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EP1267394
European procedure
Extract from the Register of European Patents
EP About this file: EP1267394
| EP1267394 - Improvements in or relating to semiconductor processing [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 06.10.2006 Database last updated on 26.07.2024 | Most recent event Tooltip | 26.06.2009 | Change - representative | published on 29.07.2009 [2009/31] | Applicant(s) | For all designated states Texas Instruments Incorporated 7839 Churchill Way Mail Station 3999 Dallas, Texas 75251 / US | [N/P] |
| Former [2005/48] | For all designated states TEXAS INSTRUMENTS INCORPORATED 7839 Churchill Way, Mail Station 3999 Dallas Texas 75251 / US | ||
| Former [2002/51] | For all designated states Texas Instruments Incorporated 7839 Churchill Way, Mail Station 3999 Dallas, Texas 75251 / US | Inventor(s) | 01 /
Jain, Manoj Kumar 1515 Rio Grande, Apt. No.2010 Plano, Texas 75075 / US | [2002/51] | Representative(s) | Degwert, Hartmut Prinz & Partner Rundfunkplatz 2 80335 München / DE | [N/P] |
| Former [2009/31] | Degwert, Hartmut Prinz & Partner GbR Rundfunkplatz 2 80335 München / DE | ||
| Former [2002/51] | Degwert, Hartmut, Dipl.-Phys. Prinz & Partner GbR, Manzingerweg 7 81241 München / DE | Application number, filing date | 02012492.1 | 14.02.1996 | [2002/51] | Priority number, date | US19950389833 | 15.02.1995 Original published format: US 389833 | US19950389534 | 15.02.1995 Original published format: US 389534 | [2002/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1267394 | Date: | 18.12.2002 | Language: | EN | [2002/51] | Type: | A3 Search report | No.: | EP1267394 | Date: | 05.11.2003 | [2003/45] | Type: | B1 Patent specification | No.: | EP1267394 | Date: | 30.11.2005 | Language: | EN | [2005/48] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 18.09.2003 | Classification | IPC: | H01L21/306, H01L21/00, H01L21/3105 | [2002/51] | CPC: |
H01L21/02052 (EP);
B08B1/32 (EP);
H01L21/67046 (EP)
| Designated contracting states | DE, FR, GB, IT, NL [2002/51] | Title | German: | Verbesserungen bei der oder in Bezug auf die Halbleiterverarbeitung | [2002/51] | English: | Improvements in or relating to semiconductor processing | [2002/51] | French: | Améliorations du ou par rapport au traitement des semiconducteurs | [2002/51] | Examination procedure | 26.04.2004 | Examination requested [2004/26] | 14.06.2005 | Communication of intention to grant the patent | 14.09.2005 | Fee for grant paid | 14.09.2005 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP96102164.9 / EP0727816 | Opposition(s) | 31.08.2006 | No opposition filed within time limit [2006/45] | Fees paid | Renewal fee | 12.06.2002 | Renewal fee patent year 03 | 12.06.2002 | Renewal fee patent year 04 | 12.06.2002 | Renewal fee patent year 05 | 12.06.2002 | Renewal fee patent year 06 | 12.06.2002 | Renewal fee patent year 07 | 24.02.2003 | Renewal fee patent year 08 | 23.02.2004 | Renewal fee patent year 09 | 22.02.2005 | Renewal fee patent year 10 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 30.11.2005 | NL | 30.11.2005 | [2007/37] |
| Former [2006/23] | NL | 30.11.2005 | Documents cited: | Search | [A]JPS59112625 ; | [PA]JPH0773456 ; | [A]EP0362516 (IBM [US]) [A] 1-8 * the whole document *; | [DA]EP0537627 (TEXAS INSTRUMENTS INC [US]) [DA] 1-8 * column 1, line 5 - line 40 * * column 2, line 24 - line 36 * * column 3, line 8 - line 12; claims 1,3 *; | [PA]EP0692318 (EBARA CORP [JP]) [PA] 1-8 * page 3, line 49 - page 4, line 47; figure 1 * | [A] - PATENT ABSTRACTS OF JAPAN, (19841024), vol. 008, no. 231, Database accession no. (E - 274), & JP59112625 A 19840629 (MITSUBISHI DENKI KK) [A] 1-8 * abstract * | [PA] - PATENT ABSTRACTS OF JAPAN, (19950731), vol. 1995, no. 06, & JP07073456 A 19950317 (HITACHI METALS LTD) [PA] 1-8 * abstract * |