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Extract from the Register of European Patents

EP About this file: EP1180237

EP1180237 - OPTICAL INSPECTION OF SEMI-CONDUCTOR STRUCTURES [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 04.09.2015 Database last updated on 09.09.2024
Most recent event Tooltip	04.09.2015	Application deemed to be withdrawn	published on 07.10.2015 [2015/41]
Applicant(s)	For all designated states BELTRONICS, INC. 199 Wells Avenue Newton, MA 02159 / US
	[2002/08]
Inventor(s)	01 / BISHOP, Robert 86 Deborah Road Newton, MA 01259 / US
	[2002/08]
Representative(s)	Warren, Anthony Robert, et al Baron Warren Redfern Cambridge House 100 Cambridge Grove Hammersmith London W6 0LE / GB
	[N/P]
Former [2003/32]	Warren, Anthony Robert, et al BARON & WARREN, 19 South End, Kensington London W8 5BU / GB
Former [2002/08]	Allsop, John Rowland McLeod Allsop, Bledington Grounds Bledington, Glos 0X7 6XL / GB
Application number, filing date	00911151.9	22.03.2000
	[2002/08]
	WO2000IB00334
Priority number, date	US19990275349	22.03.1999 Original published format: US 275349
	[2002/08]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO0057162
	Date:	28.09.2000
	Language:	EN
	[2000/39]
	Type:	A2 Application without search report
	No.:	EP1180237
	Date:	20.02.2002
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 28.09.2000 takes the place of the publication of the European patent application.
	[2002/08]
Search report(s)	International search report - published on:	EP	04.01.2001
Classification	IPC:	G01N21/88, G01N21/64	[2002/08]
	CPC:	G01N21/956 (EP,US); H01L22/00 (KR)
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2002/08]
Extension states	AL	Not yet paid
	LT	Not yet paid
	LV	Not yet paid
	MK	Not yet paid
	RO	Not yet paid
	SI	Not yet paid
Title	German:	OPTISCHE UNTERSUCHUNG VON HALBLEITER-STRUKTUREN	[2014/52]
	English:	OPTICAL INSPECTION OF SEMI-CONDUCTOR STRUCTURES	[2002/08]
	French:	INSPECTION OPTIQUE DE STRUCTURES DE SEMI-CONDUCTEURS	[2014/52]
	Former [2002/08]	OPTISCHE UNTERSUCHUNG VON HALBLEITENDEN STRUKTUREN
	Former [2002/08]	STRUCTURES DE SEMI-CONDUCTEURS
Entry into regional phase	05.12.2001	National basic fee paid
	05.12.2001	Designation fee(s) paid
	05.12.2001	Examination fee paid
Examination procedure	09.10.2000	Request for preliminary examination filed International Preliminary Examining Authority: EP
	05.12.2001	Examination requested [2002/08]
	28.02.2007	Despatch of a communication from the examining division (Time limit: M06)
	04.09.2007	Reply to a communication from the examining division
	24.08.2011	Despatch of a communication from the examining division (Time limit: M06)
	28.02.2012	Reply to a communication from the examining division
	11.07.2014	Despatch of a communication from the examining division (Time limit: M04)
	06.11.2014	Reply to a communication from the examining division
	03.12.2014	Communication of intention to grant the patent
	14.04.2015	Application deemed to be withdrawn, date of legal effect [2015/41]
	20.05.2015	Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2015/41]
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 28.02.2007
Fees paid	Renewal fee
	12.04.2002	Renewal fee patent year 03
	24.04.2003	Renewal fee patent year 04
	13.02.2004	Renewal fee patent year 05
	24.03.2005	Renewal fee patent year 06
	23.03.2006	Renewal fee patent year 07
	30.04.2007	Renewal fee patent year 08
	14.03.2008	Renewal fee patent year 09
	17.03.2009	Renewal fee patent year 10
	04.03.2010	Renewal fee patent year 11
	23.03.2011	Renewal fee patent year 12
	20.03.2012	Renewal fee patent year 13
	14.03.2013	Renewal fee patent year 14
	20.03.2014	Renewal fee patent year 15
	Penalty fee
	Penalty fee Rule 85a EPC 1973
	29.11.2001	AT M01 Fee paid on 05.12.2001
	29.11.2001	BE M01 Fee paid on 05.12.2001
	29.11.2001	CH M01 Fee paid on 05.12.2001
	29.11.2001	CY M01 Fee paid on 05.12.2001
	29.11.2001	DE M01 Fee paid on 05.12.2001
	29.11.2001	DK M01 Fee paid on 05.12.2001
	29.11.2001	ES M01 Fee paid on 05.12.2001
	29.11.2001	FI M01 Fee paid on 05.12.2001
	29.11.2001	FR M01 Fee paid on 05.12.2001
	29.11.2001	GB M01 Fee paid on 05.12.2001
	29.11.2001	GR M01 Fee paid on 05.12.2001
	29.11.2001	IE M01 Fee paid on 05.12.2001
	29.11.2001	IT M01 Fee paid on 05.12.2001
	29.11.2001	LU M01 Fee paid on 05.12.2001
	29.11.2001	MC M01 Fee paid on 05.12.2001
	29.11.2001	NL M01 Fee paid on 05.12.2001
	29.11.2001	PT M01 Fee paid on 05.12.2001
	29.11.2001	SE M01 Fee paid on 05.12.2001
	Penalty fee Rule 85b EPC 1973
	29.11.2001	M01 Fee paid on 05.12.2001
	Additional fee for renewal fee
	02.04.2002	03 M06 Fee paid on 12.04.2002
	31.03.2003	04 M06 Fee paid on 24.04.2003
	31.03.2007	08 M06 Fee paid on 30.04.2007
	31.03.2015	16 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Licence(s)	ID:	01 01/exclusive
	For:	AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE
	Licencee:	TORAY ENGINEERING CO., LTD. 3-16, Nihonbashi-Hongokucho 3-chome, Chuo-ku Tokyo / JP
	Date:	24.03.2010
	[2010/33]
Cited in	International search	[XY]US4816686 (HARA YASUHIKO [JP], et al) [X] 1-3,6-8,11,15,18-20 * column 1, line 9 - line 13 * * column 2, line 44 - line 57 * * column 7, line 39 - column 8, line 4 * * column 8, line 66 - column 9, line 2 * * column 10, line 21 - line 33 * * column 10 * [Y] 4,5,9,10,12,13,16,17;
		[Y]US4877326 (CHADWICK CURT H [US], et al) [Y] 4,9,13,16 * column 1, line 30 - line 44 * * column 21, line 22 - line 60 *;
		[Y]WO9906823 (KLA TENCOR CORP [US], et al) [Y] 5,10,12,17 * page 1, line 4 - line 15 * * page 8, line 1 - line 20 ** figure 1 *;
		[XP]US6014209 (BISHOP ROBERT [US]) [XP] 11,14,15 * column 3, line 44 - line 47 * * column 4, line 7 - line 31 * * column 4, line 64 - column 5, line 5 *
	Examination	US4152723
		US4556903
		US5278012
	by applicant	US4152723
		US4556903
		US4816686
		US4877326
		US5278021

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