EP1290485 - METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER [Right-click to bookmark this link] | |||
Former [2003/11] | MICROSCOPE AND METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER | ||
[2006/20] | Status | No opposition filed within time limit Status updated on 09.11.2007 Database last updated on 03.09.2024 | Most recent event Tooltip | 11.09.2009 | Lapse of the patent in a contracting state New state(s): TR | published on 14.10.2009 [2009/42] | Applicant(s) | For all designated states Deutsches Zentrum für Luft- und Raumfahrt e.V. Linder Höhe 51147 Köln / DE | [2006/24] |
Former [2005/02] | For all designated states Deutsches Zentrum für Luft- und Raumfahrt e.V. 51170 Köln / DE | ||
Former [2003/33] | For all designated states Carl Zeiss 89518 Heidenheim (Brenz) / DE | ||
Former [2003/11] | For all designated states Carl Zeiss Königsallee 9-21 37061 Göttingen / DE | Inventor(s) | 01 /
TÖBBEN, Helmut Sielkamp 22 38112 Braunschweig / DE | 02 /
SCHMITT, Dirk-Roger Lötzenweg 5 38124 Braunschweig / DE | 03 /
RINGEL, Gabriele Celler Heerstrasse 34 38114 Braunschweig / DE | [2003/11] | Representative(s) | Einsel, Martin, et al Patentanwälte Einsel & Kollegen Jasperallee 1a 38102 Braunschweig / DE | [N/P] |
Former [2005/02] | Einsel, Martin, et al Patentanwälte, Einsel & Kollegen, Jasperalle 1a 38102 Braunschweig / DE | ||
Former [2003/11] | Einsel, Martin Patentanwälte, Einsel & Kollegen, Jasperalle 1a 38102 Braunschweig / DE | Application number, filing date | 01960310.9 | 14.06.2001 | [2003/11] | WO2001EP06724 | Priority number, date | DE2000128444 | 14.06.2000 Original published format: DE 10028444 | DE2000136227 | 26.07.2000 Original published format: DE 10036227 | [2003/11] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | WO0196926 | Date: | 20.12.2001 | Language: | DE | [2001/51] | Type: | A2 Application without search report | No.: | EP1290485 | Date: | 12.03.2003 | Language: | DE | The application published by WIPO in one of the EPO official languages on 20.12.2001 takes the place of the publication of the European patent application. | [2003/11] | Type: | B1 Patent specification | No.: | EP1290485 | Date: | 03.01.2007 | Language: | DE | [2007/01] | Search report(s) | International search report - published on: | EP | 16.05.2002 | Classification | IPC: | G02B21/00 | [2003/11] | CPC: |
G01B11/30 (EP,US);
G01B9/02097 (EP,US);
G02B21/14 (EP,US);
G01B2290/70 (EP,US)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2003/11] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | VERFAHREN ZUR QUANTITATIVEN OPTISCHEN MESSUNG DER TOPOGRAPHIE EINER OBERFLÄCHE | [2006/20] | English: | METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER | [2006/20] | French: | PROCEDE DE MESURE OPTIQUE QUANTITATIVE DE LA TOPOGRAPHIE D'UNE SURFACE | [2006/20] |
Former [2003/11] | MIKROSKOP UND VERFAHREN ZUR QUANTITATIVEN OPTISCHEN MESSUNG DER TOPOGRAPHIE EINER OBERFLÄCHE | ||
Former [2003/11] | MICROSCOPE AND METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER | ||
Former [2003/11] | MICROSCOPE ET PROCEDE DE MESURE OPTIQUE QUANTITATIVE DE LA TOPOGRAPHIE D'UNE SURFACE | Entry into regional phase | 13.12.2002 | National basic fee paid | 13.12.2002 | Designation fee(s) paid | 13.12.2002 | Examination fee paid | Examination procedure | 10.01.2002 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 13.12.2002 | Examination requested [2003/11] | 01.02.2003 | Amendment by applicant (claims and/or description) | 03.07.2003 | Despatch of a communication from the examining division (Time limit: M07) | 12.02.2004 | Reply to a communication from the examining division | 16.08.2004 | Despatch of a communication from the examining division (Time limit: M06) | 31.03.2005 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 31.05.2005 | Reply to a communication from the examining division | 24.03.2006 | Cancellation of oral proceeding that was planned for 29.03.2006 | 24.03.2006 | Minutes of oral proceedings despatched | 29.03.2006 | Date of oral proceedings (cancelled) | 