-
EP1172457
European procedure
Extract from the Register of European Patents
EP About this file: EP1172457
| EP1172457 - Thin film formation method [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 09.11.2007 Database last updated on 24.08.2024 | Most recent event Tooltip | 21.11.2008 | Change - lapse in a contracting state Updated state(s): FR | published on 24.12.2008 [2008/52] | Applicant(s) | For all designated states CANON KABUSHIKI KAISHA 3-30-2, Shimomaruko, Ohta-ku Tokyo / JP | [N/P] |
| Former [2002/03] | For all designated states CANON KABUSHIKI KAISHA 3-30-2 Shimomaruko Ohta-ku, Tokyo / JP | Inventor(s) | 01 /
Yajima, Takahiro Canon Kabushiki Kaisha, 3-30-2, Shimomaruko Ohta-ku, Tokyo / JP | 02 /
Kanai, Masahiro Canon Kabushiki Kaisha, 3-30-2, Shimomaruko Ohta-ku, Tokyo / JP | 03 /
Sugiyama, Shuichiro Canon Kabushiki Kaisha, 3-30-2, Shimomaruko Ohta-ku, Tokyo / JP | [2002/03] | Representative(s) | TBK Bavariaring 4-6 80336 München / DE | [N/P] |
| Former [2005/34] | TBK-Patent Bavariaring 4-6 80336 München / DE | ||
| Former [2002/03] | Leson, Thomas Johannes Alois, Dipl.-Ing. Tiedtke-Bühling-Kinne & Partner GbR, TBK-Patent, Bavariaring 4 80336 München / DE | Application number, filing date | 01116824.2 | 10.07.2001 | [2002/03] | Priority number, date | JP20000209158 | 11.07.2000 Original published format: JP 2000209158 | [2002/03] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1172457 | Date: | 16.01.2002 | Language: | EN | [2002/03] | Type: | B1 Patent specification | No.: | EP1172457 | Date: | 03.01.2007 | Language: | EN | [2007/01] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.12.2001 | Classification | IPC: | C23C16/24, C23C16/509, H01L31/028 | [2002/03] | CPC: |
C23C16/509 (EP,US);
C23C16/24 (EP,US);
H01L31/202 (EP,US);
Y02E10/50 (US);
Y02E10/547 (EP);
Y02P70/50 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2002/40] |
| Former [2002/03] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Title | German: | Verfahren zur Bildung dünner Schichten | [2002/03] | English: | Thin film formation method | [2002/03] | French: | Procédé de formation des couches minces | [2002/03] | Examination procedure | 28.05.2002 | Examination requested [2002/31] | 28.04.2005 | Despatch of a communication from the examining division (Time limit: M06) | 04.11.2005 | Reply to a communication from the examining division | 02.05.2006 | Communication of intention to grant the patent | 12.09.2006 | Fee for grant paid | 12.09.2006 | Fee for publishing/printing paid | Opposition(s) | 05.10.2007 | No opposition filed within time limit [2007/50] | Fees paid | Renewal fee | 30.07.2003 | Renewal fee patent year 03 | 30.07.2004 | Renewal fee patent year 04 | 29.07.2005 | Renewal fee patent year 05 | 31.07.2006 | Renewal fee patent year 06 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | FR | 03.01.2007 | IT | 03.01.2007 | NL | 03.01.2007 | GB | 10.07.2007 | [2008/52] |
| Former [2008/26] | IT | 03.01.2007 | |
| NL | 03.01.2007 | ||
| GB | 10.07.2007 | ||
| FR | 24.08.2007 | ||
| Former [2008/23] | IT | 03.01.2007 | |
| NL | 03.01.2007 | ||
| FR | 24.08.2007 | ||
| Former [2007/40] | NL | 03.01.2007 | Documents cited: | Search | [XA]JPH04318921 ; | [XA]EP0658918 (NISSIN ELECTRIC CO LTD [JP]) [X] 1-5 * examples 1,2 * [A] 6-10; | [X]US5942049 (LI YAUN-MIN [US], et al) [X] 1-10 * table 7 * | [XA] - PATENT ABSTRACTS OF JAPAN, (19930325), vol. 017, no. 152, Database accession no. (E - 1340), & JP04318921 A 19921110 (SEIKO EPSON CORP) [X] 1-3 * abstract * [A] 4-10 |