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EP1159755
European procedure
Extract from the Register of European Patents
EP About this file: EP1159755
| EP1159755 - METHOD AND DEVICE FOR ROTATING A WAFER [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 26.12.2003 Database last updated on 15.06.2024 | Most recent event Tooltip | 25.04.2008 | Change - representative | published on 28.05.2008 [2008/22] | Applicant(s) | For all designated states ASM INTERNATIONAL N.V. P.O. Box 100 3720 AC Bilthoven / NL | For all designated states Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | [N/P] |
| Former [2001/49] | For all designated states ASM INTERNATIONAL N.V. P.O. Box 100 3720 AC Bilthoven / NL | ||
| For all designated states Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | Inventor(s) | 01 /
KUZNETSOV, Vladimir, Ivanovich Buenos Airesstraat 8 NL-2622 AX Delft / NL | 02 /
RADELAAR, Sijbrand Soestdijkseweg 378 NL-3723 HK Bilthoven / NL | 03 /
VAN DER SANDEN, Jacobus, Cornelis, Gerardus Zomerland 42 NL-5663 HV Geldrop / NL | 04 /
RUIJL, Theo, Anjes, Maria Vleugendaal 64 NL-6351 HE Bocholtz / NL | [2001/49] | Representative(s) | van Westenbrugge, Andries, et al Nederlandsch Octrooibureau P.O. Box 29720 NL-2502 LS The Hague / NL | [N/P] |
| Former [2008/22] | van Westenbrugge, Andries, et al Postbus 29720 2502 LS Den Haag / NL | ||
| Former [2003/16] | van Westenbrugge, Andries, et al Nederlandsch Octrooibureau P.O. Box 29720 2502 LS The Hague / NL | ||
| Former [2001/49] | Jorritsma, Ruurd Nederlandsch Octrooibureau Scheveningseweg 82 P.O. Box 29720 2502 LS Den Haag / NL | Application number, filing date | 00909799.9 | 08.03.2000 | [2001/49] | WO2000NL00154 | Priority number, date | NL19991011487 | 08.03.1999 Original published format: NL 1011487 | [2001/49] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0054310 | Date: | 14.09.2000 | Language: | EN | [2000/37] | Type: | A1 Application with search report | No.: | EP1159755 | Date: | 05.12.2001 | Language: | EN | The application published by WIPO in one of the EPO official languages on 14.09.2000 takes the place of the publication of the European patent application. | [2001/49] | Type: | B1 Patent specification | No.: | EP1159755 | Date: | 19.02.2003 | Language: | EN | [2003/08] | Search report(s) | International search report - published on: | EP | 14.09.2000 | Classification | IPC: | H01L21/00 | [2001/49] | CPC: |
H01L21/67784 (EP,US);
H01L21/00 (KR)
| Designated contracting states | DE, FR, GB [2003/08] |
| Former [2001/49] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | VERFAHREN UND GERÄT FÜR WAFERROTATION | [2001/49] | English: | METHOD AND DEVICE FOR ROTATING A WAFER | [2001/49] | French: | PROCEDE ET APPAREIL UTILISES POUR LA ROTATION D'UNE TRANCHE | [2001/49] | Entry into regional phase | 28.08.2001 | National basic fee paid | 28.08.2001 | Designation fee(s) paid | 28.08.2001 | Examination fee paid | Examination procedure | 20.06.2000 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 28.08.2001 | Amendment by applicant (claims and/or description) | 28.08.2001 | Examination requested [2001/49] | 12.02.2002 | Despatch of a communication from the examining division (Time limit: M04) | 05.03.2002 | Reply to a communication from the examining division | 21.08.2002 | Communication of intention to grant the patent | 06.12.2002 | Fee for grant paid | 06.12.2002 | Fee for publishing/printing paid | Opposition(s) | 20.11.2003 | No opposition filed within time limit [2004/07] | Fees paid | Renewal fee | 28.08.2001 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [AD]US3706475 (YAKUBOWSKI CARL) [AD] 1,5,8,9,15 * the whole document *; | [A]US5788425 (SKOW LYNN R [US], et al) [A] 1 * figure 13 *; | [A]US5108513 (MULLER ALOIS [DE], et al) [A] 1-4,7 * the whole document *; | [A]US4874273 (TOKISUE HIROMITSU [JP], et al) [A] 1,8,9 * column 7, line 4 - line 62 * * column 8, line 65 - column 9, line 2; figures 1,6,7,10,11; claim - * |