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EP1239512
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EP About this file: EP1239512
| EP1239512 - Device and process for treating substrates in a fluid container [Right-click to bookmark this link] | Status | The application has been refused Status updated on 16.01.2009 Database last updated on 04.06.2024 | Most recent event Tooltip | 16.01.2009 | Refusal of application | published on 18.02.2009 [2009/08] | Applicant(s) | For all designated states SCP U.S., Inc. 2711 Centerville Road, Suite 400 Wilmington, DE, 19808 / US | [2005/19] |
| Former [2004/23] | For all designated states SCP Germany GmbH Carl-Benz-Strasse 10 72124 Pliezhausen / DE | ||
| Former [2002/37] | For all designated states STEAG MicroTech GmbH Carl-Benz-Strasse 10 72124 Pliezhausen / DE | Inventor(s) | 01 /
Weber, Martin STEAG MicroTech GmbH, Carl-Benz-Strasse 10 72124 Pliezhausen / DE | 02 /
Oshinowo, John STEAG MicroTech GmbH, Carl-Benz-Strasse 10 72124 Pliezhausen / DE | [2002/37] | Representative(s) | Geyer, Ulrich F., et al Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | [N/P] |
| Former [2002/37] | Geyer, Ulrich F., Dr. Dipl.-Phys., et al WAGNER & GEYER, Patentanwälte, Gewürzmühlstrasse 5 80538 München / DE | Application number, filing date | 02005774.1 | 27.03.1997 | [2002/37] | Priority number, date | DE19961016402 | 24.04.1996 Original published format: DE 19616402 | [2002/37] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | EP1239512 | Date: | 11.09.2002 | Language: | DE | [2002/37] | Type: | A3 Search report | No.: | EP1239512 | Date: | 12.04.2006 | [2006/15] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 27.02.2006 | Classification | IPC: | H01L21/00 | [2002/37] | CPC: |
H01L21/6708 (EP);
H01L21/6704 (EP);
H01L21/67051 (EP);
H01L21/67057 (EP)
| Designated contracting states | AT, BE, DE, FR, GB, IT, NL [2002/37] | Title | German: | Vorrichtung zum Behandeln von Substraten in einem Fluid-Behälter | [2002/37] | English: | Device and process for treating substrates in a fluid container | [2002/37] | French: | Procédé et dispositif pour traiter des substrats dans un récipient pour fluide | [2002/37] | Examination procedure | 13.03.2002 | Examination requested [2002/37] | 18.06.2002 | Amendment by applicant (claims and/or description) | 09.05.2008 | Despatch of a communication from the examining division (Time limit: M04) | 14.08.2008 | Reply to a communication from the examining division | 30.09.2008 | Despatch of communication that the application is refused, reason: substantive examination [2009/08] | 10.10.2008 | Application refused, date of legal effect [2009/08] | Parent application(s) Tooltip | EP97915453.1 / EP0895655 | Fees paid | Renewal fee | 13.03.2002 | Renewal fee patent year 03 | 13.03.2002 | Renewal fee patent year 04 | 13.03.2002 | Renewal fee patent year 05 | 13.03.2002 | Renewal fee patent year 06 | 11.03.2003 | Renewal fee patent year 07 | 25.03.2004 | Renewal fee patent year 08 | 18.02.2005 | Renewal fee patent year 09 | 15.02.2006 | Renewal fee patent year 10 | 20.03.2007 | Renewal fee patent year 11 | 26.03.2008 | Renewal fee patent year 12 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Licence(s) | ID: | 01 00/exclusive | For: | AT BE DE FR GB IT NL | Licencee: | Applied Materials Inc. 3050 Bowers Avenue M/S 0105 Santa Clara, California 95054 / US | Date: | 02.06.2005 | [2005/37] | Documents cited: | Search | [X]JPH07161678 ; | [X]US4092176 (KOZAI TERUO, et al) [X] 1-37 * column 2, line 54 - column 4, line 6; figures 3a,3b *; | [X]EP0319806 (TOSHIBA KK [JP], et al) [X] 1-37 * column 3, line 9 - column 4, line 34; figures 1,2 *; | [X]EP0675528 (SHINETSU HANDOTAI KK [JP]) [X] 1-37 * page 4, column 57 - page 8, column 16; figures 1,2 *; | [PX]US5520205 (GULDI RICHARD L [US], et al) [PX] 1-37* column 4, line 19 - column 6, line 65; figures 1-3 * | [X] - PATENT ABSTRACTS OF JAPAN, (19951031), vol. 1995, no. 09, & JP07161678 A 19950623 (DAINIPPON SCREEN MFG CO LTD) [X] 1-37 * abstract * |