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EP1502288
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EP About this file: EP1502288
| EP1502288 - LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 30.10.2009 Database last updated on 03.06.2024 | Most recent event Tooltip | 30.10.2009 | Application deemed to be withdrawn | published on 02.12.2009 [2009/49] | Applicant(s) | For all designated states Cymer, Inc. 17075 Thornmint Court San Diego, CA 92127 / US | [2005/05] | Inventor(s) | 01 /
DAS, Palash P. 2029 Paseo De Anza Vista, CA 92084 / US | 02 /
GIOVANARDI, Marco 132 Forest Street Melrose, MA 02176 / US | 03 /
FRANCIS, Gregory 2404 Bear rock Glen Escondido, CA 92026 / US | 04 /
DORN, Huckleberry B. 14 Anderson Street, Apt.3 Boston, MA 02114 / US | 05 /
ERLANDSEN, Kyle P. 156 Melrose Street Auburndale, MA 02466 / US | 06 /
NELSON, John W. 161 Rio Grande North Algodones, NM 87001 / US | 07 /
SANDSTROM, Richard L. 410 Bridoon Terrace Encinitas, CA 92024 / US | 08 /
ERSHOV, Alexander I. 11312 Meadow Flower Place San Diego, CA 92127 / US | 09 /
WEBB, R. KYLE 2490 Cilantro Glen Escondido, CA 92029 / US | [2009/10] |
| Former [2005/05] | 01 /
DAS, Palash P. 2029 Paseo De Anza Vista, CA 92084 / US | ||
| 02 /
GIOVANARDI, Marco 132 Forest Street Melrose, MA 02176 / US | |||
| 03 /
FRANCIS, Gregory 2404 Bear rock Glen Escondido, CA 92026 / US | |||
| 04 /
DORN, Huckleberry B. 14 Anderson Street, Apt.3 Boston, MA 02114 / US | |||
| 05 /
ERLANDSEN, Kyle P. 156 Melrose Street Auburndale, MA 02466 / US | |||
| 06 /
NELSON, John W. 161 Rio Grande North Algodones, NM 87001 / US | |||
| 07 /
SANDSTROM, Richard L. 410 Bridoon Terrace Encinitas, CA 92024 / US | |||
| 08 /
ERSHOV, Alexander I. 11312 Meadow Flower Place San Diego, CA 92127 / US | |||
| 09 /
WEBB, R, KYLE 2490 Cilantro Glen Escondido, CA 92029 / US | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE | [N/P] |
| Former [2005/05] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 03755348.4 | 05.05.2003 | [2005/05] | WO2003US14387 | Priority number, date | US20020141216 | 07.05.2002 Original published format: US 141216 | US20020233253 | 30.08.2002 Original published format: US 233253 | US20020255806 | 25.09.2002 Original published format: US 255806 | US20030443673P | 28.01.2003 Original published format: US 443673 P | US20030425361 | 29.04.2003 Original published format: US 425361 | [2005/05] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO03100826 | Date: | 04.12.2003 | Language: | EN | [2003/49] | Type: | A2 Application without search report | No.: | EP1502288 | Date: | 02.02.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 04.12.2003 takes the place of the publication of the European patent application. | [2005/05] | Search report(s) | International search report - published on: | US | 06.05.2004 | (Supplementary) European search report - dispatched on: | EP | 20.02.2006 | Classification | IPC: | H01L21/00, G03F7/20, H01S3/22, H01S3/00 | [2006/14] | CPC: |
G03F7/7055 (EP,KR,US);
G03F7/70025 (EP,KR,US);
G02B26/0816 (EP,KR,US);
G02B27/0972 (EP,KR,US);
G03F7/70041 (EP,KR,US);
G03F7/70058 (EP,KR,US);
H01S3/005 (EP,KR,US);
H01S3/0057 (EP,KR,US);
H01S3/0971 (EP,KR,US);
H01S3/225 (EP,KR,US);
H01S3/2308 (KR);
H01S3/2333 (EP,US);
H01S3/036 (EP,US);
H01S3/041 (EP,US);
H01S3/136 (EP,US);
|
| Former IPC [2005/05] | H01L21/00 | Designated contracting states | DE, NL [2005/34] |
| Former [2005/05] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | LITHOGRAPHIELASER MIT STRAHLABLIEFERUNGS- UND STRAHLRICHTUNGSSTEUERUNG | [2005/05] | English: | LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL | [2005/05] | French: | LASER DE LITHOGRAPHIE AVEC COMMANDE DE DISTRIBUTION ET DE POINTAGE DU FAISCEAU | [2005/05] | Entry into regional phase | 03.11.2004 | National basic fee paid | 03.11.2004 | Search fee paid | 03.11.2004 | Designation fee(s) paid | 03.11.2004 | Examination fee paid | Examination procedure | 05.12.2003 | Request for preliminary examination filed International Preliminary Examining Authority: US | 03.11.2004 | Amendment by applicant (claims and/or description) | 03.11.2004 | Examination requested [2005/05] | 24.04.2006 | Despatch of a communication from the examining division (Time limit: M04) | 04.09.2006 | Reply to a communication from the examining division | 23.05.2007 | Despatch of a communication from the examining division (Time limit: M04) | 02.10.2007 | Reply to a communication from the examining division | 30.01.2009 | Communication of intention to grant the patent | 10.06.2009 | Application deemed to be withdrawn, date of legal effect [2009/49] | 15.07.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2009/49] | Fees paid | Renewal fee | 19.05.2005 | Renewal fee patent year 03 | 30.05.2006 | Renewal fee patent year 04 | 30.05.2007 | Renewal fee patent year 05 | 28.05.2008 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.05.2009 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]US4398806 (BENNETT KEITH E [US], et al) [Y] 89,90,105,106,117-119 * abstract *; | [Y]US5309456 (HORTON JAMES A [US]) [Y] 91-106 * abstract *; | [A]US5343489 (WANGLER JOHANNES [DE]) [A] 83,99,111 * abstract *; | [A]US5559584 (MIYAJI AKIRA [JP], et al) [A] 82,93,97,110 * column 8, lines 1-41; figures 1,5 *; | [A]US5661748 (GHILAI SHAY [IL], et al) [A] 91-106* abstract *; | [Y]DE19960368 (MICRONIC LASER SYSTEMS AB TAEB [SE]) [Y] 77-121 * abstract * * column 3, lines 9-28 * * column 2, lines 55-67 *; | [Y]US6163010 (KOBSA HENRY [US]) [Y] 89,90,105,106,117-119 * column 7, lines 26-31; figure 1 *; | [Y]US2001028443 (YABU SHUICHI [JP]) [Y] 77-121 * paragraphs [0100] - [0125]; figure 1 *; | [Y]US2002021735 (GOVORKOV SERGEI V [US], et al) [Y] 77-121 * paragraphs [0030] , [0038] , [0039]; figures 1,2 *; | [Y]US2002044586 (MYERS DAVID W [US], et al) [Y] 77-121 * abstract * * paragraphs [0247] - [0252] * * paragraphs [0149] , [0157] *; | [Y]US2002051126 (OGATA MASARU [JP]) [Y] 77-121 * abstract * | International search | [Y]US4959840 ; | [Y]US5771258 ; | [Y]US6188710 | Examination | US6014206 |