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EP1278104
European procedure
Extract from the Register of European Patents
EP About this file: EP1278104
| EP1278104 - Grating-grating interferometric alignment system [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 18.04.2008 Database last updated on 21.05.2024 | Most recent event Tooltip | 18.04.2008 | No opposition filed within time limit | published on 21.05.2008 [2008/21] | Applicant(s) | For all designated states ASML Holding N.V. De Run 6501 5504 DR Veldhoven / NL | [N/P] |
| Former [2007/23] | For all designated states ASML Holding N.V. De Run 6501 5504 DR Veldhoven / NL | ||
| Former [2007/19] | For all designated states ASML Holding N.V. De Run 1110 5503 LA Veldhoven / NL | ||
| Former [2003/04] | For all designated states SVG LITHOGRAPHY SYSTEMS, INC. 77 Danbury Road Wilton, Connecticut 06897 / US | Inventor(s) | 01 /
Gallatin, Gregg M. 6 Castle Lane Newtown, CT 06470 / US | 02 /
Kreuzer, Justin L. 7 Brandy Lane Trumbull, CT 06611 / US | 03 /
Nelson, Michael L. 15 Peacable Street West Redding, CT 06896 / US | [2003/04] | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstraße 4 80802 München / DE | [N/P] |
| Former [2003/04] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 02023747.5 | 20.01.1995 | [2003/04] | Priority number, date | US19940185644 | 24.01.1994 Original published format: US 185644 | [2003/04] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1278104 | Date: | 22.01.2003 | Language: | EN | [2003/04] | Type: | B1 Patent specification | No.: | EP1278104 | Date: | 13.06.2007 | Language: | EN | [2007/24] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 28.11.2002 | Classification | IPC: | G03F9/00 | [2003/04] | CPC: |
G03F9/7049 (EP,US);
G01B9/02 (KR)
| Designated contracting states | CH, DE, FR, GB, IT, LI, NL [2003/04] | Title | German: | Gitter-Gitter interferometrisches Ausrichtungssystem | [2003/04] | English: | Grating-grating interferometric alignment system | [2003/04] | French: | Système d'alignement interférométrique réseau-réseau | [2003/04] | Examination procedure | 24.02.2003 | Examination requested [2003/17] | 18.01.2007 | Communication of intention to grant the patent | 16.04.2007 | Fee for grant paid | 16.04.2007 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP95909301.4 / EP0745211 | Opposition(s) | 14.03.2008 | No opposition filed within time limit [2008/21] | Fees paid | Renewal fee | 24.10.2002 | Renewal fee patent year 03 | 24.10.2002 | Renewal fee patent year 04 | 24.10.2002 | Renewal fee patent year 05 | 24.10.2002 | Renewal fee patent year 06 | 24.10.2002 | Renewal fee patent year 07 | 24.10.2002 | Renewal fee patent year 08 | 24.10.2002 | Renewal fee patent year 09 | 16.03.2004 | Renewal fee patent year 10 | 07.01.2005 | Renewal fee patent year 11 | 19.01.2006 | Renewal fee patent year 12 | 11.01.2007 | Renewal fee patent year 13 | Penalty fee | Additional fee for renewal fee | 31.01.2004 | 10 M06 Fee paid on 16.03.2004 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CH | 13.06.2007 | LI | 13.06.2007 | [2007/48] | Documents cited: | Search | [A]JPH04366704 ; | [A]US5151754 (ISHIBASHI YORIYUKI [JP], et al) [A] 1 * column 13, line 6 - line 17 * * figure 15 *; | [A]US5231467 (TAKEUCHI HIROYUKI [JP], et al) [A] 1 * column 4, line 34 - column 11, line 61 * * figures 1-12 * | [A] - PATENT ABSTRACTS OF JAPAN, (19930517), vol. 017, no. 246, Database accession no. (P - 1536), & JP04366704 A 19921218 (NIPPON TELEGR & TELEPH CORP) [A] 1 * abstract * |