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Extract from the Register of European Patents

EP About this file: EP1094691

EP1094691 - Method for plasma generation by means of capacitive uniform discharges, and device for implementing same [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 18.03.2011 Database last updated on 24.07.2024
Most recent event Tooltip	28.09.2012	Lapse of the patent in a contracting state New state(s): LU	published on 31.10.2012 [2012/44]
Applicant(s)	For all designated states ST PLASMAS Rue Benoît Fourneyron 42160 Andrezieux-Boutheon / FR
	[2009/22]
Former [2001/17]	For all designated states METAL PROCESS, Société à Responsabilité Limiteé: 20 Allée du Château 77144 Montevrain / FR
Inventor(s)	01 / Lagarde, Thierry 1725A, Route de Fontagneux 38450 Vif / FR
	02 / Pelletier, Jacques 8, Chemin du Fort, Le Mûrier 38400 Saint Martin d'Heres / FR
	[2001/17]
Representative(s)	Thivillier, Patrick, et al Cabinet Laurent & Charras 3 Place de l'Hôtel de Ville B.P. 203 42005 Saint-Etienne Cedex 1 / FR
	[N/P]
Former [2009/15]	Thivillier, Patrick, et al Cabinet Laurent & Charras 3 Place de l'Hôtel de Ville B.P. 203 42005 Saint-Etienne Cédex 1 / FR
Former [2001/17]	Thibault, Jean-Marc Cabinet Beau de Loménie 51, Avenue Jean Jaurès B.P. 7073 69301 Lyon Cédex 07 / FR
Application number, filing date	00420211.5	17.10.2000
	[2001/17]
Priority number, date	FR19990013304	19.10.1999 Original published format: FR 9913304
	[2001/17]
Filing language	FR
Procedural language	FR
Publication	Type:	A1 Application with search report
	No.:	EP1094691
	Date:	25.04.2001
	Language:	FR
	[2001/17]
	Type:	B1 Patent specification
	No.:	EP1094691
	Date:	12.05.2010
	Language:	FR
	[2010/19]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	23.01.2001
Classification	IPC:	H05H1/24, H01J37/32	[2001/17]
	CPC:	H01J37/32082 (EP); H01J37/32541 (EP); H05H1/46 (EP); H05H1/466 (EP)
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2001/17]
Title	German:	Verfahren zur Plasmaerzeugung durch kapazitive gleichmässige Entladungen und Implementierungsvorrichtung dafür	[2001/17]
	English:	Method for plasma generation by means of capacitive uniform discharges, and device for implementing same	[2001/17]
	French:	Procédé de production d'un plasma par décharges distribuées de type capacitif, et dispositif pour la mise en oeuvre d'un tel procédé	[2001/17]
Examination procedure	15.10.2001	Examination requested [2001/50]
	12.02.2008	Despatch of a communication from the examining division (Time limit: M06)
	22.08.2008	Reply to a communication from the examining division
	25.02.2010	Communication of intention to grant the patent
	23.03.2010	Fee for grant paid
	23.03.2010	Fee for publishing/printing paid
Opposition(s)	15.02.2011	No opposition filed within time limit [2011/16]
Fees paid	Renewal fee
	29.10.2002	Renewal fee patent year 03
	28.10.2003	Renewal fee patent year 04
	26.10.2004	Renewal fee patent year 05
	26.10.2005	Renewal fee patent year 06
	25.10.2006	Renewal fee patent year 07
	26.10.2007	Renewal fee patent year 08
	22.10.2008	Renewal fee patent year 09
	10.09.2009	Renewal fee patent year 10
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	AT	12.05.2010
	CY	12.05.2010
	DK	12.05.2010
	FI	12.05.2010
	IE	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
	GR	13.08.2010
	PT	13.09.2010
	LU	17.10.2010
	MC	31.10.2010
	[2012/44]
Former [2011/24]	AT	12.05.2010
	CY	12.05.2010
	DK	12.05.2010
	FI	12.05.2010
	IE	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
	GR	13.08.2010
	PT	13.09.2010
	MC	31.10.2010
Former [2011/08]	AT	12.05.2010
	CY	12.05.2010
	DK	12.05.2010
	FI	12.05.2010
	IE	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
	GR	13.08.2010
	PT	13.09.2010
Former [2011/07]	AT	12.05.2010
	CY	12.05.2010
	DK	12.05.2010
	FI	12.05.2010
	IE	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
	GR	13.08.2010
Former [2011/05]	AT	12.05.2010
	CY	12.05.2010
	FI	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
	GR	13.08.2010
Former [2011/01]	AT	12.05.2010
	FI	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
	GR	13.08.2010
Former [2010/50]	AT	12.05.2010
	FI	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
Former [2010/49]	AT	12.05.2010
	NL	12.05.2010
	SE	12.05.2010
Former [2010/45]	NL	12.05.2010
Documents cited:	Search	[A]EP0247397 (DOS SANTOS PEREIRA RIBEIRO CAR) [A] 6,11 * page 8, line 33 - page 10, line 19 * * figure 1 *;
		[Y]EP0552491 (APPLIED MATERIALS INC [US]) [Y] 6,7,11,12 * page 15, line 42 - page 16, line 3 * * figure 3 *;
		[A]US5609690 (WATANABE SYOUZOU [JP], et al);
		[A]GB2312400 (HYUNDAI ELECTRONICS IND [KR]) [A] 6,11 * page 7, paragraph 1 * * figures 2,3 *;
		[XAY]WO9832154 (BALZERS HOCHVAKUUM [LI], et al) [X] 1,4,5,8-10 * page 3, paragraph L - page 5, paragraph 1 * * page 10, paragraph L - page 11, paragraph L * * page 24, paragraph 2 * * figure 7 * [A] 2,3 [Y] 6,7,11,12

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