EP0981153 - Radiant heating apparatus and method [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 01.10.2010 Database last updated on 09.12.2024 | Most recent event Tooltip | 01.10.2010 | Application deemed to be withdrawn | published on 03.11.2010 [2010/44] | Applicant(s) | For all designated states Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly, MA 01915 / US | [2007/22] |
Former [2000/33] | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915 / US | ||
Former [2000/08] | For all designated states EATON CORPORATION Eaton Center, 1111 Superior Avenue Cleveland, Ohio 44114-2584 / US | Inventor(s) | 01 /
Penelon, Joel 3930 Rosewood Road Monrovia, Maryland 21770 / US | 02 /
Cardoso, Andre Gil 9190 Stebbing Way Laurel, Maryland 20723 / US | [2000/08] | Representative(s) | Burke, Steven David, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | [N/P] |
Former [2000/08] | Burke, Steven David, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RJ / GB | Application number, filing date | 99306344.5 | 11.08.1999 | [2000/08] | Priority number, date | US19980134865 | 17.08.1998 Original published format: US 134865 | [2000/08] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0981153 | Date: | 23.02.2000 | Language: | EN | [2000/08] | Type: | A3 Search report | No.: | EP0981153 | Date: | 20.08.2003 | [2003/34] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 04.07.2003 | Classification | IPC: | H01L21/00 | [2000/08] | CPC: |
H01L21/67115 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2004/20] |
Former [2000/08] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Vorrichtung und Verfahren zur Strahlungsheizung | [2000/08] | English: | Radiant heating apparatus and method | [2000/08] | French: | Appareil et procédé pour le chauffage radiant | [2000/08] | Examination procedure | 21.10.2003 | Examination requested [2003/51] | 25.07.2005 | Despatch of a communication from the examining division (Time limit: M06) | 05.01.2006 | Reply to a communication from the examining division | 09.05.2006 | Despatch of a communication from the examining division (Time limit: M04) | 12.09.2006 | Reply to a communication from the examining division | 26.01.2007 | Date of oral proceedings | 15.02.2007 | Despatch of communication that the application is refused, reason: substantive examination {1} | 15.02.2007 | Minutes of oral proceedings despatched | 02.03.2010 | Application deemed to be withdrawn, date of legal effect [2010/44] | 07.07.2010 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/44] | Appeal following examination | 18.04.2007 | Appeal received No. T1223/07 | 20.06.2007 | Statement of grounds filed | 17.09.2010 | Result of appeal procedure: the application was deemed to be withdrawn | Fees paid | Renewal fee | 06.08.2001 | Renewal fee patent year 03 | 07.08.2002 | Renewal fee patent year 04 | 06.08.2003 | Renewal fee patent year 05 | 06.08.2004 | Renewal fee patent year 06 | 08.08.2005 | Renewal fee patent year 07 | 07.08.2006 | Renewal fee patent year 08 | 03.08.2007 | Renewal fee patent year 09 | 08.08.2008 | Renewal fee patent year 10 | Penalty fee | Additional fee for renewal fee | 31.08.2009 | 11   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US4640224 (BUNCH MATTHEW L [US], et al) [X] 16-19 * figure 1 * * column 3, line 56 - column 4, line 10 * * column 6, line 28 - line 57 *; | [X]EP0476307 (APPLIED MATERIALS INC [US]) [X] 16-20 * figure 1 *; | [X]US5418885 (HAUSER JOHN R [US], et al) [X] 16-20* figures 1-4 *; | [XA]US5436172 (MOSLEHI MEHRDAD M [US]) [X] 16-20 * figures 7A,7B * * figures 10,12,13,16 * * figure 17 * * claim 1 * [A] 21; | [X]EP0808917 (APPLIED MATERIALS INC [US]) [X] 16-20 * figure 1 * |