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Extract from the Register of European Patents

EP About this file: EP1296351

EP1296351 - CHARGED PARTICLE BEAM INSPECTION APPARATUS AND METHOD FOR FABRICATING DEVICE USING THAT INSPECTION APPARATUS [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  23.04.2010
Database last updated on 26.07.2024
Most recent event   Tooltip23.04.2010Application deemed to be withdrawnpublished on 26.05.2010  [2010/21]
Applicant(s)For all designated states
EBARA CORPORATION
11-1, Haneda Asahi-cho Ohta-ku
Tokyo 144-8510 / JP
[N/P]
Former [2006/10]For all designated states
EBARA CORPORATION
11-1, Haneda Asahi-cho
Ohta-ku, Tokyo 144-8510 / JP
Former [2003/13]For all designated states
EBARA CORPORATION
11-1, Haneda Asahi-cho
Ohta-ku, Tokyo 144-8510 / JP
For all designated states
Nikon Corporation
Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku
Tokyo 100-8831 / JP
Inventor(s)01 / NAKASUJI, Mamoru
2-15-11, Serigaya, Konan-ku
Yokohama-shi, Kanagawa 233-0006 / JP
02 / NOJI, Nobuharu
8-2-7, Hisagi
Zushi-shi, Kanagawa 249-0001 / JP
03 / SATAKE, Tohru
14-47, Higashikaigankita 2-chome
Chigasaki-shi, Kanagawa 253-0053 / JP
04 / KIMBA, Toshifumi
3-12-16, Kugenuma sakuragaoka
Fujisawa-shi, Kanagawa 251-0027 / JP
05 / SOBUKAWA, Hirosi
5-32-2-307, Iriya
Zama-shi, Kanagawa 228-0024 / JP
06 / YOSHIKAWA, Shoji
1069-167, Katakura-machi
Hachioji-shi, Tokyo 192-0914 / JP
07 / KARIMATA, Tsutomu
2-3-3207-723, Shiomidai 3-chome, Isogo-ku
Yokohama-shi, Kanagawa 235-0022 / JP
08 / OOWADA, Shin
1-10-8, Fujizuka, Kohoku-ku
Yokohama-shi, Kanagawa 222-0012 / JP
09 / SAITO, Mutsumi
4-28-14-B206, Namamugi, Tsurumi-ku
Yokohama-shi, Kanagawa 230-0052 / JP
10 / HAMASHIMA, Muneki
2-16-5-101, Kairaku
Urayasu-shi, Chiba 279-0003 / JP
11 / TAKAGI, Toru
1-50-2-102, Akuwa higashi, Seya-ku
Yokohama-shi, Kanagawa 246-0023 / JP
 [2003/13]
Representative(s)Wagner, Karl H.
Wagner & Geyer Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5
80538 München / DE
[N/P]
Former [2008/33]Wagner, Karl H.
Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5
80538 München / DE
Former [2003/13]Wagner, Karl H., Dipl.-Ing.
Wagner & Geyer, Patentanwälte, Gewürzmühlstrasse 5
80538 München / DE
Application number, filing date01943833.227.06.2001
[2003/13]
WO2001JP05496
Priority number, dateJP2000019291827.06.2000         Original published format: JP 2000192918
JP2000033575102.11.2000         Original published format: JP 2000335751
JP2000033575202.11.2000         Original published format: JP 2000335752
JP2000033609102.11.2000         Original published format: JP 2000336091
JP2000033615602.11.2000         Original published format: JP 2000336156
JP2000033705806.11.2000         Original published format: JP 2000337058
JP2000037728512.12.2000         Original published format: JP 2000377285
JP2001003190108.02.2001         Original published format: JP 2001031901
JP2001003190608.02.2001         Original published format: JP 2001031906
JP2001003359909.02.2001         Original published format: JP 2001033599
JP2001011274511.04.2001         Original published format: JP 2001112745
JP2001011506013.04.2001         Original published format: JP 2001115060
JP2001014308414.05.2001         Original published format: JP 2001143084
JP2001015857128.05.2001         Original published format: JP 2001158571
[2003/13]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0201597
Date:03.01.2002
Language:EN
[2002/01]
Type: A1 Application with search report 
No.:EP1296351
Date:26.03.2003
Language:EN
The application published by WIPO in one of the EPO official languages on 03.01.2002 takes the place of the publication of the European patent application.