20.04.2006 | Communication of intention to grant the patent | 17.08.2006 | Fee for grant paid | 08.09.2006 | Fee for publishing/printing paid | Opposition(s) | 05.10.2007 | No opposition filed within time limit [2007/50] | Request for further processing for: | 08.09.2006 | Request for further processing filed | 08.09.2006 | Full payment received (date of receipt of payment) Request granted | 04.12.2006 | Decision despatched | 31.05.2005 | Request for further processing filed | 31.05.2005 | Full payment received (date of receipt of payment) Request granted | 17.06.2005 | Decision despatched | Fees paid | Renewal fee | 13.12.2002 | Renewal fee patent year 03 | 19.06.2004 | Renewal fee patent year 04 | 06.05.2005 | Renewal fee patent year 05 | 13.05.2006 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CY | 03.01.2007 | DK | 03.01.2007 | FI | 03.01.2007 | FR | 03.01.2007 | GB | 03.01.2007 | IE | 03.01.2007 | IT | 03.01.2007 | NL | 03.01.2007 | TR | 03.01.2007 | SE | 03.04.2007 | GR | 04.04.2007 | ES | 14.04.2007 | PT | 04.06.2007 | AT | 14.06.2007 | LU | 14.06.2007 | BE | 30.06.2007 | CH | 30.06.2007 | LI | 30.06.2007 | MC | 30.06.2007 | [2009/42] |
Former [2009/37] | CY | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
FR | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
AT | 14.06.2007 | ||
LU | 14.06.2007 | ||
BE | 30.06.2007 | ||
CH | 30.06.2007 | ||
LI | 30.06.2007 | ||
MC | 30.06.2007 | ||
Former [2009/33] | CY | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
FR | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
AT | 14.06.2007 | ||
BE | 30.06.2007 | ||
CH | 30.06.2007 | ||
LI | 30.06.2007 | ||
MC | 30.06.2007 | ||
Former [2008/52] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
FR | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
AT | 14.06.2007 | ||
BE | 30.06.2007 | ||
CH | 30.06.2007 | ||
LI | 30.06.2007 | ||
MC | 30.06.2007 | ||
Former [2008/39] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
AT | 14.06.2007 | ||
BE | 30.06.2007 | ||
CH | 30.06.2007 | ||
LI | 30.06.2007 | ||
MC | 30.06.2007 | ||
FR | 24.08.2007 | ||
Former [2008/23] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
BE | 30.06.2007 | ||
CH | 30.06.2007 | ||
LI | 30.06.2007 | ||
MC | 30.06.2007 | ||
FR | 24.08.2007 | ||
Former [2008/20] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
BE | 30.06.2007 | ||
MC | 30.06.2007 | ||
Former [2008/09] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
MC | 30.06.2007 | ||
Former [2007/51] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
Former [2007/48] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
Former [2007/46] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
Former [2007/39] | FI | 03.01.2007 | |
NL | 03.01.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
PT | 04.06.2007 | ||
Former [2007/38] | FI | 03.01.2007 | |
SE | 03.04.2007 | ||
PT | 04.06.2007 | ||
Former [2007/36] | FI | 03.01.2007 | |
PT | 04.06.2007 | Cited in | International search | [A]US4844616 (KULKARNI MURLIDHAR V [US], et al) [A] 1,4 * column 4; figure 1 *; | [X]US5955661 (SAMSAVAR AMIN [US], et al) [X] 1-5,10-12 * column 5, line 23 - column 6, line 10; figure 3 *; | [X]US5956141 (HAYASHI SHINICHI [JP]) [X] 1,10 * column 9, line 50 - column 10, line 41; figure 9 *; | [X] - SHIMADA W ET AL, "Optical surface microtopography using phase-shifting Nomarski microscope", OPTICAL TESTING AND METROLOGY III, SAN DIEGO, CA, USA, 8-13 JULY 1990, Proceedings of the SPIE, vol. 1332, pt.2, ISSN 0277-786X, pages 525 - 529, XP002186313 [X] 1-3,5,10-13,18,19 * page 525 - page 527 * DOI: http://dx.doi.org/10.1117/12.51058 | [A] - HARTMAN J S ET AL, "Quantitative surface topography determination by Nomarski reflection microscopy. II. Microscope modification, calibration, and planar sample experiments", APPLIED OPTICS, 1 SEPT. 1980, USA, vol. 19, no. 17, ISSN 0003-6935, pages 2998 - 3009, XP002186314 [A] 1,7,8 * page 3001, column L; figure 3 * DOI: http://dx.doi.org/10.1364/AO.19.002998 | Examination | DE1278134 | DE3432636 | US4753525 | JPH09325281 |