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Extract from the Register of European Patents

EP About this file: EP1177570

EP1177570 - DEVICE FOR HANDLING SUBSTRATES INSIDE AND OUTSIDE A CLEAN ROOM [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  19.12.2008
Database last updated on 11.05.2024
Most recent event   Tooltip22.10.2010Lapse of the patent in a contracting state
New state(s): GR		published on 24.11.2010  [2010/47]
Applicant(s)For all designated states
BROOKS Automation GmbH
Göschwitzer Strasse 25
07745 Jena / DE
[2002/06]
Inventor(s)01 / SCHMUTZ, Wolfgang
Finkenweg 22
D-78658 Zimmern / DE
02 / GENTISCHER, Josef
Weinbergweg 31
D-73630 Remshalden / DE
 [2002/06]
Representative(s)Freitag, Joachim, et al
Patentanwälte
Oehmke & Kollegen
Neugasse 13
07743 Jena / DE
[N/P]
Former [2008/29]Freitag, Joachim, et al
Patentanwälte Oehmke & Kollegen Neugasse 13
07743 Jena / DE
Former [2008/27]Oehmke, Volker, et al
Patentanwälte Oehmke & Kollegen, Neugasse 13
07743 Jena / DE
Former [2002/06]Bertram, Helmut, et al
Patentanwälte Oehmke & Kollegen, Neugasse 13
07743 Jena / DE
Application number, filing date00926908.513.04.2000
[2002/06]
WO2000EP03324
Priority number, dateDE199912107208.05.1999         Original published format: DE 19921072
[2002/06]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO0068976
Date:16.11.2000
Language:DE
[2000/46]
Type: A1 Application with search report 
No.:EP1177570
Date:06.02.2002
Language:DE
The application published by WIPO in one of the EPO official languages on 16.11.2000 takes the place of the publication of the European patent application.
[2002/06]
Type: B1 Patent specification 
No.:EP1177570
Date:13.02.2008
Language:DE
[2008/07]
Search report(s)International search report - published on:EP16.11.2000
ClassificationIPC:H01L21/00
[2002/06]
CPC:
H01L21/67769 (EP,US); H01L21/67766 (KR); Y10S414/137 (EP,US);
Y10S414/14 (EP,US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [2008/07]
Former [2002/06]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:EINRICHTUNG ZUM HANDHABEN VON SUBSTRATEN INNERHALB UND AUSSERHALB EINES REINSTARBEITSRAUMES[2002/06]
English:DEVICE FOR HANDLING SUBSTRATES INSIDE AND OUTSIDE A CLEAN ROOM[2002/06]
French:DISPOSITIF POUR LA MANIPULATION DE SUBSTRATS A L'INTERIEUR ET A L'EXTERIEUR D'UN ESPACE DE SALLE BLANCHE[2002/06]
Entry into regional phase29.11.2001National basic fee paid 
29.11.2001Designation fee(s) paid 
29.11.2001Examination fee paid 
Examination procedure13.10.2000Request for preliminary examination filed
International Preliminary Examining Authority: EP
29.11.2001Examination requested  [2002/06]
21.11.2005Despatch of a communication from the examining division (Time limit: M06)
24.05.2006Reply to a communication from the examining division
09.06.2006Despatch of a communication from the examining division (Time limit: M06)
14.12.2006Reply to a communication from the examining division
11.01.2007Despatch of a communication from the examining division (Time limit: M06)
20.07.2007Reply to a communication from the examining division
27.09.2007Communication of intention to grant the patent
10.12.2007Fee for grant paid
10.12.2007Fee for publishing/printing paid
Opposition(s)14.11.2008No opposition filed within time limit [2009/04]
Fees paidRenewal fee
22.04.2002Renewal fee patent year 03
22.04.2003Renewal fee patent year 04
26.04.2004Renewal fee patent year 05
20.04.2005Renewal fee patent year 06
26.04.2006Renewal fee patent year 07
30.05.2007Renewal fee patent year 08
Penalty fee
Additional fee for renewal fee
30.04.200708   M06   Fee paid on   30.05.2007
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipCY13.02.2008
DK13.02.2008
FI13.02.2008
IE13.02.2008
IT13.02.2008
NL13.02.2008
AT13.04.2008
LU13.04.2008
BE30.04.2008
MC30.04.2008
GB13.05.2008
SE13.05.2008
GR14.05.2008
ES24.05.2008
PT14.07.2008
[2010/47]
Former [2010/32]CY13.02.2008
DK13.02.2008
FI13.02.2008
IE13.02.2008
IT13.02.2008
NL13.02.2008
AT13.04.2008
LU13.04.2008
BE30.04.2008
MC30.04.2008
GB13.05.2008
SE13.05.2008
ES24.05.2008
PT14.07.2008
Former [2009/39]CY13.02.2008
DK13.02.2008
FI13.02.2008
IE13.02.2008
IT13.02.2008
NL13.02.2008
AT13.04.2008
BE30.04.2008
MC30.04.2008
GB13.05.2008
SE13.05.2008
ES24.05.2008
PT14.07.2008
Former [2009/33]CY13.02.2008
DK13.02.2008
FI13.02.2008
IE13.02.2008
NL13.02.2008
BE30.04.2008
MC30.04.2008
GB13.05.2008
SE13.05.2008
ES24.05.2008
PT14.07.2008
Former [2009/29]DK13.02.2008
FI13.02.2008
IE13.02.2008
NL13.02.2008
BE30.04.2008
MC30.04.2008
GB13.05.2008
SE13.05.2008
ES24.05.2008
PT14.07.2008
Former [2009/19]DK13.02.2008
FI13.02.2008
IE13.02.2008
NL13.02.2008
BE30.04.2008
MC30.04.2008
SE13.05.2008
ES24.05.2008
PT14.07.2008
Former [2008/49]DK13.02.2008
FI13.02.2008
IE13.02.2008
NL13.02.2008
MC30.04.2008
SE13.05.2008
ES24.05.2008
PT14.07.2008
Former [2008/48]DK13.02.2008
FI13.02.2008
IE13.02.2008
NL13.02.2008
SE13.05.2008
ES24.05.2008
Former [2008/46]DK13.02.2008
FI13.02.2008
SE13.05.2008
ES24.05.2008
Former [2008/39]FI13.02.2008
ES24.05.2008
Former [2008/35]ES24.05.2008
Cited inInternational search[A]US5788447  (YONEMITSU SHUJI [JP], et al) [A] 1-16 * abstract ** column 1, line 38 - column 2, line 55 *;
 [X]WO9902436  (ASYST TECHNOLOGIES [US]) [X] 1-16 * abstract * * page 2, line 18 - page 5, line 27 * * page 12, line 17 - page 33, line 13 * * page 36, line 21 - page 37, line 27 *;
 [PX]WO9928951  (MATTSON TECH INC [US]) [PX] 1-16 * figure - *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.