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Extract from the Register of European Patents

EP About this file: EP1361606

EP1361606 - METHOD OF PRODUCING ELECTRONIC DEVICE MATERIAL [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  30.09.2011
Database last updated on 12.07.2024
Most recent event   Tooltip21.10.2011Lapse of the patent in a contracting state
New state(s): FR		published on 23.11.2011  [2011/47]
Applicant(s)For all designated states
TOKYO ELECTRON LIMITED
3-6 Akasaka 5-chome Minato-ku
Tokyo 107-8481 / JP
[2010/47]
Former [2003/46]For all designated states
TOKYO ELECTRON LIMITED
3-6 Akasaka 5-chome
Minato-ku, Tokyo 107-8481 / JP
Inventor(s)01 / SUGAWARA, Takuya
C/O TOKYO ELECTRON LTD, 650, Mitsuzawa, Hosaka-cho
Nirasaki-shi, Yamanashi 407-0192 / JP
02 / NAKANISHI, Toshio
C/O TOKYO ELECTRON LIMITED, 1-8, Fuso-cho
Amagasaki-shi, Hyogo 660-0891 / JP
03 / OZAKI, Shigenori
C/O TOKYO ELECTRON LIMITED, 1-8, Fuso-cho
Amagasaki-shi, Hyogo 660-0891 / JP
04 / MATSUYAMA, Seiji
C/O TOKYO ELECTRON LTD, 650, Mitsuzawa, Hosaka-cho
Nirasaki-shi, Yamanashi 407-0192 / JP
05 / MURAKAWA, Shigemi
C/O TOKYO ELECTRON LTD, 3-6, Akasaka 5-chome
Minato-ku, Tokyo 107-8481 / JP
06 / TADA, Yoshihide
C/O TOKYO ELECTRON LTD, 650, Mitsuzawa, Hosaka-cho
Nirasaki-shi, Yamanashi 407-0192 / JP
 [2003/46]
Representative(s)Liesegang, Eva
Boehmert & Boehmert
Anwaltspartnerschaft mbB
Pettenkoferstrasse 22
80336 München / DE
[N/P]
Former [2003/46]Liesegang, Eva
Forrester & Boehmert, Pettenkoferstrasse 20-22
80336 München / DE
Application number, filing date02716395.525.01.2002
[2003/46]
WO2002JP00571
Priority number, dateJP2001001766425.01.2001         Original published format: JP 2001017664
[2003/46]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO02059956
Date:01.08.2002
Language:EN
[2002/31]
Type: A1 Application with search report 
No.:EP1361606
Date:12.11.2003
Language:EN
The application published by WIPO in one of the EPO official languages on 01.08.2002 takes the place of the publication of the European patent application.
[2003/46]
Type: B1 Patent specification 
No.:EP1361606
Date:24.11.2010
Language:EN
[2010/47]
Search report(s)International search report - published on:JP01.08.2002
(Supplementary) European search report - dispatched on:EP13.05.2005
ClassificationIPC:H01L21/316, H01L21/318, H01L21/31
[2003/46]
CPC:
C23C16/56 (EP,US); H01L21/20 (KR); C23C16/401 (EP,US);
C23C16/402 (EP,US); H01J37/3222 (EP,US); H01J37/3244 (EP,US);
H01L21/02164 (EP,US); H01L21/02238 (EP,US); H01L21/02252 (EP,US);
H01L21/02255 (EP,US); H01L21/02271 (EP,US); H01L21/0234 (EP,US);
H01L21/28185 (EP,US); H01L21/28194 (EP,US); H01L21/28202 (EP,US);
H01L21/3105 (EP,US); H01L21/31604 (US); H01L21/31612 (US);
H01L21/31658 (US); H01L21/31662 (US); H01L21/76801 (EP,US);
H01L21/76826 (EP,US); H01L21/76828 (EP,US); H01L29/40114 (EP,US);
H01L21/0214 (EP); H01L21/02181 (EP); H01L21/02274 (EP);
H01L29/517 (EP,US); H01L29/518 (EP,US) (-)
Designated contracting statesBE,   DE,   FR,   IT,   NL [2010/28]
Former [2003/46]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE,  TR 
Extension statesALNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
