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EP1560945
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EP About this file: EP1560945
| EP1560945 - METHOD AND APPARATUS FOR PROVIDING AND INTEGRATING A GENERAL METAL DELIVERY SOURCE (GMDS) WITH ATOMIC LAYER DEPOSITION (ALD) [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 01.12.2006 Database last updated on 22.05.2024 | Most recent event Tooltip | 01.12.2006 | Withdrawal of application | published on 03.01.2007 [2007/01] | Applicant(s) | For all designated states GENUS, INC. 1139 Karlstad Drive Sunnyvale, CA 94089 / US | [2005/32] | Inventor(s) | 01 /
SNEH, Ofer 1619 Garnet Street Broomfield, CO 80020 / US | [2005/32] | Representative(s) | Schäfer, Wolfgang Dreiss Patentanwälte Postfach 10 37 62 70032 Stuttgart / DE | [N/P] |
| Former [2005/32] | Schäfer, Wolfgang, Dipl.-Ing. Dreiss, Fuhlendorf, Steimle & Becker Postfach 10 37 62 70032 Stuttgart / DE | Application number, filing date | 03783276.3 | 10.11.2003 | [2005/32] | WO2003US35768 | Priority number, date | US20020295614 | 14.11.2002 Original published format: US 295614 | [2005/32] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2004044957 | Date: | 27.05.2004 | Language: | EN | [2004/22] | Type: | A2 Application without search report | No.: | EP1560945 | Date: | 10.08.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.05.2004 takes the place of the publication of the European patent application. | [2005/32] | Search report(s) | International search report - published on: | US | 07.10.2004 | Classification | IPC: | C23C16/00 | [2005/32] | CPC: |
C23C16/405 (EP,US);
H01L21/20 (KR);
C23C16/4488 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/32] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | VERFAHREN UND VORRICHTUNG ZUR BEREITSTELLUNG EINER GENERELLEN METALLZUFUHRQUELLE (GMDS) MIT ATOMLAGENABSCHEIDUNG (ALD) | [2005/32] | English: | METHOD AND APPARATUS FOR PROVIDING AND INTEGRATING A GENERAL METAL DELIVERY SOURCE (GMDS) WITH ATOMIC LAYER DEPOSITION (ALD) | [2005/32] | French: | PROCEDE ET APPAREIL PERMETTANT DE FOURNIR ET D'INTEGRER UNE SOURCE GENERALE D'APPORT DE METAL (GMDS) A LA'IDE D'UN DEPOT PAR COUCHE ATOMIQUE (ALD) | [2005/32] | Entry into regional phase | 23.04.2005 | National basic fee paid | 23.04.2005 | Search fee paid | 23.04.2005 | Designation fee(s) paid | 23.04.2005 | Examination fee paid | Examination procedure | 23.04.2005 | Examination requested [2005/32] | 07.10.2006 | Application withdrawn by applicant [2007/01] | Fees paid | Renewal fee | 23.04.2005 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]US6225745 (SRIVASTAVA ASEEM K [US]); | [Y]US6143081 (SHINRIKI HIROSHI [JP], et al); | [Y]US6007671 (FUJIMURA SHUZO [JP], et al); | [Y]US3614658 (GOLDSBOROUGH JOHN P); | [Y]US6071572 (MOSELY RODERICK C [US], et al) | [X] - HASSANZADEH P.& ANDREWS L., "Infrared spectra of germanium sulfide, germanium disulfide, germanium oxide sulfide and germanium dioxide in solid argon", JOURNAL OF PHYSICAL CHEMISTRY, (1992), vol. 96, pages 6181 - 6185, XP002981255 DOI: http://dx.doi.org/10.1021/j100194a018 |