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EP1478010
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EP About this file: EP1478010
| EP1478010 - IMAGE FORMATION STATE ADJUSTMENT SYSTEM, EXPOSURE METHOD, EXPOSURE APPARATUS, PROGRAM, AND INFORMATION RECORDING MEDIUM [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 21.11.2014 Database last updated on 26.07.2024 | Most recent event Tooltip | 21.11.2014 | Withdrawal of application | published on 24.12.2014 [2014/52] | Applicant(s) | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
| Former [2010/30] | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
| Former [2004/47] | For all designated states Nikon Corporation 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
SHIMIZU, Yasuo c/o NIKON CORPORATION, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | 02 /
HIRUKAWA, Shigeru c/o NIKON CORPORATION, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | 03 /
SUZUKI, Kousuke c/o NIKON CORPORATION, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | 04 /
MATSUYAMA, Tomoyuki c/o NIKON CORPORATION, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | [2004/47] | Representative(s) | Gill, David Alan WP Thompson 138 Fetter Lane London EC4A 1BT / GB | [N/P] |
| Former [2004/47] | Gill, David Alan W.P. Thompson & Co., 55 Drury Lane London WC2B 5SQ / GB | Application number, filing date | 03734875.2 | 29.01.2003 | [2004/47] | WO2003JP00833 | Priority number, date | JP20020020712 | 29.01.2002 Original published format: JP 2002020712 | JP20020158954 | 31.05.2002 Original published format: JP 2002158954 | [2004/47] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO03065428 | Date: | 07.08.2003 | Language: | EN | [2003/32] | Type: | A1 Application with search report | No.: | EP1478010 | Date: | 17.11.2004 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.08.2003 takes the place of the publication of the European patent application. | [2004/47] | Search report(s) | International search report - published on: | JP | 07.08.2003 | (Supplementary) European search report - dispatched on: | EP | 12.11.2007 | Classification | IPC: | H01L21/027, G03F7/20 | [2004/47] | CPC: |
G03B21/18 (EP,KR,US);
G03F7/70258 (EP,KR,US);
G03B27/42 (EP,KR,US);
G03F7/70308 (KR);
G03F7/705 (EP,KR,US);
G03F7/70508 (EP,KR,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, SE, SI, SK, TR [2004/47] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | Title | German: | BILDERZEUGUNGSZUSTANDSEINSTELLSYSTEM, BELICHTUNGSVERFAHREN, BELICHTUNGSVORRICHTUNG, PROGRAMM UND INFORMATIONSAUFZEICHNUNGSMEDIUM | [2004/47] | English: | IMAGE FORMATION STATE ADJUSTMENT SYSTEM, EXPOSURE METHOD, EXPOSURE APPARATUS, PROGRAM, AND INFORMATION RECORDING MEDIUM | [2004/47] | French: | SYSTEME DE REGLAGE D'ETAT DE FORMATION D'IMAGES, PROCEDE D'INSOLATION, APPAREIL D'EXPOSITION, PROGRAMME, ET SUPPORT D'ENREGISTREMENT D'INFORMATION | [2004/47] | Entry into regional phase | 16.08.2004 | Translation filed | 16.08.2004 | National basic fee paid | 16.08.2004 | Search fee paid | 16.08.2004 | Designation fee(s) paid | 16.08.2004 | Examination fee paid | Examination procedure | 29.08.2003 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 16.08.2004 | Examination requested [2004/47] | 21.01.2008 | Amendment by applicant (claims and/or description) | 13.02.2009 | Despatch of a communication from the examining division (Time limit: M04) | 12.06.2009 | Reply to a communication from the examining division | 17.11.2014 | Application withdrawn by applicant [2014/52] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 13.02.2009 | Fees paid | Renewal fee | 12.01.2005 | Renewal fee patent year 03 | 26.01.2006 | Renewal fee patent year 04 | 24.01.2007 | Renewal fee patent year 05 | 14.01.2008 | Renewal fee patent year 06 | 14.01.2009 | Renewal fee patent year 07 | 28.01.2010 | Renewal fee patent year 08 | 26.01.2011 | Renewal fee patent year 09 | 11.01.2012 | Renewal fee patent year 10 | 10.01.2013 | Renewal fee patent year 11 | 21.01.2014 | Renewal fee patent year 12 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US5424552 (TSUJI TOSHIHIKO [JP], et al) [X] 1-29 * column 5, lines 46-59 *; | [X]US2002001071 (NOMURA HIROSHI [JP], et al) [X] 1-29 * paragraphs [0014] , [0031] , [0037] - [0072] - [0075] * * figures 1,2A,2B *; | [X]US2002008869 (VAN DER LAAN HANS [NL], et al) [X] 1-29 * paragraphs [0041] - [0048] * * figure 2 *; | [A] - MOERS M ET AL, "APPLICATION OF THE ABERRATION RING TEST (ARTEMIS) TO DETERMINE LENS QUALITY AND PREDICT ITS LITHOGRAPHY PERFORMANCE", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (20010227), vol. 4346, no. PART 1/2, ISSN 0277-786X, pages 1379 - 1387, XP008025416 [A] 1-29 * the whole document * DOI: http://dx.doi.org/10.1117/12.435676 | International search | [XP]JP2002324752 (NIKON CORP); | [X]EP1128217 (ASM LITHOGRAPHY BV [NL]); | [X]WO0055890 (NIPPON KOGAKU KK [JP], et al); | [X]JPH11176744 (CANON KK); | [A]US5420436 (SEYA EIICHI [JP], et al); | [A]US4920505 (SUZUKI KAZUAKI [JP]) | by applicant | US2002001071 | US2002008869 | US5424552 |