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EP0971391
European procedure
Extract from the Register of European Patents
EP About this file: EP0971391
| EP0971391 - A method for reducing particles from an electrostatic chuck [Right-click to bookmark this link] | |||
| Former [2000/02] | A method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | ||
| [2005/15] | Status | No opposition filed within time limit Status updated on 04.08.2006 Database last updated on 22.04.2025 | Most recent event Tooltip | 04.08.2006 | No opposition filed within time limit | published on 06.09.2006 [2006/36] | Applicant(s) | For all designated states NGK Insulators, Ltd. 2-56 Suda-cho, Mizuho-ku Nagoya-City, Aichi Pref. 467-8530 / JP | [N/P] |
| Former [2005/39] | For all designated states NGK INSULATORS, LTD. 2-56 Suda-cho, Mizuho-ku Nagoya-City, Aichi Pref. 467-8530 / JP | ||
| Former [2000/02] | For all designated states NGK INSULATORS, LTD. 2-56 Suda-cho, Mizuho-ku Nagoya-City, Aichi Prefecture 467-8530 / JP | Inventor(s) | 01 /
Nagao, Mie Rinkaisou A-104, 48-1, Aza-Yomoda, Ohkusa Chita City, Aichi Pref. / JP | 02 /
Ushikoshi, Ryusuke 8-8, Motomachi 4-chome Tajimi City, Gifu Pref. / JP | 03 /
Ohno, Masashi, NGK Takeda-Minami-Shataku 106 15, Takeda-cho 2-chome, Mizuho-ku Nagoya City, Aichi Pref. / JP | [2000/02] | Representative(s) | Paget, Hugh Charles Edward, et al Mewburn Ellis LLP City Tower 40 Basinghall Street London EC2V 5DE / GB | [N/P] |
| Former [2000/02] | Paget, Hugh Charles Edward, et al MEWBURN ELLIS York House 23 Kingsway London WC2B 6HP / GB | Application number, filing date | 99305306.5 | 05.07.1999 | [2000/02] | Priority number, date | JP19980190350 | 06.07.1998 Original published format: JP 19035098 | [2000/02] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0971391 | Date: | 12.01.2000 | Language: | EN | [2000/02] | Type: | A3 Search report | No.: | EP0971391 | Date: | 02.10.2002 | [2002/40] | Type: | B1 Patent specification | No.: | EP0971391 | Date: | 28.09.2005 | Language: | EN | [2005/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 16.08.2002 | Classification | IPC: | H01L21/00, H01L21/68 | [2002/40] | CPC: |
G03F7/70691 (EP,US);
H01L21/68 (KR);
H01L21/6833 (EP,US);
H02N13/00 (EP,US);
Y10T279/23 (EP,US)
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| Former IPC [2000/02] | H01L21/00 | Designated contracting states | DE, FR, GB [2003/26] |
| Former [2000/02] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Verfahren zur Verminderung von Teilchen von einem elektrostatischen Halter | [2005/15] | English: | A method for reducing particles from an electrostatic chuck | [2005/15] | French: | Méthode pour limiter les particules d'un support électrostatique | [2005/15] |
| Former [2000/02] | Verfahren zur Verminderung von Teilchen von einem elektrostatischen Halter und Vorrichtung zur Herstellung eines Halbleiters | ||
| Former [2000/02] | A method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor | ||
| Former [2000/02] | Méthode pour limiter les particules d'un support électrostatique et équipement pour la fabrication de semiconducteurs | Examination procedure | 06.03.2003 | Examination requested [2003/19] | 22.03.2004 | Despatch of a communication from the examining division (Time limit: M04) | 30.07.2004 | Reply to a communication from the examining division | 02.03.2005 | Communication of intention to grant the patent | 08.07.2005 | Fee for grant paid | 08.07.2005 | Fee for publishing/printing paid | Opposition(s) | 29.06.2006 | No opposition filed within time limit [2006/36] | Fees paid | Renewal fee | 24.07.2001 | Renewal fee patent year 03 | 23.07.2002 | Renewal fee patent year 04 | 22.07.2003 | Renewal fee patent year 05 | 23.07.2004 | Renewal fee patent year 06 | 22.07.2005 | Renewal fee patent year 07 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XAY]JPH08191098 ; | [XA]US5325261 (HORWITZ CHRISTOPHER M [AU]) [X] 8 * abstract * * column 9, lines 1-39 * [A] 1,9-14; | [XA]EP0644578 (HITACHI LTD [JP]) [X] 10,13 * abstract * [A] 1,8,9,11,12,14; | [XA]JPH1014266 ; | US6084763 [ ] (HIRANO SHINSUKE [JP], et al) [ ] * column 2, lines 35-60 *; | [YA]EP0725427 (APPLIED MATERIALS INC [US]) [Y] 9 * column 5, lines 9-15 * [A] 1,8,10-14; | [A]US5612850 (BIRANG MANOOCHER [US], et al) [A] 1,8-14 * column 5, lines 41-61 *; | [A]WO9613058 (DIAMOND SEMICONDUCTOR GROUP [US]) [A] 1,8-14 * abstract * * page 12, lines 4-15 *; | [A]US5746928 (YEN SHIH KUEI [TW], et al) [A] 1,8-14 * abstract *; | [A]JPH08316297 ; | [E]JPH11251418 | [XAY] - PATENT ABSTRACTS OF JAPAN, (19961129), vol. 1996, no. 11, & JP08191098 A 19960723 (HITACHI LTD) [X] 8,10 * abstract * [A] 1,11-14 [Y] 9 | [XA] - PATENT ABSTRACTS OF JAPAN, (19980430), vol. 1998, no. 05, & JP10014266 A 19980116 (SONY CORP) [X] 11,12,14 * abstract * [A] 1,8-10,13 | [A] - PATENT ABSTRACTS OF JAPAN, (19970331), vol. 1997, no. 03, & JP08316297 A 19961129 (SONY CORP) [A] 1,8-14 * abstract * | [E] - PATENT ABSTRACTS OF JAPAN, (19991222), vol. 1999, no. 14, & JP11251418 A 19990917 (ULVAC CORP) [E] 10 * abstract * | Examination | EP0798773 | JPH04206546 | JPS62110127 | - PATENT ABSTRACTS OF JAPAN, (19921110), vol. 016, no. 539, Database accession no. (E - 1289), & JP04206546 A 19920728 (HITACHI LTD) | - PATENT ABSTRACTS OF JAPAN, (19871022), vol. 011, no. 324, Database accession no. (P - 628), & JP62110127 A 19870521 (KOYO RINDOBAAGU KK) |