-
EP1091252
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP1091252
| EP1091252 - Lithographic method and apparatus [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 07.08.2009 Database last updated on 19.03.2026 | Most recent event Tooltip | 07.08.2009 | Application deemed to be withdrawn | published on 09.09.2009 [2009/37] | Applicant(s) | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | [N/P] |
| Former [2004/39] | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | ||
| Former [2002/34] | For all designated states ASML Netherlands B.V. De Run 1110 5503 LA Veldhoven / NL | ||
| Former [2001/15] | For all designated states ASM LITHOGRAPHY B.V. De Run 1110 5503 LA Veldhoven / NL | Inventor(s) | 01 /
Finders, Jozef Haag 4 5509 NJ Veldhoven / NL | 02 /
Baselmans, Johannes De Kruik 1 5688 GG Oirschot / NL | 03 /
Flagello, Donis 8118 E. Juan Tabo Road Schottsdale, AZ 85255 / US | 04 /
Bouchoms, Igor Vestdijk 137c 5611 CB Eindhoven / NL | [2001/15] | Representative(s) | van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2009/09] | Van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2001/15] | Leeming, John Gerard J.A. Kemp & Co., 14 South Square, Gray's Inn London WC1R 5LX / GB | Application number, filing date | 00308528.9 | 28.09.2000 | [2001/15] | Priority number, date | EP19990307686 | 29.09.1999 Original published format: EP 99307686 | EP19990203704 | 07.11.1999 Original published format: EP 99203704 | EP20000200184 | 18.01.2000 Original published format: EP 00200184 | [2001/15] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1091252 | Date: | 11.04.2001 | Language: | EN | [2001/15] | Type: | A3 Search report | No.: | EP1091252 | Date: | 11.08.2004 | [2004/33] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 29.06.2004 | Classification | IPC: | G03F7/20 | [2001/15] | CPC: |
G03F7/70425 (EP);
G03F1/70 (EP);
G03F7/701 (EP);
G03F7/70125 (EP)
| Designated contracting states | DE, FR, GB, IT, NL [2005/18] |
| Former [2001/15] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Apparat und Verfahren für Lithographie | [2001/15] | English: | Lithographic method and apparatus | [2001/15] | French: | Appareil et méthode pour lithographie | [2001/15] | Examination procedure | 10.02.2005 | Examination requested [2005/18] | 27.10.2008 | Despatch of a communication from the examining division (Time limit: M04) | 09.03.2009 | Application deemed to be withdrawn, date of legal effect [2009/37] | 16.04.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/37] | Fees paid | Renewal fee | 22.08.2002 | Renewal fee patent year 03 | 22.08.2003 | Renewal fee patent year 04 | 07.09.2004 | Renewal fee patent year 05 | 15.09.2005 | Renewal fee patent year 06 | 14.09.2006 | Renewal fee patent year 07 | 13.09.2007 | Renewal fee patent year 08 | 11.09.2008 | Renewal fee patent year 09 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XY] EP0855623 (NIPPON KOGAKU KK et al.) [X] 1-4,6,7,9,10,17-19 * abstract * * figures 7,10,16,17 * * page 7, line 25 * * page 16, lines 3,4 * * page 18, lines 56-58 * * page 23, lines 20-25 * * page 23, line 51 - page 24, line 4 * * page 24, lines 21-23 *[Y] 5,11-13,15,20,21 | [XY] US5815247 (POSCHENRIEDER BERNHARD et al.) [X] 1,2,6,11,12 * abstract * * claim 6 * * column 4, lines 9-12 *[Y] 13 | [Y] WO9802784 (MICRON DISPLAY TECH INC et al.) [Y] 5,20 * claim 48 * | [Y] EP0573281 (FUJITSU LTD et al.) [Y] 11-13 * page 22, lines 55-58 * | [Y] US5851701 (ROLFSON BRETT J et al.) [Y] 15,21 * abstract * * column 1, lines 49-55 * * column 2, lines 23-32 * |