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EP1139138
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EP About this file: EP1139138
| EP1139138 - PROJECTION EXPOSURE METHOD AND APPARATUS AND PROJECTION OPTICAL SYSTEM [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 01.08.2008 Database last updated on 12.07.2024 | Most recent event Tooltip | 01.08.2008 | Application deemed to be withdrawn | published on 03.09.2008 [2008/36] | Applicant(s) | For all designated states NIKON CORPORATION Fuji Building 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
| Former [2001/40] | For all designated states Nikon Corporation Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
OMURA, Yasuhiro, c/o Nikon Corp. Intel. Prop. Dep. Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | [2001/40] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [N/P] |
| Former [2001/40] | HOFFMANN - EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 00962924.7 | 28.09.2000 | [2001/40] | WO2000JP06706 | Priority number, date | WO1999JP05329 | 29.09.1999 Original published format: PCT/JP99/05329 | WO1999JP06387 | 16.11.1999 Original published format: PCT/JP99/06387 | [2001/40] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0123935 | Date: | 05.04.2001 | Language: | EN | [2001/14] | Type: | A1 Application with search report | No.: | EP1139138 | Date: | 04.10.2001 | Language: | EN | The application published by WIPO in one of the EPO official languages on 05.04.2001 takes the place of the publication of the European patent application. | [2001/40] | Search report(s) | International search report - published on: | JP | 05.04.2001 | (Supplementary) European search report - dispatched on: | EP | 25.01.2006 | Classification | IPC: | G02B13/24, G02B13/18, G03F7/20 | [2005/50] | CPC: |
G03F7/70241 (EP,US);
G02B13/143 (EP,US);
G02B13/18 (EP,US);
G02B13/22 (EP,US);
G02B13/24 (EP,US);
G03F7/70741 (EP,US);
G03F7/70883 (EP,US)
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| Former IPC [2001/40] | G02B13/24, G02B13/18, H01L21/027, G03F7/20 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2001/40] | Title | German: | PROJEKTIONSBELICHTUNGSVERFAHREN, VORRICHTUNG UND OPTISCHES PROJEKTIONSSYSTEM | [2001/40] | English: | PROJECTION EXPOSURE METHOD AND APPARATUS AND PROJECTION OPTICAL SYSTEM | [2001/40] | French: | PROCEDE ET DISPOSITIF D'EXPOSITION PAR PROJECTION, ET SYSTEME OPTIQUE DE PROJECTION | [2001/40] | Entry into regional phase | 28.06.2001 | Translation filed | 28.06.2001 | National basic fee paid | 28.06.2001 | Search fee paid | 28.06.2001 | Designation fee(s) paid | 28.06.2001 | Examination fee paid | Examination procedure | 28.06.2001 | Examination requested [2001/40] | 23.05.2006 | Despatch of a communication from the examining division (Time limit: M06) | 04.12.2006 | Reply to a communication from the examining division | 06.09.2007 | Despatch of a communication from the examining division (Time limit: M06) | 18.03.2008 | Application deemed to be withdrawn, date of legal effect [2008/36] | 18.04.2008 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2008/36] | Divisional application(s) | EP08004979.4 / EP1936420 | EP08004980.2 / EP1936419 | Fees paid | Renewal fee | 26.09.2002 | Renewal fee patent year 03 | 25.09.2003 | Renewal fee patent year 04 | 23.09.2004 | Renewal fee patent year 05 | 26.09.2005 | Renewal fee patent year 06 | 21.09.2006 | Renewal fee patent year 07 | 24.09.2007 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]EP0770895 (NIPPON KOGAKU KK [JP]) [X] 1 * figure 1; table 1 *; | [X]DE19818444 (NIKON CORP [JP]) [X] 1-15 * figure 2; tables 1a,1c *; | [X]EP0877271 (NIPPON KOGAKU KK [JP]) [X] 1 * figure 3; table 1 *; | [X]DE19833481 (NIKON CORP [JP]) [X] 1* figure 2; table 1a * | International search | [X]JPH09329742 (NIKON CORP); | [X]US5808814 (KUDO SHINTARO [JP]); | [X]JPH11133301 (NIKON CORP) |