blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP1483628

EP1483628 - FULL PHASE SHIFTING MASK IN DAMASCENE PROCESS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  25.01.2013
Database last updated on 25.09.2024
Most recent event   Tooltip17.07.2015Lapse of the patent in a contracting state
New state(s): HU		published on 19.08.2015  [2015/34]
Applicant(s)For all designated states
Synopsys, Inc.
700 East Middlefield Road
Mountain View, CA 94043 / US
[2007/43]
Former [2004/50]For all designated states
Numerical Technologies, Inc.
700 E. Middlefield Road
Mountain View, California 94043 / US
Inventor(s)01 / PIERRAT, Christophe
2061 Rockhurst Court
Santa Clara, CA 95051 / US
 [2004/50]
Representative(s)Freeman, Jacqueline Carol, et al
WP Thompson
138 Fetter Lane
London EC4A 1BT / GB
[N/P]
Former [2012/12]Freeman, Jacqueline Carol, et al
W.P.Thompson & Co.
55 Drury Lane
London WC2B 5SQ / GB
Former [2009/49]Freeman, Jacqueline Carol, et al
W.P.Thompson & Co. 55 Drury Lane
London WC2B 5SQ / GB
Former [2007/22]Freeman, Jacqueline Carol, et al
W.P. THOMPSON & CO. 55 Drury Lane
London WC2B 5SQ / GB
Former [2004/50]Freeman, Jacqueline Carol
W.P. THOMPSON & CO. 55 Drury Lane
London WC2B 5SQ / GB
Application number, filing date03713753.627.02.2003
[2004/50]
WO2003US06041
Priority number, dateUS20020363674P11.03.2002         Original published format: US 363674 P
US2002029557514.11.2002         Original published format: US 295575
[2004/50]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO03079117
Date:25.09.2003
Language:EN
[2003/39]
Type: A1 Application with search report 
No.:EP1483628
Date:08.12.2004
Language:EN
The application published by WIPO in one of the EPO official languages on 25.09.2003 takes the place of the publication of the European patent application.
[2004/50]
Type: B1 Patent specification 
No.:EP1483628
Date:21.03.2012
Language:EN
[2012/12]
Search report(s)International search report - published on:US25.09.2003
(Supplementary) European search report - dispatched on:EP17.08.2006
ClassificationIPC:G03F1/00, G03F9/00, G03C5/00
[2006/37]
CPC:
G03F1/30 (EP,US); G03F9/00 (KR); G03F1/70 (EP,US)
Former IPC [2004/50]G03F9/00, G03C5/00
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   SI,   SK,   TR [2004/50]
TitleGerman:VOLLPHASENVERSCHIEBUNGSMASKE IN EINEM DAMASCENE-PROZESS[2004/50]
English:FULL PHASE SHIFTING MASK IN DAMASCENE PROCESS[2004/50]
French:MASQUE A DEPHASAGE COMPLET DANS PROCEDE DE DAMASQUINAGE[2004/50]
Entry into regional phase19.08.2004National basic fee paid 
19.08.2004Search fee paid 
19.08.2004Designation fee(s) paid 
19.08.2004Examination fee paid 
Examination procedure19.08.2004Examination requested  [2004/50]
09.02.2007Despatch of a communication from the examining division (Time limit: M04)
24.05.2007Reply to a communication from the examining division
26.06.2007Despatch of a communication from the examining division (Time limit: M06)
06.11.2007Reply to a communication from the examining division
05.03.2008Despatch of a communication from the examining division (Time limit: M04)
01.07.2008Reply to a communication from the examining division
22.12.2008Despatch of a communication from the examining division (Time limit: M06)
06.08.2009Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
15.10.2009Reply to a communication from the examining division
18.11.2011Communication of intention to grant the patent
06.02.2012Fee for grant paid
06.02.2012Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  09.02.2007
Opposition(s)02.01.2013No opposition filed within time limit [2013/09]
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the examination report
