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EP1322444

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EP About this file: EP1322444

EP1322444 - METHOD OF MANUFACTURING SPUTTER TARGETS WITH INTERNAL COOLING CHANNELS [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 29.08.2008 Database last updated on 11.09.2024
Most recent event Tooltip	29.08.2008	Application deemed to be withdrawn	published on 01.10.2008 [2008/40]
Applicant(s)	For all designated states TOSOH SMD, INC. 3600 Gantz Road Grove City Ohio 43123 / US
	[N/P]
Former [2003/27]	For all designated states TOSOH SMD, INC. 3600 Gantz Road Grove City, Ohio 43123 / US
Inventor(s)	01 / IVANOV, Eugene, Y. 3198 Windsor Place Grove City, OH 43123 / US
	[2003/27]
Representative(s)	Murgatroyd, Susan Elizabeth, et al Baron Warren Redfern 1000 Great West Road Brentford TW8 9DW / GB
	[N/P]
Former [2003/27]	Murgatroyd, Susan Elizabeth, et al Baron & Warren, 19 South End Kensington, London W8 5BU / GB
Application number, filing date	01972989.6	11.09.2001
	[2003/27]
	WO2001US28411
Priority number, date	US20000231917P	11.09.2000 Original published format: US 231917 P
	[2003/27]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO0222300
	Date:	21.03.2002
	Language:	EN
	[2002/12]
	Type:	A1 Application with search report
	No.:	EP1322444
	Date:	02.07.2003
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 21.03.2002 takes the place of the publication of the European patent application.
	[2003/27]
Search report(s)	International search report - published on:	US	21.03.2002
	(Supplementary) European search report - dispatched on:	EP	20.12.2007
Classification	IPC:	B23K20/12, B23K31/02, B21K25/00, B23P11/00	[2007/44]
	CPC:	H01J37/3497 (EP,US); C23C14/35 (KR); B21K25/00 (EP,US); B23K20/02 (EP,US); B23K20/023 (EP,US); C23C14/3407 (EP,US); (+) H01J37/3435 (EP,US); Y10T428/24298 (EP,US); Y10T428/24744 (EP,US); Y10T428/24996 (EP,US); Y10T428/249974 (EP,US); Y10T428/249981 (EP,US) (-)
	Former IPC [2003/27]	B23K20/12, B23K31/02
Designated contracting states	DE, FR, GB, IE, IT [2004/20]
Former [2003/27]	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR
Title	German:	VERFAHREN ZUR HERSTELLUNG VON SPUTTERTARGETS MIT INNEREN KÜHLKANÄLEN	[2003/27]
	English:	METHOD OF MANUFACTURING SPUTTER TARGETS WITH INTERNAL COOLING CHANNELS	[2003/27]
	French:	PROCEDE DE FABRICATION DE CIBLES POUR PULVERISATION CATHODIQUE DOTEES DE CANAUX DE REFROIDISSEMENT INTERNES	[2003/27]
Entry into regional phase	04.04.2003	National basic fee paid
	04.04.2003	Search fee paid
	04.04.2003	Designation fee(s) paid
	04.04.2003	Examination fee paid
Examination procedure	11.03.2002	Request for preliminary examination filed International Preliminary Examining Authority: US
	04.04.2003	Examination requested [2003/27]
	19.03.2008	Application deemed to be withdrawn, date of legal effect [2008/40]
	08.05.2008	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2008/40]
Fees paid	Renewal fee
	26.09.2003	Renewal fee patent year 03
	24.09.2004	Renewal fee patent year 04
	23.09.2005	Renewal fee patent year 05
	30.10.2006	Renewal fee patent year 06
	Penalty fee
	Additional fee for renewal fee
	30.09.2006	06 M06 Fee paid on 30.10.2006
	30.09.2007	07 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[YA]US5039913 (WEGMANN URS [CH], et al) [Y] 1,2,7,8,11,12,20,22-24 * column 3, lines 11-48; figure 2 * [A] 3,5,10,13;
		[A]EP0800890 (TOUSUI LTD [JP]) [A] 1,2,7,8,11,12,20,22-24 * column 19, line 14 - column 20, line 33; figures 7-10 *;
		[A]US5833823 (GRUENENFELDER PIUS [CH], et al) [A] 1-13,20,22-24* abstract *;
		[Y]WO0015863 (TOSOH SMD INC [US], et al) [Y] 1,2,7,8,11,12,20,22-24 * page 3, lines 9-22 * * page 6, line 1 - page 8, line 1; figures 2-9 *
	International search	[A]US6071389 (ZHANG HAO [US]);
		[A]US4964564 (NEAL DONALD F [GB], et al);
		[A]US5230459 (MUELLER JOHN J [US], et al);
		[A]US5857611 (GILMAN PAUL S [US], et al);
		[A]US5215639 (BOYS DONALD R [US]);
		[A]US5595337 (DEMARAY RICHARD E [US], et al);
		[A]US3849869 (BOCCALARI M);
		[A]US4676843 (NAZMY MOHAMED Y [CH]);
		[A]US5253796 (STACHER GEORGE W [US], et al);
		[A]US5035314 (KORNYLAK ANDREW T [US])

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