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Extract from the Register of European Patents

EP About this file: EP1290485

EP1290485 - METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER [Right-click to bookmark this link]
Former [2003/11]MICROSCOPE AND METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER
[2006/20]
StatusNo opposition filed within time limit
Status updated on  09.11.2007
Database last updated on 03.09.2024
Most recent event   Tooltip11.09.2009Lapse of the patent in a contracting state
New state(s): TR		published on 14.10.2009  [2009/42]
Applicant(s)For all designated states
Deutsches Zentrum für Luft- und Raumfahrt e.V.
Linder Höhe
51147 Köln / DE
[2006/24]
Former [2005/02]For all designated states
Deutsches Zentrum für Luft- und Raumfahrt e.V.
51170 Köln / DE
Former [2003/33]For all designated states
Carl Zeiss
89518 Heidenheim (Brenz) / DE
Former [2003/11]For all designated states
Carl Zeiss
Königsallee 9-21
37061 Göttingen / DE
Inventor(s)01 / TÖBBEN, Helmut
Sielkamp 22
38112 Braunschweig / DE
02 / SCHMITT, Dirk-Roger
Lötzenweg 5
38124 Braunschweig / DE
03 / RINGEL, Gabriele
Celler Heerstrasse 34
38114 Braunschweig / DE
 [2003/11]
Representative(s)Einsel, Martin, et al
Patentanwälte Einsel & Kollegen Jasperallee 1a
38102 Braunschweig / DE
[N/P]
Former [2005/02]Einsel, Martin, et al
Patentanwälte, Einsel & Kollegen, Jasperalle 1a
38102 Braunschweig / DE
Former [2003/11]Einsel, Martin
Patentanwälte, Einsel & Kollegen, Jasperalle 1a
38102 Braunschweig / DE
Application number, filing date01960310.914.06.2001
[2003/11]
WO2001EP06724
Priority number, dateDE200012844414.06.2000         Original published format: DE 10028444
DE200013622726.07.2000         Original published format: DE 10036227
[2003/11]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report
No.:WO0196926
Date:20.12.2001
Language:DE
[2001/51]
Type: A2 Application without search report 
No.:EP1290485
Date:12.03.2003
Language:DE
The application published by WIPO in one of the EPO official languages on 20.12.2001 takes the place of the publication of the European patent application.
[2003/11]
Type: B1 Patent specification 
No.:EP1290485
Date:03.01.2007
Language:DE
[2007/01]
Search report(s)International search report - published on:EP16.05.2002
ClassificationIPC:G02B21/00
[2003/11]
CPC:
G01B11/30 (EP,US); G01B9/02097 (EP,US); G02B21/14 (EP,US);
G01B2290/70 (EP,US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   TR [2003/11]
Extension statesALNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
RONot yet paid
SINot yet paid
TitleGerman:VERFAHREN ZUR QUANTITATIVEN OPTISCHEN MESSUNG DER TOPOGRAPHIE EINER OBERFLÄCHE[2006/20]
English:METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER[2006/20]
French:PROCEDE DE MESURE OPTIQUE QUANTITATIVE DE LA TOPOGRAPHIE D'UNE SURFACE[2006/20]
Former [2003/11]MIKROSKOP UND VERFAHREN ZUR QUANTITATIVEN OPTISCHEN MESSUNG DER TOPOGRAPHIE EINER OBERFLÄCHE
Former [2003/11]MICROSCOPE AND METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER
Former [2003/11]MICROSCOPE ET PROCEDE DE MESURE OPTIQUE QUANTITATIVE DE LA TOPOGRAPHIE D'UNE SURFACE
Entry into regional phase13.12.2002National basic fee paid 
13.12.2002Designation fee(s) paid 
13.12.2002Examination fee paid 
Examination procedure10.01.2002Request for preliminary examination filed
International Preliminary Examining Authority: EP
13.12.2002Examination requested  [2003/11]
01.02.2003Amendment by applicant (claims and/or description)
03.07.2003Despatch of a communication from the examining division (Time limit: M07)
12.02.2004Reply to a communication from the examining division
16.08.2004Despatch of a communication from the examining division (Time limit: M06)
31.03.2005Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
31.05.2005Reply to a communication from the examining division
24.03.2006Cancellation of oral proceeding that was planned for 29.03.2006
24.03.2006Minutes of oral proceedings despatched
29.03.2006Date of oral proceedings (cancelled)
