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EP1037510
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EP About this file: EP1037510
| EP1037510 - Plasma focus high energy photon source with blast shield [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 10.07.2009 Database last updated on 02.08.2024 | Most recent event Tooltip | 10.07.2009 | Application deemed to be withdrawn | published on 12.08.2009 [2009/33] | Applicant(s) | For all designated states Cymer, Inc. 17075 Thornmint Court San Diego, CA 92127 / US | [2004/14] |
| Former [2000/38] | For all designated states Cymer, Inc. 16750 Via del Campo Court San Diego, CA 92127-1712 / US | Inventor(s) | 01 /
Partlo, William N. 12634 Pedriza Drive Poway, California 92064 / US | 02 /
Fomenkov, Igor V. 14390 Janal Way San Diego, California 92129 / US | 03 /
Birx, Daniel L. deceased / US | [2000/38] | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE | [N/P] |
| Former [2000/38] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 00105278.6 | 14.03.2000 | [2000/38] | Priority number, date | US19990268243 | 15.03.1999 Original published format: US 268243 | US19990442582 | 18.11.1999 Original published format: US 442582 | US19990324526 | 02.06.1999 Original published format: US 324526 | [2000/38] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1037510 | Date: | 20.09.2000 | Language: | EN | [2000/38] | Type: | A3 Search report | No.: | EP1037510 | Date: | 02.01.2004 | [2004/01] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 11.11.2003 | Classification | IPC: | H05G2/00 | [2000/38] | CPC: |
H05G2/003 (EP,US);
F21V19/008 (KR);
B82Y10/00 (EP,US);
F21S8/033 (KR);
F21V17/16 (KR);
F21V21/02 (KR);
G03F7/70033 (EP,US);
G03F7/70166 (EP,US);
G03F7/70916 (EP,US);
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2000/38] | Title | German: | Plasmaquelle von Hochenergie-Photonen mit Schutzwand | [2000/38] | English: | Plasma focus high energy photon source with blast shield | [2000/38] | French: | Source à plasma de photons de haute énergie avec écran protecteur | [2000/38] | Examination procedure | 14.03.2000 | Examination requested [2000/38] | 06.03.2007 | Despatch of a communication from the examining division (Time limit: M06) | 31.08.2007 | Reply to a communication from the examining division | 23.10.2007 | Despatch of a communication from the examining division (Time limit: M06) | 19.03.2008 | Reply to a communication from the examining division | 15.09.2008 | Cancellation of oral proceeding that was planned for 29.09.2008 | 15.09.2008 | Minutes of oral proceedings despatched | 29.09.2008 | Date of oral proceedings | 29.09.2008 | Date of oral proceedings (cancelled) | 02.10.2008 | Communication of intention to grant the patent | 13.02.2009 | Application deemed to be withdrawn, date of legal effect [2009/33] | 23.03.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2009/33] | Fees paid | Renewal fee | 28.03.2002 | Renewal fee patent year 03 | 28.03.2003 | Renewal fee patent year 04 | 22.03.2004 | Renewal fee patent year 05 | 22.03.2005 | Renewal fee patent year 06 | 29.03.2006 | Renewal fee patent year 07 | 28.03.2007 | Renewal fee patent year 08 | 27.03.2008 | Renewal fee patent year 09 | Penalty fee | Additional fee for renewal fee | 31.03.2009 | 10 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]JP9302461 ; | [A]JPH10189537 ; | [A]US3426233 (SIMON DONALD R, et al) [A] 29 * column 5, line 70 - column 6, line 37 * * column 1, line 14 - line 24 *; | [A]US4578805 (PEARLMAN JAY S [US], et al) [A] 5,6 * column 2, line 14 - line 19 * * column 3, line 29 - line 50 * * figure 2 *; | [A]EP0539149 (BRITISH AEROSPACE [GB]) [A] 32 * column 1, line 1 - line 26 *; | [YA]US5499282 (SILFVAST WILLIAM T [US]) [Y] 34-36,38-40 * column 9, line 31 - column 11, line 11 * * figures 9a-9c * [A] 7,8,10-12,15; | [DA]US5504795 (MCGEOCH MALCOLM W [US]) [DA] 28,31 * figure 1 * * column 3, line 25 - column 4, line 36 *; | [A]US5656141 (BETZ HANS-GEORG [DE], et al) [A] 2 * column 3, line 50 - line 53 * * figure 1 *; | [A]US5703923 (BARDASH MICHAEL J [US]) [A] 2,3 * column 5, line 14 - line 22 * * figure 1 *; | [Y]US5763930 (PARTLO WILLIAM NORMAN [US]) [Y] 1,4,8,9,15-19,21,22,24,34-36,38-40 * the whole document *; | [A]US5866871 (BIRX DANIEL [US]) [A] 9 * column 2, line 3 - line 37 * * column 3, line 46 - column 4, line 13 * * claim 27 *; | [Y] - PATENT ABSTRACTS OF JAPAN, (19980227), vol. 1998, no. 03, & JP9302461 A 19971125 (TOYOTA CENTRAL RES & DEV LAB INC) [Y] 1,4,8,9,15-19,21,22,24,34-36,38-40 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19981031), vol. 1998, no. 12, & JP10189537 A 19980721 (SONY CORP) [A] 23 * abstract * | [PDA] - PARTLO W ET AL, "EUV (13.5NM) LIGHT GENERATION USING A DENSE PLASMA FOCUS DEVICE", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (199903), vol. 3676, ISSN 0277-786X, pages 846 - 858, XP000920520 DOI: http://dx.doi.org/10.1117/12.351080 | Examination | EP0182477 |