RONot yet paid
SINot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG VON ELEKTRONIKBAUTEILMATERIAL[2003/46]
English:METHOD OF PRODUCING ELECTRONIC DEVICE MATERIAL[2003/46]
French:PROCEDE DE FABRICATION D'UN MATERIAU DE DISPOSITIF ELECTRONIQUE[2003/46]
Entry into regional phase31.07.2003Translation filed 
31.07.2003National basic fee paid 
31.07.2003Search fee paid 
31.07.2003Designation fee(s) paid 
31.07.2003Examination fee paid 
Examination procedure06.08.2002Request for preliminary examination filed
International Preliminary Examining Authority: JP
31.07.2003Amendment by applicant (claims and/or description)
31.07.2003Examination requested  [2003/46]
05.08.2005Despatch of a communication from the examining division (Time limit: M06)
13.02.2006Reply to a communication from the examining division
04.12.2006Despatch of a communication from the examining division (Time limit: M06)
14.06.2007Reply to a communication from the examining division
06.05.2008Despatch of a communication from the examining division (Time limit: M04)
16.09.2008Reply to a communication from the examining division
27.11.2009Date of oral proceedings
17.12.2009Despatch of a communication from the examining division (Time limit: M04)
17.12.2009Minutes of oral proceedings despatched
27.04.2010Reply to a communication from the examining division
18.06.2010Communication of intention to grant the patent
14.10.2010Fee for grant paid
14.10.2010Fee for publishing/printing paid
Opposition(s)25.08.2011No opposition filed within time limit [2011/44]
Fees paidRenewal fee
14.01.2004Renewal fee patent year 03
12.01.2005Renewal fee patent year 04
12.01.2006Renewal fee patent year 05
12.01.2007Renewal fee patent year 06
14.01.2008Renewal fee patent year 07
14.01.2009Renewal fee patent year 08
13.01.2010Renewal fee patent year 09
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competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipBE24.11.2010
NL24.11.2010
FR31.01.2011
[2011/47]
Former [2011/35]BE24.11.2010
NL24.11.2010
Former [2011/24]NL24.11.2010
Documents cited:Search[X]JP2000294550  ;
 [A]JPS61288471  ;
 [A]US6008091  (GREGOR RICHARD WILLIAM [US], et al) [A] 12-15 * abstract * * column 3, line 60 - column 4, line 4 * * column 5, line 13 - line 20 *;
 [A]US6149987  (PERNG DUNG-CHING [US], et al) [A] 12,14,16 * column 2, line 14 - line 45; figure 2 * * column 9, line 2 - line 29 * * column 12, line 5 - line 29 *;
 [E]EP1361605  (TOKYO ELECTRON LTD [JP]) [E] 1-3,9-11,18,19* paragraphs [0021] - [0036]; figure 4; claim 10 *
 [X]  - PATENT ABSTRACTS OF JAPAN, (20010205), vol. 2000, no. 13, & JP2000294550 A 20001020 (TOKYO ELECTRON LTD) [X] 1-3,6,8-10,18,19 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19870516), vol. 011, no. 152, Database accession no. (E - 507), & JP61288471 A 19861218 (MATSUSHITA ELECTRONICS CORP) [A] * abstract *
International search[Y]JPH11293470  (TOKYO ELECTRON LTD);
 [Y]JP2000106438  (SEIKO EPSON CORP);
 [Y]JP2000124214  (TOSHIBA CORP);
 [Y]EP1028458  (TEXAS INSTRUMENTS INC [US]);
 [A]JP2000332245  (SONY CORP)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.