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EP1197741
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EP About this file: EP1197741
| EP1197741 - Broadband spectroscopic rotating compensator ellipsometer [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 28.11.2003 Database last updated on 19.10.2024 | Most recent event Tooltip | 28.11.2003 | Application deemed to be withdrawn | published on 14.01.2004 [2004/03] | Applicant(s) | For all designated states THERMA-WAVE INC. 1250 Reliance Way Fremont California 94539 / US | [N/P] |
| Former [2002/16] | For all designated states THERMA-WAVE INC. 1250 Reliance Way Fremont, California 94539 / US | Inventor(s) | 01 /
Aspnes, David E. 2517 Olive Chapel Road Apex, North Carolina 27502 / US | 02 /
Ospal, Jon 2295 Norwood Road Livermore, California 94550 / US | [2002/16] | Representative(s) | Jackson, David Spence Reddie & Grose LLP 16 Theobalds Road London WC1X 8PL / GB | [N/P] |
| Former [2002/16] | Jackson, David Spence REDDIE & GROSE 16, Theobalds Road London, WC1X 8PL / GB | Application number, filing date | 01204896.3 | 22.07.1997 | [2002/16] | Priority number, date | US19960685606 | 24.07.1996 Original published format: US 685606 | [2002/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1197741 | Date: | 17.04.2002 | Language: | EN | [2002/16] | Type: | A3 Search report | No.: | EP1197741 | Date: | 07.08.2002 | [2002/32] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.06.2002 | Classification | IPC: | G01N21/21, G01J4/04, G01B11/06, G01J3/447 | [2002/32] | CPC: |
G01J3/02 (EP,US);
G01J3/0229 (EP,US);
G01J3/0232 (EP,US);
G01N21/211 (EP,US);
G01N2021/213 (EP,US)
|
| Former IPC [2002/16] | G01N21/21, G01J4/04, G01B11/06 | Designated contracting states | DE, ES, FR, GB, IT, NL, SE [2002/16] | Title | German: | Breitbandiges spektroellipsometer mit rotierendem Kompensator | [2002/16] | English: | Broadband spectroscopic rotating compensator ellipsometer | [2002/16] | French: | Ellipsomètre spectroscopique à large bande et à compensateur rotatif | [2002/16] | Examination procedure | 06.01.2003 | Examination requested [2003/11] | 11.02.2003 | Despatch of a communication from the examining division (Time limit: M04) | 24.06.2003 | Application deemed to be withdrawn, date of legal effect [2004/03] | 31.07.2003 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2004/03] | Parent application(s) Tooltip | EP97935177.2 / EP0914600 | Fees paid | Renewal fee | 03.01.2002 | Renewal fee patent year 03 | 03.01.2002 | Renewal fee patent year 04 | 03.01.2002 | Renewal fee patent year 05 | 12.07.2002 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.07.2003 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XP]EP0737856 (J A WOOLLAM CO INC [US]) [XP] 1,4-6,10-13,15,17-19,23 * page 2, line 48 * * page 3, line 6 - line 11 * * page 3, line 58 - page 4, line 1 * * page 4, line 37 - line 40 * * page 7, line 5 - line 12 * * claim 9 *; | [A]WO9612941 (THERMA WAVE INC [US], et al) [A] 1,15 * column W *; | [A]US4053232 (DILL FREDERICK H, et al) [A] 7,8,20,21 * the whole document * |