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EP0837491
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EP About this file: EP0837491
| EP0837491 - Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 04.09.2015 Database last updated on 13.04.2024 | Most recent event Tooltip | 04.09.2015 | Application deemed to be withdrawn | published on 07.10.2015 [2015/41] | Applicant(s) | For all designated states NIHON SHINKU GIJUTSU KABUSHIKI KAISHA 2500, Hagisono Chigasaki-shi Kanagawa 253 / JP | [N/P] |
| Former [1998/17] | For all designated states Nihon Shinku Gijutsu Kabushiki Kaisha 2500, Hagisono Chigasaki-shi, Kanagawa 253 / JP | Inventor(s) | 01 /
Obinata, Hisaharu, c/o Nihon Shinku Gijutsu K.K. Fujisusono Kojo, 1220-14, Suyama Susono-shi, Sizuoka 410-12 / JP | 02 /
Tamura, Morohisa, c/o Nihon Shinku Gijutsu K.K. Fujisusono Kojo, 1220-14, Suyama Susono-shi, Sizuoka 410-12 / JP | 03 /
Higuchi, Yasushi, c/o Nihon Shinku Gijutsu K.K. Chiba Inst. for super Mat., 523, Yokota Sanbu-cho Sanbu-gun, Chiba 289-12 / JP | 04 /
Komatsu, Takashi, c/o Nihon Shinku Gijutsu K.K. Chiba Inst. for super Mat., 523, Yokota Sanbu-cho Sanbu-gun, Chiba 289-12 / JP | [1998/17] | Representative(s) | Körber, Martin Hans, et al Mitscherlich PartmbB Patent- und Rechtsanwälte Sonnenstrasse 33 80331 München / DE | [N/P] |
| Former [2012/48] | Körber, Martin Hans, et al Mitscherlich & Partner Patent- und Rechtsanwälte Sonnenstrasse 33 80331 München / DE | ||
| Former [1998/17] | Körber, Wolfhart, Dr. rer.nat., et al Patentanwälte Mitscherlich & Partner, Sonnenstrasse 33 80331 München / DE | Application number, filing date | 97117978.3 | 16.10.1997 | [1998/17] | Priority number, date | JP19960297742 | 21.10.1996 Original published format: JP 29774296 | JP19970139237 | 14.05.1997 Original published format: JP 13923797 | JP19970275283 | 22.09.1997 Original published format: JP 27528397 | [1998/17] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0837491 | Date: | 22.04.1998 | Language: | EN | [1998/17] | Type: | A3 Search report | No.: | EP0837491 | Date: | 15.11.2000 | [2000/46] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 28.09.2000 | Classification | IPC: | H01J37/34, C23C14/34 | [1998/17] | CPC: |
H01J37/3429 (EP,KR,US);
C23C14/3407 (EP,KR,US);
C23C14/3464 (KR);
H01J37/34 (EP,US);
H01J37/3447 (EP,US);
H01J2237/3327 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2001/31] |
| Former [1998/17] | AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Vorrichtung zusammengesetzter Zerstäubungskathode und Zerstäubungsgerät mit solcher zusammengesetzten Kathode | [1998/17] | English: | Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly | [1998/17] | French: | Dispositif de cathode composite de pulvérisation, et appareil de pulvérisation comportant une telle cathode composite | [1998/17] | Examination procedure | 17.04.2001 | Examination requested [2001/24] | 02.07.2001 | Amendment by applicant (claims and/or description) | 14.07.2006 | Despatch of a communication from the examining division (Time limit: M06) | 05.01.2007 | Reply to a communication from the examining division | 15.09.2010 | Despatch of a communication from the examining division (Time limit: M06) | 23.03.2011 | Reply to a communication from the examining division | 01.05.2015 | Application deemed to be withdrawn, date of legal effect [2015/41] | 29.05.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2015/41] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 14.07.2006 | Fees paid | Renewal fee | 29.10.1999 | Renewal fee patent year 03 | 30.10.2000 | Renewal fee patent year 04 | 30.10.2001 | Renewal fee patent year 05 | 30.10.2002 | Renewal fee patent year 06 | 30.10.2003 | Renewal fee patent year 07 | 29.10.2004 | Renewal fee patent year 08 | 28.10.2005 | Renewal fee patent year 09 | 30.10.2006 | Renewal fee patent year 10 | 30.10.2007 | Renewal fee patent year 11 | 30.10.2008 | Renewal fee patent year 12 | 30.10.2009 | Renewal fee patent year 13 | 29.10.2010 | Renewal fee patent year 14 | 27.10.2011 | Renewal fee patent year 15 | 26.10.2012 | Renewal fee patent year 16 | 29.10.2013 | Renewal fee patent year 17 | Penalty fee | Additional fee for renewal fee | 31.10.2014 | 18 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XY]FR2573441 (CIT ALCATEL [FR]) [X] 1,3-5,7,9,10 * page 1, line 28 - page 2, line 15 * * page 3, line 3 - line 7 * * page 3, line 14 - line 18 * * page 3, line 29 - line 34 * * page 4, line 6 - line 12 * * figures 1,2 * [Y] 6; | [Y]US3864239 (FLETCHER JAMES C ADMINISTRATOR, et al) [Y] 6 * column 3, line 33 - line 45 *; | [A]KR960005377Y (HYUNDAI ELECTRONICS IND [KR]) [A] 2,8; | [PA]US5597462 (CHO GYOUNG S [KR]) [PA] 2,8 * figures 3,5,6 * * column 1, line 41 - line 45 * * column 3, line 5 - line 15 * |