15.10.2009Request for further processing filed
15.10.2009Full payment received (date of receipt of payment)
Request granted
21.10.2009Decision despatched
Fees paidRenewal fee
04.02.2005Renewal fee patent year 03
06.02.2006Renewal fee patent year 04
05.02.2007Renewal fee patent year 05
08.02.2008Renewal fee patent year 06
09.02.2009Renewal fee patent year 07
08.02.2010Renewal fee patent year 08
08.02.2011Renewal fee patent year 09
07.02.2012Renewal fee patent year 10
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU27.02.2003
AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
DK21.03.2012
EE21.03.2012
FI21.03.2012
IT21.03.2012
NL21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
TR21.03.2012
BG21.06.2012
GR22.06.2012
ES02.07.2012
PT23.07.2012
[2015/34]
Former [2015/32]AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
DK21.03.2012
EE21.03.2012
FI21.03.2012
IT21.03.2012
NL21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
TR21.03.2012
BG21.06.2012
GR22.06.2012
ES02.07.2012
PT23.07.2012
Former [2013/33]AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
DK21.03.2012
EE21.03.2012
FI21.03.2012
IT21.03.2012
NL21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
BG21.06.2012
GR22.06.2012
ES02.07.2012
PT23.07.2012
Former [2013/22]AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
DK21.03.2012
EE21.03.2012
FI21.03.2012
IT21.03.2012
NL21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
GR22.06.2012
ES02.07.2012
PT23.07.2012
Former [2013/11]AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
DK21.03.2012
EE21.03.2012
FI21.03.2012
IT21.03.2012
NL21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
GR22.06.2012
PT23.07.2012
Former [2013/08]AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
DK21.03.2012
EE21.03.2012
FI21.03.2012
NL21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
GR22.06.2012
PT23.07.2012
Former [2013/07]AT21.03.2012
BE21.03.2012
CY21.03.2012
CZ21.03.2012
EE21.03.2012
FI21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
GR22.06.2012
PT23.07.2012
Former [2013/01]BE21.03.2012
CY21.03.2012
CZ21.03.2012
EE21.03.2012
FI21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
GR22.06.2012
PT23.07.2012
Former [2012/50]BE21.03.2012
CY21.03.2012
CZ21.03.2012
EE21.03.2012
FI21.03.2012
SE21.03.2012
SI21.03.2012
SK21.03.2012
GR22.06.2012
Former [2012/49]BE21.03.2012
CY21.03.2012
CZ21.03.2012
EE21.03.2012
FI21.03.2012
SE21.03.2012
SI21.03.2012
GR22.06.2012
Former [2012/48]BE21.03.2012
CY21.03.2012
EE21.03.2012
FI21.03.2012
SE21.03.2012
GR22.06.2012
Former [2012/46]BE21.03.2012
CY21.03.2012
FI21.03.2012
GR22.06.2012
Former [2012/41]CY21.03.2012
FI21.03.2012
GR22.06.2012
Former [2012/37]FI21.03.2012
GR22.06.2012
Former [2012/36]GR22.06.2012
Documents cited:Search[A]US6013397  (LIN CHIN-LUNG [TW], et al) [A] 3,6 * column 3, lines 1-6; figure 3a *;
 [XY]WO0025181  (HITACHI LTD [JP], et al) [X] 1,2,8-13 * pages 18-19; figure 7 * * page 34, lines 6-19; figure 18 * [Y] 3-7;
 [Y]WO0203140  (NUMERICAL TECH INC [US], et al) [Y] 3-7 * page 8, lines 19-32 * * page 9, lines 1-5; figures 7-9 * * page 18, lines 3,4 * * page 15, lines 25-32 * * page 16, lines 1-6; figure 16 * * page 9, lines 28,29 *;
 [A]US2002024139  (CHAN SIMON S [US], et al) [A] 8,9 * paragraphs [0004] , [0011] , [0024] , [0025]; figure 1 *;
 [PXY]US6518180  (FUKUDA HIROSHI [JP]) [PX] 1,2,8-13 * column 11, lines 1-26; figure 7 * * column 19, lines 45-64; figure 18 *[PY] 3-7
International search[Y]US5858580  (WANG YAO-TING [US], et al);
 [Y]US5807649  (LIEBMANN LARS W [US], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.