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Extract from the Register of European Patents

EP About this file: EP1156531

EP1156531 - METHOD FOR RECLAIMING A DELAMINATED WAFER [Right-click to bookmark this link]
Former [2001/47]METHOD FOR RECYCLED SEPARATED WAFER AND RECYCLED SEPARATED WAFER
[2014/17]
StatusNo opposition filed within time limit
Status updated on  21.08.2015
Database last updated on 24.04.2024
Most recent event   Tooltip23.10.2015Lapse of the patent in a contracting statepublished on 25.11.2015  [2015/48]
Applicant(s)For all designated states
Shin-Etsu Handotai Co., Ltd.
6-2, Ohtemachi 2-chome Chiyoda-ku
Tokyo / JP
For all designated states
Soitec
Parc Technologique des Fontaines
Chemin des Franques
38190 Bernin / FR
[2014/42]
Former [2012/19]For all designated states
Shin-Etsu Handotai Co., Ltd.
6-2, Ohtemachi 2-chome Chiyoda-ku
Tokyo / JP
For all designated states
Soitec
Parc Technologique des Fontaines
Chemin des Franques
38190 Bernin / FR
Former [2009/17]For all designated states
Shin-Etsu Handotai Co., Ltd.
6-2, Ohtemachi 2-chome Chiyoda-ku
Tokyo / JP
For all designated states
S.O.I.Tec Silicon on Insulator Technologies
Parc Technologique des Fontaines, Chemin des Franques
38190 Bernin / FR
Former [2001/47]For all designated states
SHIN-ETSU HANDOTAI COMPANY LIMITED
4-2, Marunouchi 1-Chome
Chiyoda-ku Tokyo 100-0005 / JP
For all designated states
S.O.I.Tec Silicon on Insulator Technologies
Parc Technologique des Fontaines, Chemin des Franques
38190 Bernin / FR
Inventor(s)01 / Kuwabara, Susumu@Isobe R & D Center
Shin-Etsu Handotai Co., Ltd.
13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
02 / Mitani, Kiyoshi@Isobe R & D Center
Shin-Etsu Handotai Co., Ltd.
13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
03 / Tate, Naoto@Isobe R & D Center
Shin-Etsu Handotai Co., Ltd.
13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
04 / Nakano, Masatake@Isobe R & D Center
Shin-Etsu Handotai Co., Ltd.
13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
05 / Barge, [email protected] Silicon on Insulator Tech
Parc Technologique des Fontaines
38190 Bernin / FR
06 / Maleville, Christophe@SOITEC Silicon on Ins. Tech
Parc Technologique des Fontaines
38190 Bernin / FR
 [2014/42]
Former [2001/47]01 / Kuwabara, Susumu Isobe R & D Center
Shin-Etsu Handotai Co., Ltd. 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
02 / Mitani, Kiyoshi Isobe R & D Center
Shin-Etsu Handotai Co., Ltd. 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
03 / Tate, Naoto Isobe R & D Center
Shin-Etsu Handotai Co., Ltd. 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
04 / Nakano, Masatake Isobe R & D Center
Shin-Etsu Handotai Co., Ltd. 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
05 / Barge, Thierry S.O.I.TEC Silicon on Insulator Tech
Parc Technologique des Fontaines
38190 Bernin / FR
06 / Maleville, Christophe SOITEC Silicon on Ins. Tech
Parc Technologique des Fontaines
38190 Bernin / FR
Representative(s)Wibbelmann, Jobst, et al
Wuesthoff & Wuesthoff
Patentanwälte und Rechtsanwalt PartG mbB
Schweigerstrasse 2
81541 München / DE
[N/P]
Former [2013/51]Wibbelmann, Jobst, et al
Wuesthoff & Wuesthoff Patent- und Rechtsanwälte Schweigerstrasse 2
81541 München / DE
Former [2009/48]Cooper, John, et al
Murgitroyd & Company 165-169 Scotland Street
Glasgow G5 8PL / GB
Former [2001/47]Cooper, John, et al
Murgitroyd & Company Ltd., 373 Scotland Street
Glasgow G5 8QA / GB
Application number, filing date00977956.227.11.2000
[2001/47]
WO2000JP08344
Priority number, dateJP1999033813729.11.1999         Original published format: JP 33813799
[2001/47]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0141218
Date:07.06.2001
Language:EN
[2001/23]
Type: A1 Application with search report 
No.:EP1156531
Date:21.11.2001
Language:EN
The application published by WIPO in one of the EPO official languages on 07.06.2001 takes the place of the publication of the European patent application.
