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Extract from the Register of European Patents

EP About this file: EP1446825

EP1446825 - APPARATUS AND METHOD FOR IMPROVING ETCH RATE UNIFORMITY [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  06.09.2013
Database last updated on 12.07.2024
Most recent event   Tooltip30.05.2014Lapse of the patent in a contracting state
New state(s): LU		published on 02.07.2014  [2014/27]
Applicant(s)For all designated states
LAM RESEARCH CORPORATION
4650 Cushing Parkway
Fremont, CA 94538-6470 / US
[2012/44]
Former [2004/34]For all designated states
LAM RESEARCH CORPORATION
4650 Cushing Parkway
Fremont, CA 94538-6470 / US
Inventor(s)01 / DHINSA, Rajinder
3670 Rollingside Drive
San Jose, CA 95148 / US
02 / KADKHODAYAN, Babak
2543 Oakes Drive
Hayward, CA 94542 / US
 [2004/40]
Former [2004/34]01 / DHINSA, Rajinder
3670 Rollingside Drive
San Jose, CA 95148 / US
02 / KADKHODAYAN, Bobby
4328 Howe Street 7
Oakland, CA 94611 / US
Representative(s)Kontrus, Gerhard, et al
Lam Research AG
SEZ-Strasse 1
9500 Villach / AT
[2012/43]
Former [2004/34]Falk, Urs, Dr.
Patentanwaltsbüro Dr. Urs Falk, Eichholzweg 9A
6312 Steinhausen / CH
Application number, filing date02780667.813.11.2002
[2004/34]
WO2002US36557
Priority number, dateUS20010338034P13.11.2001         Original published format: US 338034 P
[2004/34]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO03043061
Date:22.05.2003
Language:EN
[2003/21]
Type: A1 Application with search report 
No.:EP1446825
Date:18.08.2004
Language:EN
The application published by WIPO in one of the EPO official languages on 22.05.2003 takes the place of the publication of the European patent application.
[2004/34]
Type: B1 Patent specification 
No.:EP1446825
Date:31.10.2012
Language:EN
[2012/44]
Search report(s)International search report - published on:EP22.05.2003
ClassificationIPC:H01L21/67, H01J37/32
[2012/14]
CPC:
H01L21/67069 (EP,US); H01L21/3065 (KR); H01J37/32009 (EP,US);
H01J37/32623 (EP,US); H01J37/32642 (EP,US); H01J37/32697 (EP,US)
Former IPC [2004/34]H01L21/00, H01J37/32
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   SK,   TR [2004/34]
TitleGerman:VORRICHTUNG UND VERFAHREN ZUR VERBESSERUNG DER ÄTZRATE-GLEICHFÖRMIGKEIT[2004/34]
English:APPARATUS AND METHOD FOR IMPROVING ETCH RATE UNIFORMITY[2004/34]
French:APPAREIL ET METHODE POUR AMELIORER L'UNIFORMITÉ DE LA VITESSE DE GRAVURE[2012/14]
Former [2004/34]APPAREIL ET METHODE POUR AMELIORER L UNIFORMITE D UNE V ITESSE DE GRAVURE
Entry into regional phase14.06.2004National basic fee paid 
14.06.2004Designation fee(s) paid 
14.06.2004Examination fee paid 
Examination procedure30.03.2003Request for preliminary examination filed
International Preliminary Examining Authority: US
14.06.2004Examination requested  [2004/34]
14.08.2004Amendment by applicant (claims and/or description)
12.10.2005Despatch of a communication from the examining division (Time limit: M06)
11.04.2006Reply to a communication from the examining division
13.04.2012Communication of intention to grant the patent
08.08.2012Fee for grant paid
08.08.2012Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  12.10.2005
Opposition(s)01.08.2013No opposition filed within time limit [2013/41]
Fees paidRenewal fee
22.11.2004Renewal fee patent year 03
29.11.2005Renewal fee patent year 04
27.11.2006Renewal fee patent year 05
27.11.2007Renewal fee patent year 06
25.11.2008Renewal fee patent year 07
25.11.2009Renewal fee patent year 08
24.11.2010Renewal fee patent year 09
23.11.2011Renewal fee patent year 10
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
IT31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
TR31.10.2012
IE13.11.2012
LU13.11.2012
CH30.11.2012
LI30.11.2012
MC30.11.2012
FR02.01.2013
BG31.01.2013
GB31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
[2014/27]
Former [2014/21]AT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
IT31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
TR31.10.2012
IE13.11.2012
CH30.11.2012
LI30.11.2012
MC30.11.2012
FR02.01.2013
BG31.01.2013
GB31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/51]AT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
IT31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
IE13.11.2012
CH30.11.2012
LI30.11.2012
FR02.01.2013
BG31.01.2013
GB31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/50]AT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
IT31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
IE13.11.2012
CH30.11.2012
LI30.11.2012
FR02.01.2013
BG31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/47]AT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
IT31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
IE13.11.2012
CH30.11.2012
LI30.11.2012
BG31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/37]AT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
IT31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
CH30.11.2012
LI30.11.2012
BG31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/35]AT31.10.2012
BE31.10.2012
CY31.10.2012
CZ31.10.2012
DK31.10.2012
EE31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
SK31.10.2012
CH30.11.2012
LI30.11.2012
BG31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/34]AT31.10.2012
BE31.10.2012
CY31.10.2012
DK31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
CH30.11.2012
LI30.11.2012
BG31.01.2013
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/33]AT31.10.2012
BE31.10.2012
CY31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
CH30.11.2012
LI30.11.2012
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/31]AT31.10.2012
BE31.10.2012
CY31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/28]BE31.10.2012
CY31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
GR01.02.2013
ES11.02.2013
PT28.02.2013
Former [2013/24]BE31.10.2012
CY31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
GR01.02.2013
ES11.02.2013
Former [2013/23]CY31.10.2012
FI31.10.2012
NL31.10.2012
SE31.10.2012
ES11.02.2013
Former [2013/22]FI31.10.2012
NL31.10.2012
SE31.10.2012
ES11.02.2013
Former [2013/21]SE31.10.2012
Cited inInternational search[X]US5998932  (LENZ ERIC H [US]) [X] 1-7 * the whole document *;
 [X]US4632719  (CHOW ROBERT [US], et al) [X] 8,9 * column W *;
 [X]US6178919  (LI LUMIN [US], et al) [X] 1,8 * the whole document *;
 [X]US5942042  (GOGH JAMES VAN [US]) [X] 1,3,7,8 * abstract *;
 [X]US4392932  (HARRA DAVID J) [X] 8 * the whole document *;
 [X]US4954201  (LATZ RUDOLF [DE], et al) [X] 8 * abstract *;
 [X]US5292399  (LEE TERRANCE Y [US], et al) [X] 8 * abstract *;
 [X]US6074488  (RODERICK CRAIG A [US], et al) [X] 8 * abstract *;
 [X]EP0660499  (IBM [US]) [X] 8 * abstract *;
 [X]EP0665575  (APPLIED MATERIALS INC [US]) [X] 8 * abstract *;
 [A]JPS6247131  ;
 [A]US5534751  (LENZ ERIC HOWARD [US], et al) [A] 1,8 * abstract *;
 [A]WO9914788  (APPLIED MATERIALS INC [US]) [A] 1,5,8 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19870728), vol. 011, no. 231, Database accession no. (E - 527), & JP62047131 A 19870228 (NEC CORP) [A] 1,8 * abstract *
by applicantUS5998932
 US4632719
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.