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Extract from the Register of European Patents

EP About this file: EP0981153

EP0981153 - Radiant heating apparatus and method [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  01.10.2010
Database last updated on 09.12.2024
Most recent event   Tooltip01.10.2010Application deemed to be withdrawnpublished on 03.11.2010  [2010/44]
Applicant(s)For all designated states
Axcelis Technologies, Inc.
108 Cherry Hill Drive
Beverly, MA 01915 / US
[2007/22]
Former [2000/33]For all designated states
Axcelis Technologies, Inc.
55 Cherry Hill Drive
Beverly, MA 01915 / US
Former [2000/08]For all designated states
EATON CORPORATION
Eaton Center, 1111 Superior Avenue
Cleveland, Ohio 44114-2584 / US
Inventor(s)01 / Penelon, Joel
3930 Rosewood Road
Monrovia, Maryland 21770 / US
02 / Cardoso, Andre Gil
9190 Stebbing Way
Laurel, Maryland 20723 / US
[2000/08]
Representative(s)Burke, Steven David, et al
R.G.C. Jenkins & Co 26 Caxton Street
London SW1H 0RJ / GB
[N/P]
Former [2000/08]Burke, Steven David, et al
R.G.C. Jenkins & Co. 26 Caxton Street
London SW1H 0RJ / GB
Application number, filing date99306344.511.08.1999
[2000/08]
Priority number, dateUS1998013486517.08.1998         Original published format: US 134865
[2000/08]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0981153
Date:23.02.2000
Language:EN
[2000/08]
Type: A3 Search report 
No.:EP0981153
Date:20.08.2003
[2003/34]
Search report(s)(Supplementary) European search report - dispatched on:EP04.07.2003
ClassificationIPC:H01L21/00
[2000/08]
CPC:
H01L21/67115 (EP,US)
Designated contracting statesDE,   FR,   GB,   IT,   NL [2004/20]
Former [2000/08]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:Vorrichtung und Verfahren zur Strahlungsheizung[2000/08]
English:Radiant heating apparatus and method[2000/08]
French:Appareil et procédé pour le chauffage radiant[2000/08]
Examination procedure21.10.2003Examination requested  [2003/51]
25.07.2005Despatch of a communication from the examining division (Time limit: M06)
05.01.2006Reply to a communication from the examining division
09.05.2006Despatch of a communication from the examining division (Time limit: M04)
12.09.2006Reply to a communication from the examining division
26.01.2007Date of oral proceedings
15.02.2007Despatch of communication that the application is refused, reason: substantive examination {1}
15.02.2007Minutes of oral proceedings despatched
02.03.2010Application deemed to be withdrawn, date of legal effect  [2010/44]
07.07.2010Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2010/44]
Appeal following examination18.04.2007Appeal received No.  T1223/07
20.06.2007Statement of grounds filed
17.09.2010Result of appeal procedure: the application was deemed to be withdrawn
Fees paidRenewal fee
06.08.2001Renewal fee patent year 03
07.08.2002Renewal fee patent year 04
06.08.2003Renewal fee patent year 05
06.08.2004Renewal fee patent year 06
08.08.2005Renewal fee patent year 07
07.08.2006Renewal fee patent year 08
03.08.2007Renewal fee patent year 09
08.08.2008Renewal fee patent year 10
Penalty fee
Additional fee for renewal fee
31.08.200911   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]US4640224  (BUNCH MATTHEW L [US], et al) [X] 16-19 * figure 1 * * column 3, line 56 - column 4, line 10 * * column 6, line 28 - line 57 *;
 [X]EP0476307  (APPLIED MATERIALS INC [US]) [X] 16-20 * figure 1 *;
 [X]US5418885  (HAUSER JOHN R [US], et al) [X] 16-20* figures 1-4 *;
 [XA]US5436172  (MOSLEHI MEHRDAD M [US]) [X] 16-20 * figures 7A,7B * * figures 10,12,13,16 * * figure 17 * * claim 1 * [A] 21;
 [X]EP0808917  (APPLIED MATERIALS INC [US]) [X] 16-20 * figure 1 *
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