-
EP1153423
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP1153423
| EP1153423 - METHOD FOR FABRICATING THIN FILM SEMICONDUCTOR DEVICES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 22.12.2006 Database last updated on 16.07.2024 | Most recent event Tooltip | 22.12.2006 | Application deemed to be withdrawn | published on 24.01.2007 [2007/04] | Applicant(s) | For all designated states INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW Kapeldreef 75 3001 Leuven / BE | [N/P] |
| Former [2001/46] | For all designated states INTERUNIVERSITAIRE MICROELEKTRONICA CENTRUM VZW Kapeldreef 75 3001 Leuven / BE | Inventor(s) | 01 /
HORZEL, Jörg Hertogstraat 47 B-3001 Leuven / BE | 02 /
VAZSONYI, Eva Torocko utca 20 H-1026 Budapest / HU | [2001/46] | Representative(s) | Bird, Ariane Bird Goën & Co Wetenschapspark Arenberg Gaston Geenslaan 9 3001 Heverlee / BE | [N/P] |
| Former [2001/46] | Bird, Ariane Bird Goen & Co, Vilvoordsebaan 92 3020 Winksele / BE | Application number, filing date | 00903637.7 | 26.01.2000 | [2001/46] | WO2000EP00586 | Priority number, date | EP19990200235 | 27.01.1999 Original published format: EP 99200235 | [2001/46] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0045426 | Date: | 03.08.2000 | Language: | EN | [2000/31] | Type: | A1 Application with search report | No.: | EP1153423 | Date: | 14.11.2001 | Language: | EN | The application published by WIPO in one of the EPO official languages on 03.08.2000 takes the place of the publication of the European patent application. | [2001/46] | Search report(s) | International search report - published on: | EP | 03.08.2000 | Classification | IPC: | H01L21/20, H01L31/18 | [2001/46] | CPC: |
H01L21/76256 (EP);
H01L31/022441 (EP);
H01L31/03529 (EP);
H01L31/1804 (EP);
H01L31/1892 (EP);
Y02E10/547 (EP);
Y02P70/50 (EP)
(-)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2001/46] | Title | German: | VERFAHREN ZUR HERSTELLUNG VON DÜNNSCHICHTHALBLEITERBAUELEMENTEN | [2001/46] | English: | METHOD FOR FABRICATING THIN FILM SEMICONDUCTOR DEVICES | [2001/46] | French: | PROCEDES POUR FABRIQUER DES DISPOSITIFS SEMI-CONDUCTEURS A FILM MINCE | [2001/46] | Entry into regional phase | 25.07.2001 | National basic fee paid | 25.07.2001 | Designation fee(s) paid | 25.07.2001 | Examination fee paid | Examination procedure | 16.08.2000 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 25.07.2001 | Examination requested [2001/46] | 01.08.2006 | Application deemed to be withdrawn, date of legal effect [2007/04] | 04.09.2006 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2007/04] | Fees paid | Renewal fee | 21.12.2001 | Renewal fee patent year 03 | 11.03.2003 | Renewal fee patent year 04 | 11.12.2003 | Renewal fee patent year 05 | 21.12.2004 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.01.2003 | 04 M06 Fee paid on 11.03.2003 | 31.01.2006 | 07 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [DYA]US5856229 (SAKAGUCHI KIYOFUMI [JP], et al) [DY] 1,3-8,11,13,14,16 * column 4, line 66 - column 5, line 10 * * column 20, line 54 - column 21, line 40; figure 5 * [A] 17; | [DY]WO9901893 (MAX PLANCK GESELLSCHAFT [DE], et al) [DY] 1,3-8,11,13,14,16 * page 16, line 23 - page 18, line 27 * * page 26, line 25 - page 29, line 12; figure 1; claim 11 *; | [A]EP0851513 (CANON KK [JP]) [A] 1,11,13,14,16 * page 10, line 29 - page 11, line 39; figure 5 *; | [A]EP0851511 (IMEC VZW [BE]) [A] 1,9-15 * column 5, line 2 - column 6, line 8 * * column 9, line 40 - column 10, line 44; figure 10 * |