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EP1319243

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EP About this file: EP1319243

EP1319243 - DOUBLE DUAL SLOT LOAD LOCK FOR PROCESS EQUIPMENT [Right-click to bookmark this link]
Status	The application has been refused Status updated on 06.01.2012 Database last updated on 03.06.2024
Most recent event Tooltip	06.01.2012	Refusal of application	published on 08.02.2012 [2012/06]
Applicant(s)	For all designated states Applied Materials, Inc. P.O. Box 450A Santa Clara, California 95052 / US
	[N/P]
Former [2003/25]	For all designated states Applied Materials, Inc. P.O. Box 450A Santa Clara, California 95052 / US
Inventor(s)	01 / KURITA, Shinichi 3532 Rollingside Drive San Jose, CA 95148 / US
	02 / BLONIGAN, Wendell, T. 32478 Monterey Drive Union City, CA 94586 / US
	[2003/25]
Representative(s)	Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
	[N/P]
Former [2009/52]	Bayliss, Geoffrey Cyril, et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
Former [2003/25]	Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
Application number, filing date	01971084.7	13.09.2001
	[2003/25]
	WO2001US28944
Priority number, date	US20000663862	15.09.2000 Original published format: US 663862
	[2003/25]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO0223597
	Date:	21.03.2002
	Language:	EN
	[2002/12]
	Type:	A2 Application without search report
	No.:	EP1319243
	Date:	18.06.2003
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 21.03.2002 takes the place of the publication of the European patent application.
	[2003/25]
Search report(s)	International search report - published on:	EP	10.10.2002
Classification	IPC:	H01L21/00	[2003/25]
	CPC:	H01L21/67748 (EP,KR,US); H01L21/67167 (EP,KR,US); H01L21/67098 (EP,KR,US); H01L21/67201 (EP,KR,US); H01L21/67389 (KR); H01L21/67772 (KR); (+) H01L21/6838 (KR); H01L21/68707 (KR) (-)
Designated contracting states	BE, DE, FR, GB, NL [2004/21]
Former [2003/25]	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR
Title	German:	ZWEIFACHLADUNGSSCHLEUSENVORRICHTUNG MIT DOPPELSCHLITZ FÜR PROZESSANLAGE	[2003/25]
	English:	DOUBLE DUAL SLOT LOAD LOCK FOR PROCESS EQUIPMENT	[2003/25]
	French:	SAS DOUBLE A DEUX FENTES POUR EQUIPEMENT DE PROCEDE	[2003/25]
Entry into regional phase	11.04.2003	National basic fee paid
	11.04.2003	Designation fee(s) paid
	11.04.2003	Examination fee paid
Examination procedure	09.04.2002	Request for preliminary examination filed International Preliminary Examining Authority: US
	11.04.2003	Examination requested [2003/25]
	24.06.2003	Amendment by applicant (claims and/or description)
	10.11.2006	Despatch of a communication from the examining division (Time limit: M04)
	15.03.2007	Reply to a communication from the examining division
	03.06.2008	Despatch of a communication from the examining division (Time limit: M04)
	13.10.2008	Reply to a communication from the examining division
	25.05.2011	Application refused, date of legal effect [2012/06]
	25.05.2011	Date of oral proceedings
	16.09.2011	Despatch of communication that the application is refused, reason: substantive examination [2012/06]
	16.09.2011	Minutes of oral proceedings despatched
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 10.11.2006
Fees paid	Renewal fee
	04.09.2003	Renewal fee patent year 03
	06.09.2004	Renewal fee patent year 04
	05.09.2005	Renewal fee patent year 05
	08.09.2006	Renewal fee patent year 06
	05.09.2007	Renewal fee patent year 07
	05.09.2008	Renewal fee patent year 08
	04.09.2009	Renewal fee patent year 09
	07.09.2010	Renewal fee patent year 10
	08.09.2011	Renewal fee patent year 11
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited in	International search	[A]JPH03136345 ;
		[Y]EP0608620 (APPLIED MATERIALS INC [US]) [Y] 6,9,10,20,22,24 * the whole document *;
		[XY]WO9913504 (TOKYO ELECTRON LTD [JP], et al) [X] 1-5,7,8,12-19,21 [Y] 6,9,10,20,22,24;
		[A]EP0935279 (ASM JAPAN [JP]) [A] 1-24 * the whole document * * figures 4A-4D *;
		[X]US6059507 (ADAMS DOUGLAS R [US]) [X] 1,2,12-16,18,19,21 * the whole document *;
		US6338626 [ ] (SAEKI HIROAKI [JP]) [ ] * the whole document * * figures 1-4 *
		[A] - PATENT ABSTRACTS OF JAPAN, (19910905), vol. 015, no. 351, Database accession no. (E - 1108), & JP03136345 A 19910611 (FUJI ELECTRIC CO LTD) [A] 1-24 * abstract *
	Examination	WO9931714

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