | Title | German: | VERFAHREN ZUR SPUTTERBESCHICHTUNG VON SUBSTRATEN ODER ZUR HERSTELLUNG VON SPUTTERBESCHICHTETEN SUBSTRATEN UND VORRICHTUNGEN | [2022/42] | English: | METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER COATED SUBSTRATES AND APPARATUS | [2022/42] | French: | PROCÉDÉ DE REVÊTEMENT PAR PULVÉRISATION DE SUBSTRATS OU DE FABRICATION DE SUBSTRATS REVÊTUS PAR PULVÉRISATION ET APPAREIL | [2022/42] | Entry into regional phase | 02.05.2022 | National basic fee paid | 02.05.2022 | Designation fee(s) paid | 02.05.2022 | Examination fee paid | Examination procedure | 02.05.2022 | Examination requested [2022/42] | 02.05.2022 | Date on which the examining division has become responsible | 19.01.2023 | Amendment by applicant (claims and/or description) | Fees paid | Renewal fee | 11.11.2022 | Renewal fee patent year 03 | 25.10.2023 | Renewal fee patent year 04 | 14.10.2024 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]JPS63247366 (MATSUSHITA ELECTRIC IND CO LTD); | [YD]US5182003 (MAASS WOLFRAM [DE], et al); | [Y]EP2378538 (JDS UNIPHASE CORP [US]); | [A]WO2017042123 (EVATEC AG [CH]); | [Y]WO2019087724 (ULVAC INC [JP]) | by applicant | US5182003 |