[2001/47]
Type: B1 Patent specification 
No.:EP1156531
Date:15.10.2014
Language:EN
[2014/42]
Search report(s)International search report - published on:JP07.06.2001
(Supplementary) European search report - dispatched on:EP12.03.2007
ClassificationIPC:H01L21/762, // H01L21/66, H01L21/02
[2014/17]
CPC:
H01L21/02032 (EP,US); H01L27/12 (KR); H01L21/76254 (EP,US);
H01L21/84 (KR); H01L22/34 (EP,US); Y10S438/906 (EP,US);
Y10S438/974 (EP,US); Y10S438/977 (EP,US) (-)
Former IPC [2007/15]H01L21/762
Former IPC [2001/47]H01L27/12
Designated contracting statesDE,   FR,   GB [2004/22]
Former [2001/47]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE,  TR 
TitleGerman:VERFAHREN ZUR RÜCKGEWINNUNG EINES ABGETRENNTEN WAFER[2014/17]
English:METHOD FOR RECLAIMING A DELAMINATED WAFER[2014/17]
French:PROCEDE DE RECUPERATION D'UN SUBSTRAT DELAMINE[2014/17]
Former [2001/47]WIEDERVERWERTUNG SEPARIERTER SCHEIBE UND WIEDERVERWERTBARE SEPARIERTE SCHEIBE
Former [2001/47]METHOD FOR RECYCLED SEPARATED WAFER AND RECYCLED SEPARATED WAFER
Former [2001/47]PROCEDE DE RECYCLAGE D'UNE PLAQUETTE SEPAREE ET PLAQUETTE SEPAREE RECYCLEE
Entry into regional phase01.08.2001Translation filed 
10.08.2001National basic fee paid 
10.08.2001Search fee paid 
10.08.2001Designation fee(s) paid 
10.08.2001Examination fee paid 
Examination procedure10.08.2001Examination requested  [2001/47]
13.05.2008Despatch of a communication from the examining division (Time limit: M04)
04.09.2008Reply to a communication from the examining division
22.01.2014Cancellation of oral proceeding that was planned for 29.01.2014
29.01.2014Date of oral proceedings (cancelled)
26.05.2014Communication of intention to grant the patent
29.08.2014Fee for grant paid
29.08.2014Fee for publishing/printing paid
29.08.2014Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  13.05.2008
Opposition(s)16.07.2015No opposition filed within time limit [2015/39]
Fees paidRenewal fee
13.11.2002Renewal fee patent year 03
12.11.2003Renewal fee patent year 04
08.11.2004Renewal fee patent year 05
07.11.2005Renewal fee patent year 06
06.11.2006Renewal fee patent year 07
06.11.2007Renewal fee patent year 08
07.11.2008Renewal fee patent year 09
15.10.2009Renewal fee patent year 10
13.10.2010Renewal fee patent year 11
11.10.2011Renewal fee patent year 12
23.10.2012Renewal fee patent year 13
25.10.2013Renewal fee patent year 14
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Lapses during opposition  TooltipGB15.01.2015
[2015/48]
Documents cited:Search[X]JPH11297583  (SHINETSU HANDOTAI KK, et al) [X] 1-5 * page 4, paragraph 19 - page 4, paragraph 24; figure 1 * * page 6, paragraph 42 - paragraph 48; figure 2 *;
 [A]EP0843344  (CANON KK [JP]) [A] 1-5 * abstract *;
 [A]JPH08339947  (HITACHI LTD, et al) [A] 2,3 * abstract *;
 [E]US6174222  (SATO TOMOMI [JP], et al) [E] 2,3 * abstract *;
 [A]JPH05226305  (HITACHI LTD) [A] 1-5
International search[X]JPH11297583  (SHINETSU HANDOTAI KK, et al);
 [Y]JPH0562951  (FUJITSU LTD);
 [Y]JPH11121310  (DENSO CORP);
 [Y]EP0843344  (CANON KK [JP])
by applicantJPH05211128
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.