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EP1545836
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EP About this file: EP1545836
| EP1545836 - RETAINING RING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 06.08.2010 Database last updated on 03.06.2024 | Most recent event Tooltip | 06.08.2010 | Application deemed to be withdrawn | published on 08.09.2010 [2010/36] | Applicant(s) | For all designated states Ensinger Kunststofftechnologie GbR Rudolf-Diesel-Strasse 8 71154 Nufringen / DE | [2005/26] | Inventor(s) | 01 /
ENSINGER, Wilfried Rudolf-Diesel-Strasse 8 71154 Nufringen / DE | [2005/26] | Representative(s) | Wössner, Gottfried HOEGER, STELLRECHT & PARTNER Patentanwälte Uhlandstrasse 14 c 70182 Stuttgart / DE | [N/P] |
| Former [2005/26] | Wössner, Gottfried, Dr. Dipl.-Chem. HOEGER, STELLRECHT & PARTNER Patentanwälte Uhlandstrasse 14c 70182 Stuttgart / DE | Application number, filing date | 03757898.6 | 01.10.2003 | [2005/26] | WO2003EP10869 | Priority number, date | DE2002147179 | 02.10.2002 Original published format: DE 10247179 | [2005/26] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO2004033151 | Date: | 22.04.2004 | Language: | DE | [2004/17] | Type: | A1 Application with search report | No.: | EP1545836 | Date: | 29.06.2005 | Language: | DE | The application published by WIPO in one of the EPO official languages on 22.04.2004 takes the place of the publication of the European patent application. | [2005/26] | Search report(s) | International search report - published on: | EP | 22.04.2004 | Classification | IPC: | B24B37/04 | [2005/26] | CPC: |
B24B37/32 (EP,US);
H01L21/304 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/26] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | HALTERING ZUM HALTEN VON HALBLEITERWAFERN IN EINER CHEMISCH-MECHANISCHEN POLIERVORRICHTUNG | [2005/26] | English: | RETAINING RING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE | [2005/26] | French: | ANNEAU DE FIXATION DE PLAQUETTES EN SEMICONDUCTEURS DANS UN DISPOSITIF DE POLISSAGE PAR VOIE CHIMIQUE-MECANIQUE | [2005/26] | Entry into regional phase | 17.02.2005 | National basic fee paid | 17.02.2005 | Designation fee(s) paid | 17.02.2005 | Examination fee paid | Examination procedure | 17.02.2005 | Examination requested [2005/26] | 30.10.2006 | Despatch of a communication from the examining division (Time limit: M06) | 27.04.2007 | Reply to a communication from the examining division | 04.11.2009 | Communication of intention to grant the patent | 16.03.2010 | Application deemed to be withdrawn, date of legal effect [2010/36] | 20.04.2010 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2010/36] | Fees paid | Renewal fee | 26.10.2005 | Renewal fee patent year 03 | 28.10.2006 | Renewal fee patent year 04 | 27.10.2007 | Renewal fee patent year 05 | 24.10.2008 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.10.2009 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XY]US6186880 (GONZALEZ JOSE [US], et al) [X] 1-9,11,13,14 * column 3, line 66 - column 4, line 11 * * column 4, line 48 - column 6, line 37 * * column 7, line 19 - line 30 * * figures 6-8,17,18 * [Y] 19,27; | [X]EP0841123 (APPLIED MATERIALS INC [US]) [X] 1-3,10 * column 10, line 16 - line 26 * * column 13, line 18 - line 46 * * column 23, line 12 - line 30 * * figures 4B,8A,14B *; | [X]US6354927 (NATALICIO JOHN [US]) [X] 1,11,12 * column 5, line 22 - line 57 * * figures 1,2 *; | [DX]US6251215 (ZUNIGA STEVEN M [US], et al) [DX] 1,15,20,24-26 * abstract * * column 5, line 34 - column 6, line 49 * * figure 3 *; | [Y]US5993302 (CHEN HUNG [US], et al) [Y] 19 * column 5, line 32 - column 6, line 14 * * figures 4,5 *; | [X]EP0747167 (APPLIED MATERIALS INC [US]) [X] 1,21-23 * column 10, line 23 - column 11, line 21 * * figure 4 *; | [YA]JP2001121411 ; | US6585850 [ ] (KENJI SUZUKI [JP], et al) | [YA] - PATENT ABSTRACTS OF JAPAN, (20010309), vol. 2000, no. 22, & JP2001121411 A 20010508 (APPLIED MATERIALS INC) [Y] 27 * abstract * [A] 6-8 |