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Following a clean-up exercise of event information regarding (previously) revoked patents, that were later reinstated, some existing revocation events ("Despatch of communication that patent is revoked") were duplicated on 15.04.2019.

2019.04.15

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Extract from the Register of European Patents

Citations: EP0993685

Cited inInternational search
Type:Patent literature
Publication No.:EP0702391  [A]
 (APPLIED MATERIALS INC [US]) [A] 1,9,17 * abstract *;
Type:Patent literature
Publication No.:EP0788147  [PX]
 (APPLIED MATERIALS INC [US]) [PX] 1,9,17 * column 8, line 56 - column 9, line 12 *
Type:Non-patent literature
Publication information:[A]  - CARTER J B ET AL, "TRANSFORMER COUPLED PLASMA ETCH TECHNOLOGY FOR THE FABRICATION OF SUBHALF MICRON STRUCTURES", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, (19930701), vol. 11, no. 4, PART 01, pages 1301 - 1306, XP000403733 [A] 1,9,17
DOI: http://dx.doi.org/10.1116/1.578543