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EP1485946
European procedure
Extract from the Register of European Patents
EP About this file: EP1485946
| EP1485946 - SUBSTRATE SUPPORT [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 30.11.2007 Database last updated on 15.07.2024 | Most recent event Tooltip | 30.11.2007 | No opposition filed within time limit | published on 02.01.2008 [2008/01] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2007/04] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue Santa Clara, California 95054 / US | ||
| Former [2004/51] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
KURITA, Shinichi 3532 Rollingside Drive San Jose, CA 95148 / US | 02 /
BLONIGAN, Wendell, T. 32478 Montrey Drive Union City, CA 94587 / US | 03 /
ANWAR, Suhail 539 Villa Centre Way San Jose, CA 95128 / US | 04 /
KIYOTAKE, Toshio 1-Chome Asahigaoka, Shiga 27-1-308 / JP | 05 /
NGUYEN, Hung, T. 4399 Macbeth Circle Fremont, CA 94555 / US | [2004/51] | Representative(s) | Zimmermann, Gerd Heinrich, et al Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [N/P] |
| Former [2004/51] | Zimmermann, Gerd Heinrich, et al Zimmermann & Partner, P.O. Box 33 09 20 80069 München / DE | Application number, filing date | 03743151.7 | 18.02.2003 | [2004/51] | WO2003US04885 | Priority number, date | US20020084762 | 22.02.2002 Original published format: US 84762 | [2004/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO03073479 | Date: | 04.09.2003 | Language: | EN | [2003/36] | Type: | A1 Application with search report | No.: | EP1485946 | Date: | 15.12.2004 | Language: | EN | The application published by WIPO in one of the EPO official languages on 04.09.2003 takes the place of the publication of the European patent application. | [2004/51] | Type: | B1 Patent specification | No.: | EP1485946 | Date: | 24.01.2007 | Language: | EN | [2007/04] | Search report(s) | International search report - published on: | EP | 04.09.2003 | Classification | IPC: | H01L21/00 | [2004/51] | CPC: |
H01L21/68 (EP,KR,US);
H01L21/00 (KR);
H01L21/68728 (EP,US);
H01L21/68778 (EP,US);
H01L21/68792 (EP,US);
Y10S414/136 (EP,US);
| Designated contracting states | CH, LI [2007/04] |
| Former [2004/51] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, SE, SI, SK, TR | Title | German: | SUBSTRATTRÄGER | [2004/51] | English: | SUBSTRATE SUPPORT | [2004/51] | French: | SUPPORT DE SUBSTRAT | [2004/51] | Entry into regional phase | 15.09.2004 | National basic fee paid | 15.09.2004 | Designation fee(s) paid | 15.09.2004 | Examination fee paid | Examination procedure | 22.09.2003 | Request for preliminary examination filed International Preliminary Examining Authority: US | 15.09.2004 | Examination requested [2004/51] | 07.10.2005 | Despatch of a communication from the examining division (Time limit: M04) | 01.02.2006 | Reply to a communication from the examining division | 07.08.2006 | Communication of intention to grant the patent | 06.12.2006 | Fee for grant paid | 06.12.2006 | Fee for publishing/printing paid | Opposition(s) | 25.10.2007 | No opposition filed within time limit [2008/01] | Fees paid | Renewal fee | 04.02.2005 | Renewal fee patent year 03 | 06.02.2006 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]WO0205331 (APPLIED MATERILAS INC [US], et al) [X] 1-36 * the whole document *; | [X]US5974681 (GONZALEZ-MARTIN JOSE R [US], et al) [X] 1-36 * the whole document * * figures 2A,2B * * column 4, line 62 - column 5, line 12 * * column 3, line 45 - line 58 *; | [X]US6167893 (TAATJES STEVEN W [US], et al) [X] 1-36 * the whole document * * column 4; claim 1 *; | [X]US4788994 (SHINBARA KAORU [JP]) [X] 1-36 * figure 9 * * the whole document *; | [X]US5322079 (FUKUTOMI YOSHITERU [JP], et al) [X] 1-36 * the whole document * * column 2, line 16 - line 22 *; | [X]US5376216 (YOSHIOKA KATSUSHI [JP], et al) [X] 1-36 * the whole document * * figure 13 *; | [X]US5775000 (MAEKAWA TOSHIRO [JP], et al) [X] 1-36 * the whole document * * figures 3-8 *; | [X]EP0290218 (VARIAN ASSOCIATES [US]) [X] 1-36 * the whole document * * figures 7,8 *; | [AD]US6045620 (TEPMAN AVI [US], et al) [AD] 1,13,18,26,28,32 * the whole document * * figures 2,3 * |