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EP About this file: EP1126506

EP1126506 - Apparatus and method for robotic alignment of substrates [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 27.06.2008 Database last updated on 26.06.2024
Most recent event Tooltip	27.06.2008	Application deemed to be withdrawn	published on 30.07.2008 [2008/31]
Applicant(s)	For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US
	[N/P]
Former [2001/34]	For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US
Inventor(s)	01 / White, John M. 2811 Colony View Place Hayward, California 94541 / US
	02 / Kurita, Shinichi 3532 Rollingside Drive San Jose, California 95148 / US
	[2001/34]
Representative(s)	Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
	[N/P]
Former [2001/34]	Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
Application number, filing date	00311440.2	20.12.2000
	[2001/34]
Priority number, date	US19990470821	23.12.1999 Original published format: US 470821
	[2001/34]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP1126506
	Date:	22.08.2001
	Language:	EN
	[2001/34]
	Type:	A3 Search report
	No.:	EP1126506
	Date:	11.01.2006
	[2006/02]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	30.11.2005
Classification	IPC:	H01L21/00, H01L21/68	[2006/02]
	CPC:	H01L21/67259 (EP,US); H01L21/68 (EP,KR,US); H01L21/681 (EP,US); H01L21/68707 (EP,US)
	Former IPC [2001/34]	H01L21/00
Designated contracting states	CH, DE, LI [2007/13]
Former [2007/03]	DE
Former [2006/37]	CH, DE, LI
Former [2001/34]	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR
Title	German:	Verfahren und Vorrichtung zur robotischen Ausrichtung von Substraten	[2001/34]
	English:	Apparatus and method for robotic alignment of substrates	[2001/34]
	French:	Méthode et dispositif d'alignement de substrats à l'aide d'un robot	[2001/34]
Examination procedure	06.07.2006	Examination requested [2006/33]
	12.07.2006	Loss of particular rights, legal effect: designated state(s)
	12.09.2006	Despatch of a communication from the examining division (Time limit: M04)
	08.11.2006	Despatch of communication of loss of particular rights: designated state(s) BE, FR, GB, NL
	22.01.2007	Reply to a communication from the examining division
	19.02.2007	Despatch of a communication from the examining division (Time limit: M06)
	16.07.2007	Reply to a communication from the examining division
	26.09.2007	Despatch of a communication from the examining division (Time limit: M04)
	07.02.2008	Application deemed to be withdrawn, date of legal effect [2008/31]
	12.03.2008	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2008/31]
Fees paid	Renewal fee
	13.12.2002	Renewal fee patent year 03
	03.12.2003	Renewal fee patent year 04
	03.12.2004	Renewal fee patent year 05
	05.12.2005	Renewal fee patent year 06
	05.12.2006	Renewal fee patent year 07
	Penalty fee
	Penalty fee Rule 85a EPC 1973
	21.08.2006	BE M01 Not yet paid
	21.08.2006	FR M01 Not yet paid
	21.08.2006	GB M01 Not yet paid
	21.08.2006	NL M01 Not yet paid
	Additional fee for renewal fee
	31.12.2007	08 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[X]EP0597637 (APPLIED MATERIALS INC [US]) [X] 1-31 * page 4, line 41 - page 5, line 27; figures 1,2 *;
		[X]JPH10335420 ;
		[X]JPH10173022 ;
		[X]JPH09138256 ;
		[X]WO9902996 (GENMARK AUTOMATION [US]) [X] 1-31 * page 21, line 27 - page 23, line 26; figures 29,30 *
		[X] - PATENT ABSTRACTS OF JAPAN, (19990331), vol. 1999, no. 03, & JP10335420 A 19981218 (MECS:KK) [X] 1-31 * abstract *
		[X] - PATENT ABSTRACTS OF JAPAN, (19980930), vol. 1998, no. 11, & JP10173022 A 19980626 (MECS:KK) [X] 1-31 * abstract *
		[X] - PATENT ABSTRACTS OF JAPAN, (19970930), vol. 1997, no. 09, & JP09138256 A 19970527 (NIPPON MAIKURONIKUSU:KK) [X] 1-31 * abstract *

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