20.04.2006Communication of intention to grant the patent
17.08.2006Fee for grant paid
08.09.2006Fee for publishing/printing paid
Opposition(s)05.10.2007No opposition filed within time limit [2007/50]
Request for further processing for:08.09.2006Request for further processing filed
08.09.2006Full payment received (date of receipt of payment)
Request granted
04.12.2006Decision despatched
31.05.2005Request for further processing filed
31.05.2005Full payment received (date of receipt of payment)
Request granted
17.06.2005Decision despatched
Fees paidRenewal fee
13.12.2002Renewal fee patent year 03
19.06.2004Renewal fee patent year 04
06.05.2005Renewal fee patent year 05
13.05.2006Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipCY03.01.2007
DK03.01.2007
FI03.01.2007
FR03.01.2007
GB03.01.2007
IE03.01.2007
IT03.01.2007
NL03.01.2007
TR03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
AT14.06.2007
LU14.06.2007
BE30.06.2007
CH30.06.2007
LI30.06.2007
MC30.06.2007
[2009/42]
Former [2009/37]CY03.01.2007
DK03.01.2007
FI03.01.2007
FR03.01.2007
GB03.01.2007
IE03.01.2007
IT03.01.2007
NL03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
AT14.06.2007
LU14.06.2007
BE30.06.2007
CH30.06.2007
LI30.06.2007
MC30.06.2007
Former [2009/33]CY03.01.2007
DK03.01.2007
FI03.01.2007
FR03.01.2007
GB03.01.2007
IE03.01.2007
IT03.01.2007
NL03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
AT14.06.2007
BE30.06.2007
CH30.06.2007
LI30.06.2007
MC30.06.2007
Former [2008/52]DK03.01.2007
FI03.01.2007
FR03.01.2007
GB03.01.2007
IE03.01.2007
IT03.01.2007
NL03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
AT14.06.2007
BE30.06.2007
CH30.06.2007
LI30.06.2007
MC30.06.2007
Former [2008/39]DK03.01.2007
FI03.01.2007
GB03.01.2007
IE03.01.2007
IT03.01.2007
NL03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
AT14.06.2007
BE30.06.2007
CH30.06.2007
LI30.06.2007
MC30.06.2007
FR24.08.2007
Former [2008/23]DK03.01.2007
FI03.01.2007
GB03.01.2007
IE03.01.2007
IT03.01.2007
NL03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
BE30.06.2007
CH30.06.2007
LI30.06.2007
MC30.06.2007
FR24.08.2007
Former [2008/20]DK03.01.2007
FI03.01.2007
GB03.01.2007
IE03.01.2007
NL03.01.2007
SE03.04.2007
GR04.04.2007
ES14.04.2007
PT04.06.2007
BE30.06.2007
MC30.06.2007
Former [2008/09]DK03.01.2007
FI03.01.2007
GB03.01.2007
IE03.01.2007
NL03.01.2007
SE03.04.2007
ES14.04.2007
PT04.06.2007
MC30.06.2007
Former [2007/51]DK03.01.2007
FI03.01.2007
GB03.01.2007
IE03.01.2007
NL03.01.2007
SE03.04.2007
ES14.04.2007
PT04.06.2007
Former [2007/48]DK03.01.2007
FI03.01.2007
IE03.01.2007
NL03.01.2007
SE03.04.2007
ES14.04.2007
PT04.06.2007
Former [2007/46]DK03.01.2007
FI03.01.2007
NL03.01.2007
SE03.04.2007
ES14.04.2007
PT04.06.2007
Former [2007/39]FI03.01.2007
NL03.01.2007
SE03.04.2007
ES14.04.2007
PT04.06.2007
Former [2007/38]FI03.01.2007
SE03.04.2007
PT04.06.2007
Former [2007/36]FI03.01.2007
PT04.06.2007
Cited inInternational search[A]US4844616  (KULKARNI MURLIDHAR V [US], et al) [A] 1,4 * column 4; figure 1 *;
 [X]US5955661  (SAMSAVAR AMIN [US], et al) [X] 1-5,10-12 * column 5, line 23 - column 6, line 10; figure 3 *;
 [X]US5956141  (HAYASHI SHINICHI [JP]) [X] 1,10 * column 9, line 50 - column 10, line 41; figure 9 *;
 [X]  - SHIMADA W ET AL, "Optical surface microtopography using phase-shifting Nomarski microscope", OPTICAL TESTING AND METROLOGY III, SAN DIEGO, CA, USA, 8-13 JULY 1990, Proceedings of the SPIE, vol. 1332, pt.2, ISSN 0277-786X, pages 525 - 529, XP002186313 [X] 1-3,5,10-13,18,19 * page 525 - page 527 *

DOI:   http://dx.doi.org/10.1117/12.51058
 [A]  - HARTMAN J S ET AL, "Quantitative surface topography determination by Nomarski reflection microscopy. II. Microscope modification, calibration, and planar sample experiments", APPLIED OPTICS, 1 SEPT. 1980, USA, vol. 19, no. 17, ISSN 0003-6935, pages 2998 - 3009, XP002186314 [A] 1,7,8 * page 3001, column L; figure 3 *

DOI:   http://dx.doi.org/10.1364/AO.19.002998
ExaminationDE1278134
 DE3432636
 US4753525
 JPH09325281
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.