EP1382065 - ELECTROPOLISHING METAL LAYERS ON WAFERS HAVING TRENCHES OR VIAS WITH DUMMY STRUCTURES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 06.11.2009 Database last updated on 02.09.2024 | Most recent event Tooltip | 06.11.2009 | Application deemed to be withdrawn | published on 09.12.2009 [2009/50] | Applicant(s) | For all designated states ACM Research, Inc. 46520 Fremont Blvd., Suite 610 Fremont, CA 94538 / US | [2004/04] | Inventor(s) | 01 /
WANG, Hui 340 Jacaranda Drive Fremont, CA 94539 / US | 02 /
YIH, Peihaur 8, Alpine Road Boonton, New Jersey 07005 / US | [2004/47] |
Former [2004/04] | 01 /
WANG, Hui 38855 Litchfield Court Fremont, CA 94536 / US | ||
02 /
YIH, Peihaur 37171 Sycamore Street 824 Newark, CA 94560 / US | Representative(s) | Vleck, Jan Montagu, et al Reddie & Grose LLP The White Chapel Building 10 Whitechapel High Street London E1 8QS / GB | [N/P] |
Former [2004/04] | Vleck, Jan Montagu, et al Reddie & Grose, 16 Theobalds Road London WC1X 8PL / GB | Application number, filing date | 02764165.3 | 04.04.2002 | [2004/04] | WO2002US10500 | Priority number, date | US20010286273P | 24.04.2001 Original published format: US 286273 P | US20020108614 | 27.03.2002 Original published format: US 108614 | [2004/04] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO02086961 | Date: | 31.10.2002 | Language: | EN | [2002/44] | Type: | A1 Application with search report | No.: | EP1382065 | Date: | 21.01.2004 | Language: | EN | The application published by WIPO in one of the EPO official languages on 31.10.2002 takes the place of the publication of the European patent application. | [2004/04] | Search report(s) | International search report - published on: | US | 31.10.2002 | (Supplementary) European search report - dispatched on: | EP | 16.03.2009 | Classification | IPC: | H01L21/321, H01L23/48, C25D5/02 | [2009/16] | CPC: |
C25D5/48 (EP,US);
H01L21/306 (KR);
C25D5/02 (EP,US);
C25D7/123 (EP,US);
H01L21/32125 (EP,US);
H01L21/7684 (EP,US)
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Former IPC [2004/04] | H01L21/4763, H01L23/48, C25D5/02 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2004/04] | Title | German: | ELEKTROPOLIERENDE METALLSCHICHTEN AUF WAFERN MIT GRÄBEN ODER KONTAKTLÖCHERN MIT DUMMY-STRUKTUREN | [2004/04] | English: | ELECTROPOLISHING METAL LAYERS ON WAFERS HAVING TRENCHES OR VIAS WITH DUMMY STRUCTURES | [2004/04] | French: | POLISSAGE ELECTROLYTIQUE DE COUCHES METALLIQUES SUR DES PLAQUETTES POURVUES DE TRANCHEES OU TROUS D'INTERCONNEXION A FAUSSES STRUCTURES | [2004/04] | Entry into regional phase | 18.11.2003 | National basic fee paid | 18.11.2003 | Search fee paid | 18.11.2003 | Designation fee(s) paid | 18.11.2003 | Examination fee paid | Examination procedure | 22.11.2002 | Request for preliminary examination filed International Preliminary Examining Authority: US | 18.11.2003 | Examination requested [2004/04] | 08.01.2004 | Amendment by applicant (claims and/or description) | 13.06.2009 | Application deemed to be withdrawn, date of legal effect [2009/50] | 21.07.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/50] | Fees paid | Renewal fee | 18.11.2003 | Renewal fee patent year 03 | 04.04.2005 | Renewal fee patent year 04 | 27.03.2006 | Renewal fee patent year 05 | 12.04.2007 | Renewal fee patent year 06 | 28.03.2008 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 30.04.2009 | 08   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JPH0438852 (HITACHI LTD, et al) [X] 64,65,70 * the whole document *; | [XY]EP0710981 (TEXAS INSTRUMENTS INC [US]) [X] 47,50,51,55,56,58,59,61-63 * the whole document * [Y] 1-46,48,49,52-54,57,60; | [A]JPH08195393 (TOSHIBA CORP) [A] 1-73 * the whole document *; | [A]US5592024 (AOYAMA HISAKO [JP], et al) [A] 2,21-63 * column 19, line 62 - column 20, line 47; figures 24D,31F * * column 25, line 8 - column 26, line 36 *; | [A]EP0768710 (CANON KK [JP]) [A] 1-73 * the whole document *; | [A]WO0003426 (ACM RES INC [US]) [A] 1-63 * the whole document *; | [X]JP2001044195 (MITSUBISHI ELECTRIC CORP) [X] 64-66,68-73 * the whole document *; | [Y]JP2001077117 (SONY CORP) [Y] 1-46,48,49,52-54,57,60 * the whole document *; | US6424042 [ ] (KITANI TAKESHI [JP]); | US6693036 [ ] (NOGAMI TAKESHI [JP], et al) | International search | [A]US4127459 (JUMER JOHN F); | [A]US4190513 (JUMER JOHN F [US]); | [A]US6186864 (FISHER JR THOMAS R [US], et al); | [YT]US6234870 (UZOH CYPRIAN E [US], et al); | [XP]US6315883 (MAYER STEVEN T [US], et al); | [YT]US6413403 (LINDQUIST PAUL [US], et al) |