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EP0111774
European procedure
Extract from the Register of European Patents
EP About this file: EP0111774
| EP0111774 - Method of manufacturing a minimum bird's beak recessed oxide isolation structure [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 08.06.1988 Database last updated on 22.04.2025 | Most recent event Tooltip | 08.06.1988 | No opposition filed within time limit | published on 27.07.1988 [1988/30] | Applicant(s) | For all designated states International Business Machines Corporation New Orchard Road Armonk, NY 10504 / US | [N/P] |
| Former [1984/26] | For all designated states International Business Machines Corporation Old Orchard Road Armonk, N.Y. 10504 / US | Inventor(s) | 01 /
Fabricius, Karen Ann 51 Wintergreen Avenue Newburgh New York 12550 / US | 02 /
Kemlage, Bernard Michael Ulster Landing Road Rt. 1, Box 344A Kingston New York 12401 / US | [1984/26] | Representative(s) | Mönig, Anton IBM Deutschland Informationssysteme GmbH, Patentwesen und Urheberrecht 70548 Stuttgart / DE | [N/P] |
| Former [1984/26] | Mönig, Anton, Dipl.-Ing. IBM Deutschland Informationssysteme GmbH, Patentwesen und Urheberrecht D-70548 Stuttgart / DE | Application number, filing date | 83111758.5 | 24.11.1983 | [1984/26] | Priority number, date | US19820450883 | 20.12.1982 Original published format: US 450883 | [1984/26] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0111774 | Date: | 27.06.1984 | Language: | EN | [1984/26] | Type: | B1 Patent specification | No.: | EP0111774 | Date: | 05.08.1987 | Language: | EN | [1987/32] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 23.02.1984 | Classification | IPC: | H01L21/76, H01L21/32 | [1984/26] | CPC: |
H01L21/76205 (EP,US);
H01L21/32 (EP,US)
| Designated contracting states | DE, FR, GB [1984/26] | Title | German: | Verfahren zum Herstellen einer Isolationsstruktur aus eingelassenem Oxid mit minimalem Vogelschnabel | [1984/26] | English: | Method of manufacturing a minimum bird's beak recessed oxide isolation structure | [1984/26] | French: | Procédé de fabrication d'une structure d'isolation d'oxyde encastrée, à bec d'oiseau minimal | [1984/26] | Examination procedure | 29.10.1984 | Examination requested [1985/02] | 11.02.1986 | Despatch of a communication from the examining division (Time limit: M04) | 24.05.1986 | Reply to a communication from the examining division | 21.10.1986 | Despatch of communication of intention to grant (Approval: ) | 30.01.1987 | Communication of intention to grant the patent | 11.02.1987 | Fee for grant paid | 11.02.1987 | Fee for publishing/printing paid | Opposition(s) | 06.05.1988 | No opposition filed within time limit [1988/30] | Fees paid | Renewal fee | 26.11.1985 | Renewal fee patent year 03 | 25.11.1986 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [AD]US3900350 (APPELS JOHANNES ARNOLDUS, et al) | [A] - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 24, no. 9, February 1982, New York B.M. KEMLAGE et al. "Fabrication of oxide isolation using an oxynitride/polysilicon mask", page 4756 | Examination | JPS547882 | EP0046501 | EP0051534 | - Patent Abstracts of Japan, 1979 p. 34E97 |