[2003/13]
Search report(s)International search report - published on:JP03.01.2002
(Supplementary) European search report - dispatched on:EP25.08.2009
ClassificationIPC:H01J37/29, H01J37/244, H01J37/20, G01B15/00, H01L21/66, G01N23/225
[2003/13]
CPC:
G03F7/70616 (EP,US); H01J37/29 (KR); G01N23/225 (EP,US);
H01J37/05 (EP,US); H01J37/06 (EP,US); H01J37/073 (EP,US);
H01J37/075 (EP,US); H01J37/185 (EP,US); H01J37/20 (EP,US);
H01J37/222 (EP,US); H01J37/226 (EP,US); H01J37/244 (EP,US);
H01J37/28 (EP,US); H01J2237/0435 (EP,US); H01J2237/057 (EP,US);
H01J2237/06316 (EP,US); H01J2237/082 (EP,US); H01J2237/202 (EP,US);
H01J2237/20228 (EP,US); H01J2237/204 (EP,US); H01J2237/22 (EP,US);
H01J2237/2446 (EP,US); H01J2237/24485 (EP,US); H01J2237/24564 (EP,US);
H01J2237/248 (EP,US); H01J2237/2482 (EP,US); H01J2237/2806 (EP,US);
H01J2237/2816 (EP,US); H01J2237/2817 (EP,US) (-)
Designated contracting statesDE,   FR,   GB,   NL [2003/13]
TitleGerman:UNTERSUCHUNGSVORRICHTUNG FÜR GELADENE TEILCHENSTRAHLEN UND VERFAHREN ZUR HERSTELLUNG EINES BAUELEMENTS MIT DIESER UNTERSUCHUNGSVORRICHTUNG[2003/13]
English:CHARGED PARTICLE BEAM INSPECTION APPARATUS AND METHOD FOR FABRICATING DEVICE USING THAT INSPECTION APPARATUS[2003/13]
French:APPAREIL D'INSPECTION A FAISCEAU DE PARTICULES CHARGEES ET PROCEDE DE FABRICATION D'UN DISPOSITIF UTILISANT CET APPAREIL D'INSPECTION[2003/13]
Entry into regional phase14.10.2002Translation filed 
14.10.2002National basic fee paid 
14.10.2002Search fee paid 
14.10.2002Designation fee(s) paid 
14.10.2002Examination fee paid 
Examination procedure13.12.2001Request for preliminary examination filed
International Preliminary Examining Authority: JP
14.10.2002Examination requested  [2003/13]
04.03.2003Amendment by applicant (claims and/or description)
24.11.2009Application deemed to be withdrawn, date of legal effect  [2010/21]
05.01.2010Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2010/21]
Fees paidRenewal fee
14.10.2002Renewal fee patent year 03
30.06.2004Renewal fee patent year 04
29.06.2005Renewal fee patent year 05
28.06.2006Renewal fee patent year 06
27.06.2007Renewal fee patent year 07
25.06.2008Renewal fee patent year 08
29.06.2009Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US4443278  (ZINGHER ARTHUR R [US]) [A] 1,3,11 * figures 9,11,13,14 *;
 [A]US4851768  (YOSHIZAWA MASAHIRO [JP], et al) [A] 1,3,11 * figures 1,4,6,9,13,15-17 *;
 [A]EP0661727  (HITACHI LTD [JP]) [A] 10-12 * column 9, line 18 - line 30 * * column 10, line 55 - column 11, line 16 * * column 11, line 27 - line 46 *;
 [XY]JPH09311112  (NIKON CORP) [X] 3 * paragraph [0005] * * figures 1,4,5 * * figure 2a * [Y] 1,6,9-12;
 [Y]JPH10125271  (HITACHI LTD) [Y] 10-12 * paragraph [0019] - paragraph [0022] *;
 [Y]WO9909582  (NIKON CORP [JP], et al) [Y] 1,2 * figure 1 *;
 [A]JPH1154408  (FUJITSU LTD) [A] 1,3,11 * figure 7 *;
 [XY]US5892224  (NAKASUJI MAMORU [JP]) [X] 3 * figures 2a,2b * * figures 1,4-6 * * column 1, lines 9-13 * * column 8, line 19 - column 9, line 64 * * column 11, line 64 - column 16, line 50 * * column 15, lines 54-60 * * figures 1,4-6 * * column 9, line 13 - column 11, line 12 * [Y] 1,6,9-12;
 [XY]JPH11132975  (TOSHIBA CORP) [X] 3-5,7,8 * figure 4 * * figure 1 * [Y] 1,2,6,9-12;
 [E]US6265719  (YAMAZAKI YUICHIRO [JP], et al) [E] 1-12 * figure 2 * * column 4, line 24 - column 6, line 17 *;
 [E]US6479819  (HAMASHIMA MUNEKI [JP], et al) [E] 1,2* column 7, lines 22-25; figure 1 *
International search[A]JPS62100936  (SHIMADZU CORP);
 [Y]US4944645  (SUZUKI AKIRA [JP]);
 [Y]JPH0973872  (JEOL LTD);
 [Y]JPH1062503  (NIKON CORP);
 [Y]JPH10125271  (HITACHI LTD);
 [X]JPH11233062  (JEOL LTD);
 [Y]JP2000003692  (NIKON CORP);
 [X]JP2000067798  (NIKON CORP);
 [Y]JP2000100369  (JEOL LTD);
 [X]JP2000133565  (CANON KK);
 [X]JP2000149843  (NIKON CORP)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.