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EP About this file: EP1382065

EP1382065 - ELECTROPOLISHING METAL LAYERS ON WAFERS HAVING TRENCHES OR VIAS WITH DUMMY STRUCTURES [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 06.11.2009 Database last updated on 02.09.2024
Most recent event Tooltip	06.11.2009	Application deemed to be withdrawn	published on 09.12.2009 [2009/50]
Applicant(s)	For all designated states ACM Research, Inc. 46520 Fremont Blvd., Suite 610 Fremont, CA 94538 / US
	[2004/04]
Inventor(s)	01 / WANG, Hui 340 Jacaranda Drive Fremont, CA 94539 / US
	02 / YIH, Peihaur 8, Alpine Road Boonton, New Jersey 07005 / US
	[2004/47]
Former [2004/04]	01 / WANG, Hui 38855 Litchfield Court Fremont, CA 94536 / US
	02 / YIH, Peihaur 37171 Sycamore Street 824 Newark, CA 94560 / US
Representative(s)	Vleck, Jan Montagu, et al Reddie & Grose LLP The White Chapel Building 10 Whitechapel High Street London E1 8QS / GB
	[N/P]
Former [2004/04]	Vleck, Jan Montagu, et al Reddie & Grose, 16 Theobalds Road London WC1X 8PL / GB
Application number, filing date	02764165.3	04.04.2002
	[2004/04]
	WO2002US10500
Priority number, date	US20010286273P	24.04.2001 Original published format: US 286273 P
	US20020108614	27.03.2002 Original published format: US 108614
	[2004/04]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO02086961
	Date:	31.10.2002
	Language:	EN
	[2002/44]
	Type:	A1 Application with search report
	No.:	EP1382065
	Date:	21.01.2004
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 31.10.2002 takes the place of the publication of the European patent application.
	[2004/04]
Search report(s)	International search report - published on:	US	31.10.2002
	(Supplementary) European search report - dispatched on:	EP	16.03.2009
Classification	IPC:	H01L21/321, H01L23/48, C25D5/02	[2009/16]
	CPC:	C25D5/48 (EP,US); H01L21/306 (KR); C25D5/02 (EP,US); C25D7/123 (EP,US); H01L21/32125 (EP,US); H01L21/7684 (EP,US)
	Former IPC [2004/04]	H01L21/4763, H01L23/48, C25D5/02
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2004/04]
Title	German:	ELEKTROPOLIERENDE METALLSCHICHTEN AUF WAFERN MIT GRÄBEN ODER KONTAKTLÖCHERN MIT DUMMY-STRUKTUREN	[2004/04]
	English:	ELECTROPOLISHING METAL LAYERS ON WAFERS HAVING TRENCHES OR VIAS WITH DUMMY STRUCTURES	[2004/04]
	French:	POLISSAGE ELECTROLYTIQUE DE COUCHES METALLIQUES SUR DES PLAQUETTES POURVUES DE TRANCHEES OU TROUS D'INTERCONNEXION A FAUSSES STRUCTURES	[2004/04]
Entry into regional phase	18.11.2003	National basic fee paid
	18.11.2003	Search fee paid
	18.11.2003	Designation fee(s) paid
	18.11.2003	Examination fee paid
Examination procedure	22.11.2002	Request for preliminary examination filed International Preliminary Examining Authority: US
	18.11.2003	Examination requested [2004/04]
	08.01.2004	Amendment by applicant (claims and/or description)
	13.06.2009	Application deemed to be withdrawn, date of legal effect [2009/50]
	21.07.2009	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/50]
Fees paid	Renewal fee
	18.11.2003	Renewal fee patent year 03
	04.04.2005	Renewal fee patent year 04
	27.03.2006	Renewal fee patent year 05
	12.04.2007	Renewal fee patent year 06
	28.03.2008	Renewal fee patent year 07
	Penalty fee
	Additional fee for renewal fee
	30.04.2009	08 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[X]JPH0438852 (HITACHI LTD, et al) [X] 64,65,70 * the whole document *;
		[XY]EP0710981 (TEXAS INSTRUMENTS INC [US]) [X] 47,50,51,55,56,58,59,61-63 * the whole document * [Y] 1-46,48,49,52-54,57,60;
		[A]JPH08195393 (TOSHIBA CORP) [A] 1-73 * the whole document *;
		[A]US5592024 (AOYAMA HISAKO [JP], et al) [A] 2,21-63 * column 19, line 62 - column 20, line 47; figures 24D,31F * * column 25, line 8 - column 26, line 36 *;
		[A]EP0768710 (CANON KK [JP]) [A] 1-73 * the whole document *;
		[A]WO0003426 (ACM RES INC [US]) [A] 1-63 * the whole document *;
		[X]JP2001044195 (MITSUBISHI ELECTRIC CORP) [X] 64-66,68-73 * the whole document *;
		[Y]JP2001077117 (SONY CORP) [Y] 1-46,48,49,52-54,57,60 * the whole document *;
		US6424042 [ ] (KITANI TAKESHI [JP]);
		US6693036 [ ] (NOGAMI TAKESHI [JP], et al)
	International search	[A]US4127459 (JUMER JOHN F);
		[A]US4190513 (JUMER JOHN F [US]);
		[A]US6186864 (FISHER JR THOMAS R [US], et al);
		[YT]US6234870 (UZOH CYPRIAN E [US], et al);
		[XP]US6315883 (MAYER STEVEN T [US], et al);
		[YT]US6413403 (LINDQUIST PAUL [US], et al)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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