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EP1313896
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EP About this file: EP1313896
| EP1313896 - APPARATUS AND METHOD FOR FLOW OF PROCESS GAS IN AN ULTRA-CLEAN ENVIRONMENT [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 12.03.2010 Database last updated on 15.06.2024 | Most recent event Tooltip | 12.03.2010 | Application deemed to be withdrawn | published on 14.04.2010 [2010/15] | Applicant(s) | For all designated states Texas Instruments Incorporated P.O. Box 655474 Mail Station 3999 Dallas, Texas 75265 / US | [N/P] |
| Former [2007/06] | For all designated states TEXAS INSTRUMENTS INCORPORATED P.O. Box 655474, Mail Station 3999 Dallas, Texas 75265 / US | ||
| Former [2003/22] | For all designated states Reflectivity Inc. Suite 103, 3910 Freedom Circle Santa Clara, CA 95054 / US | Inventor(s) | 01 /
PATEL, Satyadev Apt. 86, 5201 Laguna Oaks Drive Elk Grove, CA 95758 / US | 02 /
SCHAADT, Gregory P. 1524 Bellomy Street Santa Clara, CA 95050 / US | 03 /
MACDONALD, Douglas B. 204 Tait Avenue Los Gatos, CA 95030 / US | 04 /
MACDONALD, Niles K. 2515 Appley Way San Jose, CA 95124 / US | [2003/22] | Representative(s) | Prinz & Partner mbB Patent- und Rechtsanwälte Rundfunkplatz 2 80335 München / DE | [N/P] |
| Former [2009/02] | Prinz & Partner Patentanwälte Rundfunkplatz 2 80335 München / DE | ||
| Former [2007/06] | Degwert, Hartmut, et al Prinz & Partner GbR Rundfunkplatz 2 80335 München / DE | ||
| Former [2006/40] | Kirschner, Klaus Dieter, et al Kirschner Patentanwaltskanzlei Südliche Münchnerstrasse 53 82031 Grünwald / DE | ||
| Former [2003/22] | Kirschner, Klaus Dieter, Dipl.-Phys. Schneiders & Behrendt Rechtsanwälte - Patentanwälte Sollner Strasse 38 81479 München / DE | Application number, filing date | 01973670.1 | 28.08.2001 | [2003/22] | WO2001US41913 | Priority number, date | US20000649569 | 28.08.2000 Original published format: US 649569 | [2003/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0219391 | Date: | 07.03.2002 | Language: | EN | [2002/10] | Type: | A2 Application without search report | No.: | EP1313896 | Date: | 28.05.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.03.2002 takes the place of the publication of the European patent application. | [2003/22] | Search report(s) | International search report - published on: | US | 13.06.2002 | (Supplementary) European search report - dispatched on: | EP | 02.01.2006 | Classification | IPC: | H01L21/00, C03C15/00 | [2006/07] | CPC: |
H01L21/67063 (EP);
H01L21/3065 (KR);
C23F1/08 (US);
B81C1/00587 (EP,US);
B81C99/0025 (EP,US);
B82Y30/00 (EP,US);
C03C15/00 (EP);
H01L21/67017 (EP,US);
B81C2201/0138 (EP,US);
C03C2218/33 (EP)
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|
| Former IPC [2003/22] | C25F3/12 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2003/22] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | VORRICHTUNG UND VERFAHREN FÜR DEN FLUSS VON PROZESSGAS IN EINER ULTRASAUBEREN UMGEBUNG | [2003/22] | English: | APPARATUS AND METHOD FOR FLOW OF PROCESS GAS IN AN ULTRA-CLEAN ENVIRONMENT | [2003/22] | French: | APPAREIL ET PROCEDE D'ECOULEMENT DE GAZ DE TRAITEMENT DANS UN ENVIRONNEMENT ULTRAPROPRE | [2003/22] | Entry into regional phase | 24.03.2003 | National basic fee paid | 24.03.2003 | Search fee paid | 24.03.2003 | Designation fee(s) paid | 24.03.2003 | Examination fee paid | Examination procedure | 26.03.2002 | Request for preliminary examination filed International Preliminary Examining Authority: US | 24.03.2003 | Examination requested [2003/22] | 05.06.2009 | Despatch of a communication from the examining division (Time limit: M04) | 16.10.2009 | Application deemed to be withdrawn, date of legal effect [2010/15] | 24.11.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2010/15] | Fees paid | Renewal fee | 01.09.2003 | Renewal fee patent year 03 | 31.08.2004 | Renewal fee patent year 04 | 25.08.2005 | Renewal fee patent year 05 | 28.07.2006 | Renewal fee patent year 06 | 24.08.2007 | Renewal fee patent year 07 | 28.08.2008 | Renewal fee patent year 08 | Penalty fee | Additional fee for renewal fee | 31.08.2009 | 09 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XA]US4431477 (ZAJAC JOHN [US]) [X] 1,9 * column 3, line 11 - column 3, line 64; figure 1 * [A] 2-8,10-14; | [XA]JPS58145612 ; | [XA]JPS52139372 ; | [PX]WO0130715 (REFLECTIVITY INC [US], et al) [PX] 1-14 * page 9, line 1 - line 4; figure 1 * | [XA] - PATENT ABSTRACTS OF JAPAN, (19831124), vol. 007, no. 263, Database accession no. (C - 196), & JP58145612 A 19830830 (OLYMPUS KOGAKU KOGYO KK) [X] 1,9 * abstract * [A] 2-8,10-14 | [XA] - PATENT ABSTRACTS OF JAPAN, (19780209), vol. 002, no. 020, Database accession no. (E - 012), & JP52139372 A 19771121 (HITACHI LTD) [X] 1,9 * abstract * [A] 2-8,10-14 | International search | [X]US5206471 (SMITH DONALD K [US]); | [X]US5858065 (LI YAO-EN [US], et al); | [X]JPH09251981 (TOSHIBA CORP); | [Y]EP0878824 (SURFACE TECH SYS LTD [GB]); | [A]US6022456 (MANNING THOMAS J [US]); | [XE]US6277173 (SADAKATA TAKAYUKI [JP], et al); | [YP]US6290864 (PATEL SATYADEV R [US], et al); | [AE]US6328801 (GARY DANIEL [FR], et al); | [AE]US6334928 (SEKINE MAKOTO [JP], et al) |