EP0951057 - SUBSTRATE FLATTENING METHOD [Right-click to bookmark this link] | |||
Former [1999/42] | SUBSTRATE FLATTENING METHOD, AND FILM-COATED SUBSTRATE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | ||
[2003/36] | Status | No opposition filed within time limit Status updated on 11.03.2005 Database last updated on 11.11.2024 | Most recent event Tooltip | 11.03.2005 | No opposition filed within time limit | published on 27.04.2005 [2005/17] | Applicant(s) | For all designated states CATALYSTS & CHEMICALS INDUSTRIES CO., LTD. 580, Horikawa-cho, Saiwai-ku Kawasaki-shi Kanagawa 210 / JP | For all designated states NIPPON TELEGRAPH AND TELEPHONE CORPORATION 19-2 Nishi-Shinjuku 3-chome Shinjuku-ku Tokyo 163-19 / JP | [N/P] |
Former [2003/04] | For all designated states Catalysts & Chemicals Industries Co., Ltd. 580, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa 210 / JP | ||
For all designated states NIPPON TELEGRAPH AND TELEPHONE CORPORATION 19-2 Nishi-Shinjuku 3-chome Shinjuku-ku, Tokyo 163-19 / JP | |||
Former [1999/42] | For all designated states Catalysts & Chemicals Industries Co., Ltd. 580, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa 210 / JP | Inventor(s) | 01 /
MURAGUCHI, Ryo-Catalysts & Chemical Ind., Co., Ltd 13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-shi Fukuoka 808 / JP | 02 /
NAKASHIMA, Akira-Catalysts & Chemical Ind. Co. Ltd 13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-shi Fukuoka 808 / JP | 03 /
TONAI, Atsushi-Catalysts & Chemical Ind., Co., Ltd 13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-sh Fukuoka 808 / JP | 04 /
KOMATSU, Michio-Catalysts & Chemical Ind., Co., ltd 13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-shi Fukuoka 808 / JP | 05 /
MACHIDA, Katsuyuki 2-7-3, Mouridai,Atsugi-shi Kanagawa 243 / JP | 06 /
KYURAGI, Hakaru 6-6-9, Kanai,Machida-shi Tokyo 194-01 / JP | 07 /
IMAI, Kazuo 2-9-8, Morinosato,Atsugi-shi Kanagawa 243-01 / JP | [1999/42] | Representative(s) | Calamita, Roberto Dehns St Bride's House 10 Salisbury Square London EC4Y 8JD / GB | [N/P] |
Former [1999/42] | Calamita, Roberto Frank B. Dehn & Co., European Patent Attorneys, 179 Queen Victoria Street London EC4V 4EL / GB | Application number, filing date | 97909715.1 | 31.10.1997 | [1999/42] | WO1997JP03979 | Priority number, date | JP19960298892 | 11.11.1996 Original published format: JP 29889296 | JP19960308427 | 19.11.1996 Original published format: JP 30842796 | [1999/42] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9821750 | Date: | 22.05.1998 | Language: | EN | [1998/20] | Type: | A1 Application with search report | No.: | EP0951057 | Date: | 20.10.1999 | Language: | EN | The application published by WIPO in one of the EPO official languages on 22.05.1998 takes the place of the publication of the European patent application. | [1999/42] | Type: | B1 Patent specification | No.: | EP0951057 | Date: | 06.05.2004 | Language: | EN | [2004/19] | Search report(s) | International search report - published on: | JP | 22.05.1998 | (Supplementary) European search report - dispatched on: | EP | 18.02.2000 | Classification | IPC: | H01L21/316, G11B5/84, G02F1/1333, H01L21/3205, H01L21/768, H01L27/14, B05D7/00, B05D7/24, C09D183/16, H01L21/3105, H01L21/312 | [2000/14] | CPC: |
B05D1/286 (EP,US);
H01L21/31051 (KR);
G11B5/8404 (EP,US);
H01L21/02123 (KR);
H01L21/02282 (KR);
H01L21/32055 (KR);
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Former IPC [1999/42] | H01L21/316, G11B5/84, G02F1/1333, H01L21/3205, H01L21/768, H01L27/14, B05D7/00, B05D7/24, C09D183/16 | Designated contracting states | DE, NL [1999/42] | Title | German: | SUBSTRATGLATTUNGSVERFAHREN | [2003/36] | English: | SUBSTRATE FLATTENING METHOD | [2003/36] | French: | PROCEDE D'APLANISSEMENT D'UN SUBSTRAT | [2003/36] |
Former [1999/42] | SUBSTRATGLATTUNGSVERFAHREN, UND FILMBESCHICHTETES SUBSTRAT UND VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERANORDNUNG | ||
Former [1999/42] | SUBSTRATE FLATTENING METHOD, AND FILM-COATED SUBSTRATE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | ||
Former [1999/42] | PROCEDE D'APLANISSEMENT D'UN SUBSTRAT, ET PROCEDE DE FABRICATION DE SUBSTRATS RECOUVERTS D'UN FILM ET DE DISPOSITIFS A SEMI-CONDUCTEUR | Entry into regional phase | 04.06.1999 | Translation filed | 04.06.1999 | National basic fee paid | 04.06.1999 | Search fee paid | 04.06.1999 | Designation fee(s) paid | 04.06.1999 | Examination fee paid | Examination procedure | 10.03.1998 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 04.06.1999 | Examination requested [1999/42] | 01.10.2001 | Despatch of a communication from the examining division (Time limit: M06) | 25.03.2002 | Reply to a communication from the examining division | 09.12.2002 | Despatch of a communication from the examining division (Time limit: M06) | 19.06.2003 | Reply to a communication from the examining division | 29.10.2003 | Communication of intention to grant the patent | 05.03.2004 | Fee for grant paid | 05.03.2004 | Fee for publishing/printing paid | Opposition(s) | 08.02.2005 | No opposition filed within time limit [2005/17] | Fees paid | Renewal fee | 25.10.1999 | Renewal fee patent year 03 | 26.10.2000 | Renewal fee patent year 04 | 24.10.2001 | Renewal fee patent year 05 | 29.10.2002 | Renewal fee patent year 06 | 28.10.2003 | Renewal fee patent year 07 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XY]EP0405947 (DIGITAL EQUIPMENT CORP [US]) [X] 1,4,7 * column 3, line 15 - column 5, line 11 * [Y] 2,3,5,6,8; | [Y]JPH06128529 ; | [A]US4865875 (KELLERMAN DAVID [US]) [A] 1 * abstract *; | [A]DE4217224 (ROGERS CORP [US]) [A] 1 * abstract *; | [A]EP0517475 (DOW CORNING [US]) [A] 1 * abstract *; | [A]JPH08176512 ; | [A]EP0611067 (DOW CORNING [US]) [A] 6 | [Y] - PATENT ABSTRACTS OF JAPAN, (19940811), vol. 018, no. 430, Database accession no. (C - 1236), & JP06128529 A 19940510 (CATALYSTS & CHEM IND CO LTD) [Y] 2,3,5,6,8 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19961129), vol. 1996, no. 11, & JP08176512 A 19960709 (HITACHI CHEM CO LTD) [A] 6 * abstract * | International search | [Y]JPH0766188 (CATALYSTS & CHEM IND CO, et al); | [Y]JPH07102217 (CATALYSTS & CHEM IND CO, et al); | [Y]JPH05315319 (CATALYSTS & CHEM IND CO); | [A]JPH03192215 (MATSUSHITA ELECTRIC IND CO LTD); | [A]JPH0324726 (SONY CORP); | [A]JPS60182138 (TOMOEGAWA PAPER CO LTD) |