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EP1188184
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EP About this file: EP1188184
| EP1188184 - METHOD TO MEASURE ALIGNMENT USING LATENT IMAGE GRATING STRUCTURES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 25.11.2011 Database last updated on 12.07.2024 | Most recent event Tooltip | 25.11.2011 | Application deemed to be withdrawn | published on 28.12.2011 [2011/52] | Applicant(s) | For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | For all designated states Philips Semiconductors Inc. 1000 West Maude Avenue Sunnyvale, CA 94088 / US | [2007/52] |
| Former [2007/31] | For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | ||
| For:MC
Philips Semiconductors Inc. 1000 West Maude Avenue Sunnyvale, CA 94088 / US | |||
| Former [2002/12] | For all designated states Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | ||
| For:MC
Philips Semiconductors Inc. 1000 West Maude Avenue Sunnyvale, CA 94088 / US | Inventor(s) | 01 /
ZIGER, David 15715 Dawn Crest San Antonio, TX 78251 / US | [2002/12] | Representative(s) | Schouten, Marcus Maria, et al NXP B.V. Intellectual Property & Licensing High Tech Campus 60 5656 AG Eindhoven / NL | [N/P] |
| Former [2009/44] | Schouten, Marcus Maria, et al NXP B.V. IP & L Department High Tech Campus 32 5656 AE Eindhoven / NL | ||
| Former [2008/14] | van der Veer, Johannis Leendert, et al NXP Semiconductors Intellectual Property Department High Tech Campus 60 5656 AG Eindhoven / NL | ||
| Former [2007/01] | Pennings, Johannes, et al NXP Semiconductors Intellectual Property Department High Tech Campus 60 5656 AG Eindhoven / NL | ||
| Former [2004/13] | Duijvestijn, Adrianus Johannes, et al Philips Intellectual Property & Standards P.O. Box 220 5600 AE Eindhoven / NL | ||
| Former [2002/12] | Cobben, Louis Marie Hubert INTERNATIONAAL OCTROOIBUREAU B.V., Prof. Holstlaan 6 5656 AA Eindhoven / NL | Application number, filing date | 00991441.7 | 29.12.2000 | [2002/12] | WO2000US35601 | Priority number, date | US19990475679 | 30.12.1999 Original published format: US 475679 | [2002/12] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0150523 | Date: | 12.07.2001 | Language: | EN | [2001/28] | Type: | A2 Application without search report | No.: | EP1188184 | Date: | 20.03.2002 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.07.2001 takes the place of the publication of the European patent application. | [2002/12] | Search report(s) | International search report - published on: | EP | 10.01.2002 | Classification | IPC: | H01L21/66, H01L23/544, G03F7/20 | [2002/12] | CPC: |
G03F9/7084 (EP,US);
G03F9/7049 (EP,US)
| Designated contracting states | DE, FR, GB [2004/20] |
| Former [2002/12] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Title | German: | METHODE UND JUSTAGEMESSUNG AN EINEM LATENTEN GITTERSTRUKTURBILD | [2002/12] | English: | METHOD TO MEASURE ALIGNMENT USING LATENT IMAGE GRATING STRUCTURES | [2002/12] | French: | MESURE DE L'ALIGNEMENT AU MOYEN DE STRUCTURES EN RESEAU D'IMAGES LATENTES | [2002/12] | Entry into regional phase | 01.10.2001 | National basic fee paid | 10.07.2002 | Designation fee(s) paid | 10.07.2002 | Examination fee paid | Examination procedure | 10.07.2002 | Examination requested [2002/37] | 10.03.2003 | Despatch of a communication from the examining division (Time limit: M04) | 05.11.2003 | Reply to a communication from the examining division | 27.07.2004 | Despatch of a communication from the examining division (Time limit: M04) | 02.11.2004 | Reply to a communication from the examining division | 01.02.2006 | Despatch of a communication from the examining division (Time limit: M04) | 03.07.2006 | Reply to a communication from the examining division | 01.07.2011 | Application deemed to be withdrawn, date of legal effect [2011/52] | 10.08.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2011/52] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 10.03.2003 | Request for further processing for: | 03.07.2006 | Request for further processing filed | 03.07.2006 | Full payment received (date of receipt of payment) Request granted | 17.07.2006 | Decision despatched | 05.11.2003 | Request for further processing filed | 05.11.2003 | Full payment received (date of receipt of payment) Request granted | 19.11.2003 | Decision despatched | Fees paid | Renewal fee | 02.01.2003 | Renewal fee patent year 03 | 02.01.2004 | Renewal fee patent year 04 | 03.01.2005 | Renewal fee patent year 05 | 02.01.2006 | Renewal fee patent year 06 | 02.01.2007 | Renewal fee patent year 07 | 02.01.2008 | Renewal fee patent year 08 | 05.01.2009 | Renewal fee patent year 09 | 04.01.2010 | Renewal fee patent year 10 | Penalty fee | Additional fee for renewal fee | 31.12.2010 | 11 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]JPH0845814 ; | [Y]US6097473 (OTA KAZUYA [JP], et al) [Y] 1-8 * column 1, lines 15-59 * * column 4, line 29 - column 9, line 4 * * column 10, line 47 - column 12, line 18; figures 1,10,11 *; | [YA]EP0818814 (KLA INSTR CORP [US]) [Y] 1-8 * column 1, line 58 - column 2, line 16 * * column 3, line 42 - column 7, line 15; figures 1-3 * [A] 9-11; | [YA]US4710026 (MAGOME NOBUTAKA [JP], et al) [Y] 1-3 * column 7, line 1 - column 8, line 68; figure 7 * [A] 4-11; | [A]US5910847 (VAN DER WERF JAN E [NL], et al) [A] 1-11 * the whole document *; | [A]JPH11191530 | [X] - PATENT ABSTRACTS OF JAPAN, (19960628), vol. 1996, no. 06, & JP08045814 A 19960216 (NIKON CORP) [X] 11 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19991029), vol. 1999, no. 12, & JP11191530 A 19990713 (MITSUTOYO CORP) [A] 1-10 * abstract * | Examination | EP0634702 |