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EP1267384
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EP About this file: EP1267384
| EP1267384 - Graphite target [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 28.09.2007 Database last updated on 21.05.2024 | Most recent event Tooltip | 28.09.2007 | Application deemed to be withdrawn | published on 31.10.2007 [2007/44] | Applicant(s) | For all designated states Filplas Vacuum Technology Pte Ltd. Blk 1 Unit 213, Innovation Centre, 16 Nanyang Drive Singapore 637722 / SG | [2002/51] | Inventor(s) | 01 /
Shi, Xu Blk 356 02-402, Woodlands Avenue 5 Singapore 730356 / SG | 02 /
Tan, Hong Siang 24 Jalan 17/1 46400 Petaling Jaya, Selangor / MY | 03 /
Tay, Beng Kang 18 Sin Ming Walk 06-01 Singapore 575569 / SG | 04 /
Flynn, David Ian 14 Old Gardens Close, Tunbridge Wells Kent, TN2 5DN / GB | [2002/51] | Representative(s) | Colmer, Stephen Gary, et al Mathys & Squire 120 Holborn London EC1N 2SQ / GB | [2005/42] |
| Former [2002/51] | Schlich, George William, et al Mathys & Squire European Patent Attorneys, 100 Gray's Inn Road London WC1X 8AL / GB | Application number, filing date | 02019845.3 | 24.07.1997 | [2002/51] | Priority number, date | GB19960015548 | 24.07.1996 Original published format: GB 9615548 | [2002/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1267384 | Date: | 18.12.2002 | Language: | EN | [2002/51] | Type: | A3 Search report | No.: | EP1267384 | Date: | 19.07.2006 | [2006/29] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.06.2006 | Classification | IPC: | H01J37/32, H01J27/14 | [2006/28] | CPC: |
H01J37/32055 (EP,US);
C23C14/0605 (EP,US);
C23C14/325 (EP,US);
C23C14/3414 (EP,US);
H01J27/14 (EP,US);
H01J37/32614 (EP,US);
H01J37/3266 (EP,US)
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| Former IPC [2002/51] | H01J37/32 | Designated contracting states | [2007/13] |
| Former [2002/51] | AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Graphit- Target | [2002/51] | English: | Graphite target | [2002/51] | French: | Cible de graphite | [2002/51] | Examination procedure | 20.01.2007 | Application deemed to be withdrawn, date of legal effect [2007/44] | 14.06.2007 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2007/44] | Parent application(s) Tooltip | EP97932940.6 / EP0914670 | Fees paid | Renewal fee | 09.09.2002 | Renewal fee patent year 03 | 09.09.2002 | Renewal fee patent year 04 | 09.09.2002 | Renewal fee patent year 05 | 09.09.2002 | Renewal fee patent year 06 | 30.07.2003 | Renewal fee patent year 07 | 29.07.2004 | Renewal fee patent year 08 | 27.07.2005 | Renewal fee patent year 09 | 24.03.2006 | Renewal fee patent year 10 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 27.03.2007 | AT M01 Not yet paid | 27.03.2007 | BE M01 Not yet paid | 27.03.2007 | CH M01 Not yet paid | 27.03.2007 | DE M01 Not yet paid | 27.03.2007 | DK M01 Not yet paid | 27.03.2007 | ES M01 Not yet paid | 27.03.2007 | FI M01 Not yet paid | 27.03.2007 | FR M01 Not yet paid | 27.03.2007 | GB M01 Not yet paid | 27.03.2007 | GR M01 Not yet paid | 27.03.2007 | IE M01 Not yet paid | 27.03.2007 | IT M01 Not yet paid | 27.03.2007 | LU M01 Not yet paid | 27.03.2007 | MC M01 Not yet paid | 27.03.2007 | NL M01 Not yet paid | 27.03.2007 | PT M01 Not yet paid | 27.03.2007 | SE M01 Not yet paid | Penalty fee Rule 85b EPC 1973 | 27.03.2007 | M01 Not yet paid | Additional fee for renewal fee | 31.07.2007 | 11 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]GB1219714 (ATOMIC ENERGY COMMISSION [US]) [Y] 10-12 * page 1, line 15 - line 35 * * page 2, line 99 - page 3, line 54 *; | [YA]US5336520 (HOENIG CLARENCE L [US]) [Y] 2,8 * column 1, line 13 - line 16 * * column 1, line 39 - line 43 * * column 1, line 67 - column 2, line 66 * [A] 5,9-17; | [A]US5458754 (SATHRUM PAUL E [US], et al) [A] 1 * column 15, line 20 - line 33 *; | [PX] - KANDAH M ET AL, "Vacuum arc cathode spot movement on various kinds of graphite cathodes", PLASMA SOURCES, SCIENCE AND TECHNOLOGY IOP PUBLISHING UK, (199608), vol. 5, no. 3, ISSN 0963-0252, pages 349 - 355, XP002381780 [PX] 1,3-5,7 * page 349, column L, paragraph 1 - page 350, column L, paragraph L * * page 351, column L, paragraph L * * table 1 * DOI: http://dx.doi.org/10.1088/0963-0252/5/3/001 | [XY] - KANDAH M ET AL, "Erosion study on graphite cathodes using pulsed vacuum arcs", IEEE TRANSACTIONS ON PLASMA SCIENCE IEEE USA, (199604), vol. 24, no. 2, ISSN 0093-3813, pages 523 - 527, XP002381781 [X] 1,3-5,7 * page 523, column L, paragraph 1 * * page 524, column L, paragraph 2 * * page 526; table 1 * [Y] 2,8,10-12 DOI: http://dx.doi.org/10.1109/27.510018 | [A] - CHHOWALLA M ET AL, "Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter", APPLIED PHYSICS LETTERS USA, (19950814), vol. 67, no. 7, ISSN 0003-6951, pages 894 - 896, XP002381782 [A] 2,8 * page 894, column L, paragraph L - column R, paragraph 1 * DOI: http://dx.doi.org/10.1063/1.114728 | [A] - PEI-LI CHEN ET AL, "Low temperature growth of diamond-like films by cathodic arc plasma deposition", APPLIED SURFACE SCIENCE ELSEVIER NETHERLANDS, (199602), vol. 92, ISSN 0169-4332, pages 30 - 34, XP002381783 [A] 3,4 * page 31, column R, paragraph 1 * DOI: http://dx.doi.org/10.1016/0169-4332(95)00197-2 | [A] - DECROCK P ET AL, "Extraction efficiency of <13>N (T1/2=9.96 min) atoms from a graphite target: comparison between off- and on-line obtained results", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION B (BEAM INTERACTIONS WITH MATERIALS AND ATOMS) NETHERLANDS, (199208), vol. B70, no. 1-4, ISSN 0168-583X, pages 182 - 185, XP002381784 [A] 1 * page 183, column L, paragraph 3 * DOI: http://dx.doi.org/10.1016/0168-583X(92)95929-L |