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Extract from the Register of European Patents

EP About this file: EP0951057

EP0951057 - SUBSTRATE FLATTENING METHOD [Right-click to bookmark this link]
Former [1999/42]SUBSTRATE FLATTENING METHOD, AND FILM-COATED SUBSTRATE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
[2003/36]
StatusNo opposition filed within time limit
Status updated on  11.03.2005
Database last updated on 11.11.2024
Most recent event   Tooltip11.03.2005No opposition filed within time limitpublished on 27.04.2005  [2005/17]
Applicant(s)For all designated states
CATALYSTS & CHEMICALS INDUSTRIES CO., LTD.
580, Horikawa-cho, Saiwai-ku Kawasaki-shi
Kanagawa 210 / JP
For all designated states
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
19-2 Nishi-Shinjuku 3-chome Shinjuku-ku
Tokyo 163-19 / JP
[N/P]
Former [2003/04]For all designated states
Catalysts & Chemicals Industries Co., Ltd.
580, Horikawa-cho, Saiwai-ku
Kawasaki-shi, Kanagawa 210 / JP
For all designated states
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
19-2 Nishi-Shinjuku 3-chome
Shinjuku-ku, Tokyo 163-19 / JP
Former [1999/42]For all designated states
Catalysts & Chemicals Industries Co., Ltd.
580, Horikawa-cho, Saiwai-ku
Kawasaki-shi, Kanagawa 210 / JP
Inventor(s)01 / MURAGUCHI, Ryo-Catalysts & Chemical Ind., Co., Ltd
13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-shi
Fukuoka 808 / JP
02 / NAKASHIMA, Akira-Catalysts & Chemical Ind. Co. Ltd
13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-shi
Fukuoka 808 / JP
03 / TONAI, Atsushi-Catalysts & Chemical Ind., Co., Ltd
13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-sh
Fukuoka 808 / JP
04 / KOMATSU, Michio-Catalysts & Chemical Ind., Co., ltd
13-2, Kitaminato-machi,Wakamatsu-ku,Kitakyushu-shi
Fukuoka 808 / JP
05 / MACHIDA, Katsuyuki
2-7-3, Mouridai,Atsugi-shi
Kanagawa 243 / JP
06 / KYURAGI, Hakaru
6-6-9, Kanai,Machida-shi
Tokyo 194-01 / JP
07 / IMAI, Kazuo
2-9-8, Morinosato,Atsugi-shi
Kanagawa 243-01 / JP
[1999/42]
Representative(s)Calamita, Roberto
Dehns
St Bride's House
10 Salisbury Square
London
EC4Y 8JD / GB
[N/P]
Former [1999/42]Calamita, Roberto
Frank B. Dehn & Co., European Patent Attorneys, 179 Queen Victoria Street
London EC4V 4EL / GB
Application number, filing date97909715.131.10.1997
[1999/42]
WO1997JP03979
Priority number, dateJP1996029889211.11.1996         Original published format: JP 29889296
JP1996030842719.11.1996         Original published format: JP 30842796
[1999/42]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9821750
Date:22.05.1998
Language:EN
[1998/20]
Type: A1 Application with search report 
No.:EP0951057
Date:20.10.1999
Language:EN
The application published by WIPO in one of the EPO official languages on 22.05.1998 takes the place of the publication of the European patent application.
[1999/42]
Type: B1 Patent specification 
No.:EP0951057
Date:06.05.2004
Language:EN
[2004/19]
Search report(s)International search report - published on:JP22.05.1998
(Supplementary) European search report - dispatched on:EP18.02.2000
ClassificationIPC:H01L21/316, G11B5/84, G02F1/1333, H01L21/3205, H01L21/768, H01L27/14, B05D7/00, B05D7/24, C09D183/16, H01L21/3105, H01L21/312
[2000/14]
CPC:
B05D1/286 (EP,US); H01L21/31051 (KR); G11B5/8404 (EP,US);
H01L21/02123 (KR); H01L21/02282 (KR); H01L21/32055 (KR);
H01L21/324 (KR); H01L21/76819 (KR) (-)
Former IPC [1999/42]H01L21/316, G11B5/84, G02F1/1333, H01L21/3205, H01L21/768, H01L27/14, B05D7/00, B05D7/24, C09D183/16
Designated contracting statesDE,   NL [1999/42]
TitleGerman:SUBSTRATGLATTUNGSVERFAHREN[2003/36]
English:SUBSTRATE FLATTENING METHOD[2003/36]
French:PROCEDE D'APLANISSEMENT D'UN SUBSTRAT[2003/36]
Former [1999/42]SUBSTRATGLATTUNGSVERFAHREN, UND FILMBESCHICHTETES SUBSTRAT UND VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERANORDNUNG
Former [1999/42]SUBSTRATE FLATTENING METHOD, AND FILM-COATED SUBSTRATE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Former [1999/42]PROCEDE D'APLANISSEMENT D'UN SUBSTRAT, ET PROCEDE DE FABRICATION DE SUBSTRATS RECOUVERTS D'UN FILM ET DE DISPOSITIFS A SEMI-CONDUCTEUR
Entry into regional phase04.06.1999Translation filed 
04.06.1999National basic fee paid 
04.06.1999Search fee paid 
04.06.1999Designation fee(s) paid 
04.06.1999Examination fee paid 
Examination procedure10.03.1998Request for preliminary examination filed
International Preliminary Examining Authority: JP
04.06.1999Examination requested  [1999/42]
01.10.2001Despatch of a communication from the examining division (Time limit: M06)
25.03.2002Reply to a communication from the examining division
09.12.2002Despatch of a communication from the examining division (Time limit: M06)
19.06.2003Reply to a communication from the examining division
29.10.2003Communication of intention to grant the patent
05.03.2004Fee for grant paid
05.03.2004Fee for publishing/printing paid
Opposition(s)08.02.2005No opposition filed within time limit [2005/17]
Fees paidRenewal fee
25.10.1999Renewal fee patent year 03
26.10.2000Renewal fee patent year 04
24.10.2001Renewal fee patent year 05
29.10.2002Renewal fee patent year 06
28.10.2003Renewal fee patent year 07
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Documents cited:Search[XY]EP0405947  (DIGITAL EQUIPMENT CORP [US]) [X] 1,4,7 * column 3, line 15 - column 5, line 11 * [Y] 2,3,5,6,8;
 [Y]JPH06128529  ;
 [A]US4865875  (KELLERMAN DAVID [US]) [A] 1 * abstract *;
 [A]DE4217224  (ROGERS CORP [US]) [A] 1 * abstract *;
 [A]EP0517475  (DOW CORNING [US]) [A] 1 * abstract *;
 [A]JPH08176512  ;
 [A]EP0611067  (DOW CORNING [US]) [A] 6
 [Y]  - PATENT ABSTRACTS OF JAPAN, (19940811), vol. 018, no. 430, Database accession no. (C - 1236), & JP06128529 A 19940510 (CATALYSTS & CHEM IND CO LTD) [Y] 2,3,5,6,8 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19961129), vol. 1996, no. 11, & JP08176512 A 19960709 (HITACHI CHEM CO LTD) [A] 6 * abstract *
International search[Y]JPH0766188  (CATALYSTS & CHEM IND CO, et al);
 [Y]JPH07102217  (CATALYSTS & CHEM IND CO, et al);
 [Y]JPH05315319  (CATALYSTS & CHEM IND CO);
 [A]JPH03192215  (MATSUSHITA ELECTRIC IND CO LTD);
 [A]JPH0324726  (SONY CORP);
 [A]JPS60182138  (TOMOEGAWA PAPER CO LTD)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.