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EP1197993
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EP About this file: EP1197993
| EP1197993 - APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 23.05.2003 Database last updated on 19.07.2024 | Most recent event Tooltip | 23.05.2003 | Withdrawal of application | published on 09.07.2003 [2003/28] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2002/16] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
SAITO, Kazuyoshi, Applied Materials Japan, Inc. 14-3, Shinizumi Narita-shi, Chiba 286-8516 / JP | 02 /
TAKAGI, Youji, Applied Materials Japan, Inc. 14-3, Shinizumi Narita-shi, Chiba 286-8516 / JP | [2002/16] | Representative(s) | Cross, Rupert Edward Blount, et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2002/16] | Cross, Rupert Edward Blount, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 00929881.1 | 26.05.2000 | [2002/16] | WO2000JP03409 | Priority number, date | JP19990148134 | 27.05.1999 Original published format: JP 14813499 | [2002/16] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0074124 | Date: | 07.12.2000 | Language: | EN | [2000/49] | Type: | A1 Application with search report | No.: | EP1197993 | Date: | 17.04.2002 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.12.2000 takes the place of the publication of the European patent application. | [2002/16] | Search report(s) | International search report - published on: | JP | 07.12.2000 | Classification | IPC: | H01L21/205, H01L21/3065, F16K51/02 | [2002/16] | CPC: |
C23C16/54 (EP);
C30B25/08 (EP,KR);
C30B35/005 (EP,KR);
F16K51/02 (EP);
H01L21/67126 (EP,KR);
H01L21/67742 (KR);
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2002/16] | Title | German: | APPARAT FÜR DIE BEARBEITUNG VON HALBLEITERANORDNUNGEN | [2002/16] | English: | APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE | [2002/16] | French: | APPAREIL DE FABRICATION D'UN DISPOSITIF A SEMI-CONDUCTEURS | [2002/16] | Entry into regional phase | 14.12.2001 | Translation filed | 14.12.2001 | National basic fee paid | 14.12.2001 | Search fee paid | 14.12.2001 | Designation fee(s) paid | 14.12.2001 | Examination fee paid | Examination procedure | 10.11.2000 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 14.12.2001 | Examination requested [2002/16] | 15.05.2003 | Application withdrawn by applicant [2003/28] | Fees paid | Renewal fee | 21.05.2002 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]EP0173115 (LEYBOLD HERAEUS GMBH & CO KG [DE]); | [X]JPH03114687U ; | [AP]JP2000114179 (APPLIED MATERIALS INC) |