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EP1235947
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EP About this file: EP1235947
| EP1235947 - METHOD AND APPARATUS FOR SUBSTRATE BIASING IN MULTIPLE ELECTRODE SPUTTERING SYSTEMS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 10.09.2010 Database last updated on 03.09.2024 | Most recent event Tooltip | 10.09.2010 | Application deemed to be withdrawn | published on 13.10.2010 [2010/41] | Applicant(s) | For all designated states ADVANCED ENERGY INDUSTRIES, INC. 1625 Sharp Point Drive Fort Collins, CO 80525 / US | [2002/36] | Inventor(s) | 01 /
SCHOLL, Richard, A. 612 Skysail Lane Fort Collins, CO 80526 / US | 02 /
BELKIND, Abraham 184 Martins Way North Plainfield, NJ 07060 / US | [2002/36] | Representative(s) | Kador & Partner Part mbB Corneliusstraße 15 80469 München / DE | [N/P] |
| Former [2002/36] | Kador & Partner Corneliusstrasse 15 80469 München / DE | Application number, filing date | 00970916.3 | 13.10.2000 | [2002/36] | WO2000US28482 | Priority number, date | US19990159896P | 15.10.1999 Original published format: US 159896 P | [2002/36] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0129278 | Date: | 26.04.2001 | Language: | EN | [2001/17] | Type: | A1 Application with search report | No.: | EP1235947 | Date: | 04.09.2002 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.04.2001 takes the place of the publication of the European patent application. | [2002/36] | Search report(s) | International search report - published on: | US | 26.04.2001 | (Supplementary) European search report - dispatched on: | EP | 12.03.2009 | Classification | IPC: | C23C14/34 | [2002/36] | CPC: |
C23C14/345 (EP,KR);
C23C14/3442 (KR);
C23C14/3464 (EP);
C23C14/548 (KR);
H01J37/32706 (EP);
H01J37/3444 (EP)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2002/36] | Title | German: | VERFAHREN UND VORRICHTUNG ZUR POLARISATION VON SUBSTRAT IN MEHRFACHELEKTRODEN-SPUTTERING-SYSTEMEN | [2002/36] | English: | METHOD AND APPARATUS FOR SUBSTRATE BIASING IN MULTIPLE ELECTRODE SPUTTERING SYSTEMS | [2002/36] | French: | TECHNIQUE ET DISPOSITIF DE POLARISATION DU SUBSTRAT DANS DES SYSTEMES DE PULVERISATION A ELECTRODES IN MULTIPLES | [2002/36] | Entry into regional phase | 14.05.2002 | National basic fee paid | 14.05.2002 | Search fee paid | 14.05.2002 | Designation fee(s) paid | 14.05.2002 | Examination fee paid | Examination procedure | 11.05.2001 | Request for preliminary examination filed International Preliminary Examining Authority: US | 14.05.2002 | Examination requested [2002/36] | 22.09.2009 | Despatch of a communication from the examining division (Time limit: M06) | 03.04.2010 | Application deemed to be withdrawn, date of legal effect [2010/41] | 25.05.2010 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2010/41] | Fees paid | Renewal fee | 14.05.2002 | Renewal fee patent year 03 | 29.10.2003 | Renewal fee patent year 04 | 14.10.2004 | Renewal fee patent year 05 | 12.10.2005 | Renewal fee patent year 06 | 12.10.2006 | Renewal fee patent year 07 | 12.10.2007 | Renewal fee patent year 08 | 31.03.2008 | Renewal fee patent year 09 | 13.10.2009 | Renewal fee patent year 10 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US5082546 (SZCZYRBOWSKI JOACHIM [DE], et al) [X] 1-3,13 * column 2, line 32 - column 3, line 13; figure . *; | [X]EP0908535 (COCKERILL RECH & DEV [BE]) [X] 1,13 * paragraphs [0035] - [0037]; figure 3 * | International search | [X]US5897753 (SCHATZ DOUGLAS S [US], et al); | [X]US5882492 (MANLEY BARRY W [US], et al); | [X]US5512164 (TIMBERLAKE JOHN R [US]); | [X]US5415757 (SZCYRBOWSKI JOACHIM [DE], et al); | [Y]US4693805 (QUAZI FAZLE S [US]) |