-
EP1120815
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP1120815
| EP1120815 - Free floating shield and semiconductor processing system [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 13.11.2009 Database last updated on 02.08.2024 | Most recent event Tooltip | 13.11.2009 | Application deemed to be withdrawn | published on 16.12.2009 [2009/51] | Applicant(s) | For all designated states Silicon Valley Group Thermal Systems LLC 440 Kings Valley Road Scotts Valley, CA 95066 / US | [2001/31] | Inventor(s) | 01 /
Bartholomew, Lawrence Duane 181 San Lorenzo Avenue No. 2 Felton, California 95018 / US | 02 /
DeDontney, Jay Brian 411 Liberty Street Santa Cruz, California 95060 / US | 03 /
Peabody, Christopher A. 1908 Melalto Avenue California 94025 / US | [2001/31] | Representative(s) | Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James LLP Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB | [N/P] |
| Former [2009/31] | Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James LLP Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB | ||
| Former [2006/31] | Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB | ||
| Former [2002/50] | Stoner, Gerard Patrick, et al MEWBURN ELLIS York House 23 Kingsway London WC2B 6HP / GB | ||
| Former [2002/48] | Stoner, Gerard Patrick, et al European Patent Attorney Mewburn Ellis 1 Redcliff Street Bristol BS1 6NP / GB | ||
| Former [2001/31] | Allard, Susan Joyce, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 00302953.5 | 07.04.2000 | [2001/31] | Priority number, date | US20000492420 | 27.01.2000 Original published format: US 492420 | [2001/31] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1120815 | Date: | 01.08.2001 | Language: | EN | [2001/31] | Type: | A3 Search report | No.: | EP1120815 | Date: | 01.09.2004 | [2004/36] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 20.07.2004 | Classification | IPC: | H01L21/00 | [2001/31] | CPC: |
C23C16/45519 (EP,US);
H01L21/20 (KR);
C23C16/4401 (EP,US);
C23C16/4412 (EP,US);
C23C16/45595 (EP,US);
C23C16/54 (EP,US)
| Designated contracting states | DE, FR, GB, IT [2005/20] |
| Former [2001/31] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Freiliegendes Schutzschild und Halbleiterbehandlungsvorrichtung | [2001/31] | English: | Free floating shield and semiconductor processing system | [2001/31] | French: | Bouclier flottant et système de traitement de semiconducteurs | [2001/31] | Examination procedure | 28.02.2005 | Examination requested [2005/17] | 02.03.2005 | Loss of particular rights, legal effect: designated state(s) | 04.08.2005 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, CH, CY, DK, ES, FI, GR, IE, LU, MC, NL, PT, SE | 08.12.2008 | Despatch of a communication from the examining division (Time limit: M06) | 19.06.2009 | Application deemed to be withdrawn, date of legal effect [2009/51] | 27.07.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/51] | Fees paid | Renewal fee | 22.04.2002 | Renewal fee patent year 03 | 22.04.2003 | Renewal fee patent year 04 | 26.04.2004 | Renewal fee patent year 05 | 21.06.2005 | Renewal fee patent year 06 | 26.04.2006 | Renewal fee patent year 07 | 27.04.2007 | Renewal fee patent year 08 | 25.04.2008 | Renewal fee patent year 09 | 29.04.2009 | Renewal fee patent year 10 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 17.05.2005 | AT M01 Not yet paid | 17.05.2005 | BE M01 Not yet paid | 17.05.2005 | CH M01 Not yet paid | 17.05.2005 | CY M01 Not yet paid | 17.05.2005 | DK M01 Not yet paid | 17.05.2005 | ES M01 Not yet paid | 17.05.2005 | FI M01 Not yet paid | 17.05.2005 | GR M01 Not yet paid | 17.05.2005 | IE M01 Not yet paid | 17.05.2005 | LU M01 Not yet paid | 17.05.2005 | MC M01 Not yet paid | 17.05.2005 | NL M01 Not yet paid | 17.05.2005 | PT M01 Not yet paid | 17.05.2005 | SE M01 Not yet paid | Additional fee for renewal fee | 30.04.2005 | 06 M06 Fee paid on 21.06.2005 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]WO9936585 (SEMICONDUCTOR EQUIPMENT GROUP [US]) [X] 1-11 * figures 3-25; claims 1-17,31 *; | [XD]US5849088 (DEDONTNEY JAY BRIAN [US], et al) [XD] 1,3-11 * figures 3-15; claims 1-15,27 *; | [A]US5944900 (TRAN DON VAN [TW]) [A] 1-11 * figures 1,3,4; claims 1-13 *; | [A]US5855957 (YUAN ZHENG [US]) [A] 1,11 * figures 1,2 * |