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Extract from the Register of European Patents

EP About this file: EP0642155

EP0642155 - Method of manufacturing semiconductor capacitor electrode [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  15.03.2002
Database last updated on 26.03.2025
Most recent event   Tooltip15.03.2002No opposition filed within time limitpublished on 02.05.2002  [2002/18]
Applicant(s)For all designated states
NEC Corporation
7-1, Shiba 5-chome Minato-ku
Tokyo 108-8001 / JP
[N/P]
Former [2001/19]For all designated states
NEC CORPORATION
7-1, Shiba 5-chome, Minato-ku
Tokyo / JP
Former [1995/10]For all designated states
NEC CORPORATION
7-1, Shiba 5-chome Minato-ku
Tokyo / JP
Inventor(s)01 / Toshiyuki, Hirota, c/o NEC Corporation
7-1, Shiba 5-chome, Minato-ku
Tokyo / JP
[1995/10]
Representative(s)Glawe, Delfs, Moll
Partnerschaft mbB von
Patent- und Rechtsanwälten
Postfach 26 01 62
80058 München / DE
[N/P]
Former [1995/10]Glawe, Delfs, Moll & Partner
Patentanwälte Postfach 26 01 62
D-80058 München / DE
Application number, filing date94113762.202.09.1994
[1995/10]
Priority number, dateJP1993021937003.09.1993         Original published format: JP 21937093
[1995/10]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0642155
Date:08.03.1995
Language:EN
[1995/10]
Type: B1 Patent specification 
No.:EP0642155
Date:09.05.2001
Language:EN
[2001/19]
Search report(s)(Supplementary) European search report - dispatched on:EP14.12.1994
ClassificationIPC:H01L21/3205, H01L27/108
[1995/10]
CPC:
H01L21/32134 (EP,US); H10D1/712 (EP,KR,US); H10B12/01 (EP,US);
Y10S438/964 (EP,US)
Designated contracting statesDE,   FR,   GB [1995/10]
TitleGerman:Verfahren zur Herstellung einer Halbleiter-Kondensator-Elektrode[1995/10]
English:Method of manufacturing semiconductor capacitor electrode[1995/10]
French:Procédé de manufacture d'une élctrode de condensateur semi-conducteur[1995/10]
Examination procedure27.01.1995Examination requested  [1995/13]
18.07.1996Despatch of a communication from the examining division (Time limit: M04)
27.11.1996Reply to a communication from the examining division
18.09.1997Despatch of a communication from the examining division (Time limit: M06)
30.03.1998Reply to a communication from the examining division
14.08.2000Despatch of communication of intention to grant (Approval: Yes)
02.10.2000Communication of intention to grant the patent
03.01.2001Fee for grant paid
03.01.2001Fee for publishing/printing paid
Opposition(s)12.02.2002No opposition filed within time limit [2002/18]
Fees paidRenewal fee
19.09.1996Renewal fee patent year 03
19.09.1997Renewal fee patent year 04
21.09.1998Renewal fee patent year 05
20.09.1999Renewal fee patent year 06
20.09.2000Renewal fee patent year 07
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Documents cited:Search[A]JPH04365369  ;
 [X]EP0553791  (NEC CORP [JP]);
 [X]EP0557590  (SAMSUNG ELECTRONICS CO LTD [KR]);
 [PX]EP0572943  (IBM [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.