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EP1138734
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EP About this file: EP1138734
| EP1138734 - Aqueous dispersion for chemical mechanical polishing of metal films [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 16.10.2015 Database last updated on 15.06.2024 | Most recent event Tooltip | 16.10.2015 | Application deemed to be withdrawn | published on 18.11.2015 [2015/47] | Applicant(s) | For all designated states JSR Corporation 6-10, Tsukiji 5-chome, Chuo-ku Tokyo 104-0045 / JP | [N/P] |
| Former [2004/11] | For all designated states JSR Corporation 6-10, Tsukiji 5-chome, Chuo-ku Tokyo 104-0045 / JP | ||
| Former [2001/40] | For all designated states JSR Corporation 2-11-24, Tsukiji, Chuo-ku Tokyo / JP | Inventor(s) | 01 /
Motonari, Masayuki, JSR Corporation 2-11-24, Tsukiji, Chuo-ku Tokyo / JP | 02 /
Hattori, Masayuki, JSR Corporation 2-11-24, Tsukiji, Chuo-ku Tokyo / JP | 03 /
Kawahashi, Nobuo, JSR Corporation 2-11-24, Tsukiji, Chuo-ku Tokyo / JP | [2001/40] | Representative(s) | TBK Bavariaring 4-6 80336 München / DE | [N/P] |
| Former [2005/34] | TBK-Patent Bavariaring 4-6 80336 München / DE | ||
| Former [2001/40] | Leson, Thomas Johannes Alois, Dipl.-Ing. Patentanwälte Tiedtke-Bühling-Kinne & Partner, Bavariaring 4 80336 München / DE | Application number, filing date | 01108139.5 | 30.03.2001 | [2001/40] | Priority number, date | JP20000098094 | 31.03.2000 Original published format: JP 2000098094 | [2001/40] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1138734 | Date: | 04.10.2001 | Language: | EN | [2001/40] | Type: | A3 Search report | No.: | EP1138734 | Date: | 24.10.2001 | [2001/43] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 10.09.2001 | Classification | IPC: | C09G1/02, C09K3/14, C23F3/00, H01L21/321, H01L21/768 | [2001/40] | CPC: |
C09G1/02 (EP,US);
C09K3/14 (KR);
C09K3/1463 (EP,US);
C23F3/00 (EP,US);
H01L21/3212 (EP,US);
Y10T428/325 (EP,US)
| Designated contracting states | DE, FR, IT [2002/29] |
| Former [2001/40] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Title | German: | Wässrige Dispersion zum chemisch-mechanischen Polieren von Metallfilmen | [2001/40] | English: | Aqueous dispersion for chemical mechanical polishing of metal films | [2001/40] | French: | Dispersion aqueuse pour le polissage mécano-chimique des films métalliques | [2001/40] | Examination procedure | 22.04.2002 | Examination requested [2002/26] | 17.05.2002 | Amendment by applicant (claims and/or description) | 23.04.2003 | Despatch of a communication from the examining division (Time limit: M06) | 03.11.2003 | Reply to a communication from the examining division | 20.04.2004 | Despatch of a communication from the examining division (Time limit: M04) | 30.08.2004 | Reply to a communication from the examining division | 08.03.2005 | Despatch of a communication from the examining division (Time limit: M04) | 04.07.2005 | Reply to a communication from the examining division | 28.01.2015 | Despatch of a communication from the examining division (Time limit: M04) | 09.06.2015 | Application deemed to be withdrawn, date of legal effect [2015/47] | 06.07.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2015/47] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 23.04.2003 | Fees paid | Renewal fee | 31.03.2003 | Renewal fee patent year 03 | 31.03.2004 | Renewal fee patent year 04 | 30.03.2005 | Renewal fee patent year 05 | 30.03.2006 | Renewal fee patent year 06 | 29.03.2007 | Renewal fee patent year 07 | 31.03.2008 | Renewal fee patent year 08 | 31.03.2009 | Renewal fee patent year 09 | 31.03.2010 | Renewal fee patent year 10 | 30.03.2011 | Renewal fee patent year 11 | 30.03.2012 | Renewal fee patent year 12 | 27.03.2013 | Renewal fee patent year 13 | 28.03.2014 | Renewal fee patent year 14 | Penalty fee | Additional fee for renewal fee | 31.03.2015 | 15 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [DX]JPH10116804 ; | [X]EP0846742 (CABOT CORP [US]) [X] 3-8,11,13,14,16,18,19 * abstract * * page 5, lines 13-23 *; | [X]WO9964527 (RODEL INC [US]) [X] 1-19 * abstract ** page 6, line 1 *; | [E]EP1104778 (JSR CORP [JP]) [E] 1-19 * abstract * * page 12, line 56 - page 13, line 10; claim 15 * | [DX] - PATENT ABSTRACTS OF JAPAN, (19980831), vol. 1998, no. 10, & JP10116804 A 19980506 (INTERNATL BUSINESS MACH CORP | Examination | EP1116762 |